scholarly journals Ptychographic imaging with partially coherent plasma EUV sources

2017 ◽  
Vol 6 (6) ◽  
Author(s):  
Jan Bußmann ◽  
Michal Odstrčil ◽  
Yusuke Teramoto ◽  
Larissa Juschkin
Keyword(s):  
High Resolution ◽  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Visible Spectral Range ◽  
Image Resolution ◽  
Plasma Radiation ◽  
Photon Flux ◽  
Light Sources ◽  
Range Image ◽  
Diffractive Imaging

AbstractWe report on high-resolution lens-less imaging experiments based on ptychographic scanning coherent diffractive imaging (CDI) method employing compact plasma sources developed for extreme ultraviolet (EUV) lithography applications. Two kinds of discharge sources were used in our experiments: a hollow-cathode-triggered pinch plasma source operated with oxygen and for the first time a laser-assisted discharge EUV source with a liquid tin target. Ptychographic reconstructions of different samples were achieved by applying constraint relaxation to the algorithm. Our ptychography algorithms can handle low spatial coherence and broadband illumination as well as compensate for the residual background due to plasma radiation in the visible spectral range. Image resolution down to 100 nm is demonstrated even for sparse objects, and it is limited presently by the sample structure contrast and the available coherent photon flux. We could extract material properties by the reconstruction of the complex exit-wave field, gaining additional information compared to electron microscopy or CDI with longer-wavelength high harmonic laser sources. Our results show that compact plasma-based EUV light sources of only partial spatial and temporal coherence can be effectively used for lens-less imaging applications. The reported methods may be applied in combination with reflectometry and scatterometry for high-resolution EUV metrology.

scholarly journals Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams

2018 ◽  
Vol 4 (10) ◽  
pp. eaau4295 ◽  
Author(s):  
Robert M. Karl ◽  
Giulia F. Mancini ◽  
Joshua L. Knobloch ◽  
Travis D. Frazer ◽  
Jorge N. Hernandez-Charpak ◽  
...  
Keyword(s):  
Functional Imaging ◽  
Extreme Ultraviolet ◽  
Imaging Techniques ◽  
High Harmonic ◽  
Three Dimensional ◽  
Dynamic Imaging ◽  
Significant Advance ◽  
Grand Challenge ◽  
Diffractive Imaging ◽  
Full Field

Imaging charge, spin, and energy flow in materials is a current grand challenge that is relevant to a host of nanoenhanced systems, including thermoelectric, photovoltaic, electronic, and spin devices. Ultrafast coherent x-ray sources enable functional imaging on nanometer length and femtosecond timescales particularly when combined with advances in coherent imaging techniques. Here, we combine ptychographic coherent diffractive imaging with an extreme ultraviolet high harmonic light source to directly visualize the complex thermal and acoustic response of an individual nanoscale antenna after impulsive heating by a femtosecond laser. We directly image the deformations induced in both the nickel tapered nanoantenna and the silicon substrate and see the lowest-order generalized Lamb wave that is partially confined to a uniform nanoantenna. The resolution achieved—sub–100 nm transverse and 0.5-Å axial spatial resolution, combined with ≈10-fs temporal resolution—represents a significant advance in full-field dynamic imaging capabilities. The tapered nanoantenna is sufficiently complex that a full simulation of the dynamic response would require enormous computational power. We therefore use our data to benchmark approximate models and achieve excellent agreement between theory and experiment. In the future, this work will enable three-dimensional functional imaging of opaque materials and nanostructures that are sufficiently complex that their functional properties cannot be predicted.

scholarly journals Generation and characterisation of isolated attosecond pulses at 100 kHz repetition rate

2021 ◽  
Author(s):  
Tobias Witting ◽  
Mikhail Osolodkov ◽  
Felix Schell ◽  
Felipe Morales ◽  
Serguei Patchkovskii ◽  
...  
Keyword(s):  
Surface Science ◽  
Repetition Rate ◽  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Attosecond Pulse ◽  
Light Sources ◽  
Pump Probe ◽  
Attosecond Pulses ◽  
Atomic And Molecular Physics ◽  
Pump Probe Experiment

