Exafs Studies of Cobalt Silicide Formation Produced by High Dose Ion Implantation

1988 ◽  
Vol 143 ◽  
Author(s):  
Z. Tan ◽  
J. I. Budnick ◽  
F. Sanchez ◽  
G. Tourillon ◽  
F. Namavar ◽  
...  

AbstractThe early stages of cobalt silicide formation in high dose (1.0 to 8.0× 1017Co/cm2) cobalt implanted Si(100) are studied by extended X-ray absorption fine structure (EXAFS), X-ray diffraction (XRD) and Rutherford backscattering spectroscopy (RBS). Locally ordered silicide that is not detectable in XRD has been observed with EXAFS in the as-implanted samples. Long-range ordered phases are observed in the 3 × 1017Co/cm2 samples. After thermal annealing at 700–750°C, single phase CoSi2 with (400) orientation is formed in all implants.


1991 ◽  
Vol 235 ◽  
Author(s):  
Z. Tan ◽  
F. Namavar ◽  
S. M. Heald ◽  
J. I. Budnick ◽  
F. H. Sanchez

ABSTRACTWe have studied the silicide formation in Fe-implanted Si(100), with 1×1017-1×1018 Fe/cm2, using extended x-ray-absorption fine structure (EXAFS), x-ray diffraction and Rutherford backscattering spectrometry (RBS) methods. In the samples as-implanted at 350 °C, no silicide was observed at doses below 3×1017 Fe/cm2. At 5×1017 Fe/cm2, both α-FeSi2 and (β-FeSi2 form but α-FeSi2 appears to be the majority phase. As the dose increases to 7×1017 and above, ordered FeSi forms, but implantation damage is severe and a large number of Fe atoms are in very disordered environments. In addition to FeSi, Fe5Si3 was also observed in the 1×1018 Fe/cm2 sample. Upon post-implantation annealing at 700 °C or 900 °C, single phase P-FeSi2 was obtained independent of the dosage.





1998 ◽  
Vol 84 (10) ◽  
pp. 5515-5524 ◽  
Author(s):  
A. Kuzmin ◽  
J. Purans ◽  
E. Cazzanelli ◽  
C. Vinegoni ◽  
G. Mariotto


2001 ◽  
Vol 90 (12) ◽  
pp. 6440-6446 ◽  
Author(s):  
E. Chassot ◽  
H. Oudadesse ◽  
J. Irigaray ◽  
E. Curis ◽  
S. Bénazeth ◽  
...  


2008 ◽  
Vol 79 (12) ◽  
pp. 126101 ◽  
Author(s):  
Quan Cai ◽  
Qiang Wang ◽  
Wei Wang ◽  
Guang Mo ◽  
Kunhao Zhang ◽  
...  


2013 ◽  
Vol 27 (30) ◽  
pp. 1350174 ◽  
Author(s):  
HAO LIU ◽  
HAIOU WANG ◽  
MENGXIONG CAO ◽  
WEISHI TAN ◽  
YANGGUANG SHI ◽  
...  

In order to study the microstructure of Fe – Ga alloy, Fe 85 Ga 15 ribbons prepared with different wheel velocity were studied by high resolution X-ray diffraction (HRXRD) and extend X-ray absorption fine structure (EXAFS). HRXRD patterns showed that only disordered A 2 phase was observed in as-cast Fe 85 Ga 15 alloy. A modified- DO 3 phase was detected in all of the melt spun samples. The HRXRD associated with EXAFS results indicated that Ga atoms were located as second-nearest neighbor along [100] orientation. A little DO 3 phase was found in ribbons annealed at 1000°C under 0.06 MPa Ar atmosphere. The result of magnetostriction measurement revealed that in the ribbon prepared with higher wheel velocity, more modified- DO 3 phase will enhance the magnetostriction. DO 3 phase in the annealed sample will deteriorate the magnetostrictive properties of Fe – Ga ribbons.



2004 ◽  
Vol 831 ◽  
Author(s):  
K.P. O'Donnell ◽  
V. Katchkanov ◽  
K. Wang ◽  
R.W. Martin ◽  
P.R. Edwards ◽  
...  

ABSTRACTThis presentation reviews recent lattice location studies of rare earth (RE) ions in GaN by electron emission channelling (EC) and X-ray absorption fine structure (XAFS) techniques. These studies agree that RE ions at low concentrations (whether they are incorporated during growth or introduced later by ion implantation) predominantly occupy Ga substitutional sites, as expected from considerations of charge equivalence. We combine this result with some examples of the well-documented richness of optical spectra of GaN:RE3+ to suggest that the luminescence of these materials may be ascribed to a family of rather similar sites, all of which feature the REGa defect.



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