Interface Structure and Layer Synthesis Modes in Mesotaxial Si/CoSi2/Si Structures
Keyword(s):
AbstractWe report observations of interfacial structure and consequences for layer synthesis modes in mesotaxial Si/CoSi2/Si structures, as deduced from high resolution transmission electron microscopy (HRTEM). It is argued that relative crystal misalignments arising from the lattice parameter mismatch between the Si and CoSi2 may render classic rigid shift measurements of interfacial structure inaccurate. An alternative method for determining interfacial structure at threedimensional precipitates by analyzing crystal stacking sequences is demonstrated.
1993 ◽
Vol 32
(Part 1, No. 6A)
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pp. 2824-2831
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2000 ◽
Vol 192-195
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pp. 283-286
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2009 ◽
Vol 24
(1)
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pp. 192-197
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2003 ◽
Vol 255
(1-2)
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pp. 93-101
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2008 ◽
Vol 14
(5)
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pp. 433-438
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1994 ◽
Vol 52
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pp. 758-759