Abstract The generation of coherent light pulses in the extreme ultraviolet (XUV) spectral region with attosecond pulse durations constitutes the foundation of the field of attosecond science [1]. Twenty years after the first demonstration of isolated attosecond pulses [2], they continue to be a unique tool enabling the observation and control of electron dynamics in atoms, molecules and solids [3, 4]. It has long been identified that an increase in the repetition rate of attosecond light sources is necessary for many applications in atomic and molecular physics [5, 6], surface science [7], and imaging [8]. Although high harmonic generation (HHG) at repetition rates exceeding 100 kHz, showing a continuum in the cut-off region of the XUV spectrum was already demonstrated in 2013 [9], the number of photons per pulse was insufficient to perform pulse characterisation via attosecond streaking [10], let alone to perform a pump-probe experiment. Here we report on the generation and full characterisation of XUV attosecond pulses via HHG driven by near-single-cycle pulses at a repetition rate of 100 kHz. The high number of 106 XUV photons per pulse on target enables attosecond electron streaking experiments through which the XUV pulses are determined to consist of a dominant single attosecond pulse. These results open the door for attosecond pump-probe spectroscopy studies at a repetition rate one or two orders of magnitude above current implementations.

scholarly journals Coherent control in the extreme ultraviolet and attosecond regime by synchrotron radiation

2019 ◽  
Vol 10 (1) ◽  
Author(s):  
Y. Hikosaka ◽  
T. Kaneyasu ◽  
M. Fujimoto ◽  
H. Iwayama ◽  
M. Katoh
Keyword(s):  
Synchrotron Radiation ◽  
Coherent Control ◽  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Light Sources ◽  
Light Pulses ◽  
Research Areas ◽  
Control Research

Abstract Quantum manipulation of populations and pathways in matter by light pulses, so-called coherent control, is currently one of the hottest research areas in optical physics and photochemistry. The forefront of coherent control research is moving rapidly into the regime of extreme ultraviolet wavelength and attosecond temporal resolution. This advance has been enabled by the development of high harmonic generation light sources driven by intense femtosecond laser pulses and by the advent of seeded free electron laser sources. Synchrotron radiation, which is usually illustrated as being of poor temporal coherence, hitherto has not been considered as a tool for coherent control. Here we show an approach based on synchrotron radiation to study coherent control in the extreme ultraviolet and attosecond regime. We demonstrate this capability by achieving wave-packet interferometry on Rydberg wave packets generated in helium atoms.

scholarly journals Towards attosecond imaging at the nanoscale using broadband holography-assisted coherent imaging in the extreme ultraviolet

2021 ◽  
Vol 4 (1) ◽  
Author(s):  
Wilhelm Eschen ◽  
Sici Wang ◽  
Chang Liu ◽  
Robert Klas ◽  
Michael Steinert ◽  
...  
Keyword(s):  
High Resolution ◽  
Spatial Resolution ◽  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Ultrafast Dynamics ◽  
Single Shot ◽  
Spectral Bandwidth ◽  
Resolution Limit ◽  
Coherent Imaging ◽  
Large Bandwidth

AbstractNanoscale coherent imaging has emerged as an indispensable modality, allowing to surpass the resolution limit given by classical imaging optics. At the same time, attosecond science has experienced enormous progress and has revealed the ultrafast dynamics in complex materials. Combining attosecond temporal resolution of pump-probe experiments with nanometer spatial resolution would allow studying ultrafast dynamics on the smallest spatio-temporal scales but has not been demonstrated yet. To date, the large bandwidth of attosecond pulses poses a major challenge to high-resolution coherent imaging. Here, we present broadband holography-enhanced coherent imaging, which enables the combination of high-resolution coherent imaging with a large spectral bandwidth. By implementing our method at a high harmonic source, we demonstrate a spatial resolution of 34 nm in combination with a spectral bandwidth of 5.5 eV at a central photon energy of 92 eV. The method is single-shot capable and retrieves the spectrum from the measured diffraction pattern.

scholarly journals Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source

PhotoniX ◽  
2021 ◽  
Vol 2 (1) ◽  
Author(s):  
Robert Klas ◽  
Alexander Kirsche ◽  
Martin Gebhardt ◽  
Joachim Buldt ◽  
Henning Stark ◽  
...  
Keyword(s):  
Pulse Duration ◽  
Extreme Ultraviolet ◽  
Short Pulse ◽  
Signal To Noise Ratio ◽  
Average Power ◽  
High Harmonic ◽  
Photon Flux ◽  
Fibre Laser ◽  
Short Pulse Duration ◽  
Ultra Short Pulse

