Dense and smooth epitaxial BaTiO3 thin films by the dipping-pyrolysis process
1999 ◽
Vol 14
(2)
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pp. 592-596
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Dense and smooth BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of barium and titanium naphthenates. Combination effects of prefiring [at 150–450 °C in air or low oxygen partial pressure, p(O2)[ and final heat treatment [at 850 °C in air or low p(O2)[ on preparation of BaTiO3 thin films were examined. An epitaxial BaTiO3 thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiring under low p(O2) at 250 °C and final heat treatment under low p (O2) at 850 °C.
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2018 ◽
Vol 17
(03)
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pp. 1760037
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1994 ◽
Vol 33
(Part 2, No. 5B)
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pp. L718-L721
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2012 ◽
Vol 476-478
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pp. 351-356
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