AbstractHigh harmonic generation (HHG) enables coherent extreme-ultraviolet (XUV) radiation with ultra-short pulse duration in a table-top setup. This has already enabled a plethora of applications. Nearly all of these applications would benefit from a high photon flux to increase the signal-to-noise ratio and decrease measurement times. In addition, shortest pulses are desired to investigate fastest dynamics in fields as diverse as physics, biology, chemistry and material sciences. In this work, the up-to-date most powerful table-top XUV source with 12.9 ± 3.9 mW in a single harmonic line at 26.5 eV is demonstrated via HHG of a frequency-doubled and post-compressed fibre laser. At the same time the spectrum supports a Fourier-limited pulse duration of sub-6 fs in the XUV, which allows accessing ultrafast dynamics with an order of magnitude higher photon flux than previously demonstrated. This concept will greatly advance and facilitate applications of XUV radiation in science and technology and enable photon-hungry ultrafast studies.

High-NA EUV lithography: current status and outlook for the future

2022 ◽  
Author(s):  
Harry Jay Levinson
Keyword(s):  
High Resolution ◽  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
High Volume ◽  
Current Status ◽  
Light Sources ◽  
Line Edge Roughness ◽  
Optical Scanners ◽  
Euv Lithography ◽  
Edge Roughness

Abstract High-NA extreme ultraviolet (EUV) lithography is currently in development. Fabrication of exposure tools and optics with a numerical aperture (NA) equal to 0.55 has started at ASML and Carl Zeiss. Lenses with such high NA will have very small depths-of-focus, which will require improved focus systems and significant improvements in wafer flatness during processing. Lenses are anamorphic to address mask 3D issues, which results in wafer field sizes of 26 mm × 16.5 mm, half that of lower NA EUV tools and optical scanners. Production of large die will require stitching. Computational infrastructure is being created to support high-NA lithography, including simulators that use Tatian polynomials to characterize the aberrations of lenses with central obscurations. High resolution resists that meet the line-edge roughness (LER) and defect requirements for high-volume manufacturing (HVM) also need to be developed. High power light sources will also be needed to limit photon shot noise.

Ultra-broadband support determination for extreme ultraviolet coherent diffractive imaging from a high harmonic source

2013 ◽  
Vol 15 (9) ◽  
pp. 094009 ◽  
Author(s):  
A D Parsons ◽  
R T Chapman ◽  
P Baksh ◽  
B Mills ◽  
S Bajt ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging ◽  
Harmonic Source

scholarly journals A multipurpose end-station for atomic, molecular and optical sciences and coherent diffractive imaging at ELI beamlines

2021 ◽  
Author(s):  
Eva Klimešová ◽  
Olena Kulyk ◽  
Ziaul Hoque ◽  
Andreas Hult Roos ◽  
Krishna P. Khakurel ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
High Harmonic ◽  
Liquid Jets ◽  
Velocity Map Imaging ◽  
Diffractive Imaging ◽  
Time Resolved ◽  
Coherent Diffractive Imaging ◽  
The Status ◽  
Magnetic Bottle ◽  
Focused Beams

AbstractWe report on the status of a users’ end-station, MAC: a Multipurpose station for Atomic, molecular and optical sciences and Coherent diffractive imaging, designed for studies of structure and dynamics of matter in the femtosecond time-domain. MAC is located in the E1 experimental hall on the high harmonic generation (HHG) beamline of the ELI Beamlines facility. The extreme ultraviolet beam from the HHG beamline can be used at the MAC end-station together with a synchronized pump beam (which will cover the NIR/Vis/UV or THz range) for time-resolved experiments on different samples. Sample delivery systems at the MAC end-station include a molecular beam, a source for pure or doped clusters, ultrathin cylindrical or flat liquid jets, and focused beams of substrate-free nanoparticles produced by an electrospray or a gas dynamic virtual nozzle combined with an aerodynamic lens stack. We further present the available detectors: electron/ion time-of-flight and velocity map imaging spectrometers and an X-ray camera, and discuss future upgrades: a magnetic bottle electron spectrometer, production of doped nanodroplets and the planned developments of beam capabilities at the MAC end-station.

High resolution coherent diffractive imaging with a table-top extreme ultraviolet source

2014 ◽  
Vol 116 (17) ◽  
pp. 173104 ◽  
Author(s):  
Hoang Vu Le ◽  
Khuong Ba Dinh ◽  
Peter Hannaford ◽  
Lap Van Dao
Keyword(s):  
High Resolution ◽  
Extreme Ultraviolet ◽  
Diffractive Imaging ◽  
Coherent Diffractive Imaging
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