The Effects of Lead-Compensation and Thermal Processing on the Characteristics of DC-Magnetron Sputtered Lead Zirconate Titanate Thin Films

1991 ◽  
Vol 230 ◽  
Author(s):  
Vinay Chikarmane ◽  
Chandra Sudhama ◽  
Jiyoung Kim ◽  
Jack Lee ◽  
A I Tasch
Keyword(s):  
Lead Zirconate Titanate ◽  
Thermal Processing ◽  
Large Scale ◽  
Random Access ◽  
Lead Zirconate ◽  
Thermal Budget ◽  
Low Leakage ◽  
Zirconate Titanate ◽  
Low Leakage Current ◽  
Scale Integration

AbstractThe feasibility of the fabrication of thin film capacitors of Lead Zirconate Titanate (PZT) by reactive DC-Magnetron sputtering, with large switched charge and low leakage current densities for ultra-large scale integration Dynamic Random Access Memory (ULSI DRAM) applications has been demonstrated. As-deposited films were found to be predominantly pyrochlore; therefore, a subsequent phase transformation-inducing thermal processing step was key to obtaining device quality films. The importance of the thermal budget in optimizing the device characteristics of PZT films is discussed. The importance of the role of Pb compensation in lowering the required thermal budget and significantly enhancing device characteristics is shown.

Lead zirconate titanate films by rapid thermal processing

1991 ◽  
Vol 58 (11) ◽  
pp. 1161-1163 ◽  
Author(s):  
C. V. R. Vasant Kumar ◽  
M. Sayer ◽  
R. Pascual ◽  
D. T. Amm ◽  
Z. Wu ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Lead Zirconate ◽  
Zirconate Titanate

Oxygen transport during annealing of Pb(Zr,Ti)O3 thin films in O2 gas and its effect on their conductivity

2001 ◽  
Vol 16 (10) ◽  
pp. 3005-3008 ◽  
Author(s):  
F. Ayguavives ◽  
B. Agius ◽  
B. EaKim ◽  
I. Vickridge
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Low Leakage ◽  
Pzt Film ◽  
Low Leakage Current ◽  
Pzt Thin Film ◽  
Current Densities

Lead zirconate titanate (PZT) thin films were deposited in a reactive argon/oxygen gas mixture by radio-frequency-magnetron sputtering. The use of a metallic target allows us to control the oxygen incorporation in the PZT thin film and also, using oxygen 18 as a tracer, to study the oxygen diffusion in the thin films. Electrical properties and crystallization were optimized with a 90-nm PZT thin film grown on RuO2 electrodes. These PZT films, annealed with a very modest thermal budget (550 °C) show very low leakage current densities (J = 2 × 10−8 A/cm2 at 1 V). In this article we show that a strong correlation exists between the oxygen composition in the PZT film and the leakage current density.

In-situ monitoring of liquid composite molding process using piezoelectric sensor network

2020 ◽  
pp. 147592172095808
Author(s):  
Xinlin Qing ◽  
Xiao Liu ◽  
Jianjian Zhu ◽  
Yishou Wang
Keyword(s):  
Sensor Network ◽  
Lead Zirconate Titanate ◽  
Large Scale ◽  
Lead Zirconate ◽  
Liquid Composite Molding ◽  
Molding Process ◽  
Zirconate Titanate ◽  
Composite Molding ◽  
Piezoelectric Lead Zirconate Titanate

The excellent properties of advanced composite materials provide great opportunities for making industrial structures large-scale and intelligent. Liquid composite molding process is suitable for manufacturing complex large-scale composite structures and has the potential for low cost and mass production. In present work, the concept of Networked Elements for Resin Visualization and Evaluation network was developed to measure and monitor the manufacturing process in-situ. This paper investigates the capability of piezoelectric lead-zirconate-titanate sensors in the Networked Elements for Resin Visualization and Evaluation network to monitor two important parameters in liquid composite molding process, including the resin flow front and the progress of the reaction. The piezoelectric lead-zirconate-titanate sensor network can be integrated with a composite structure either installed on the interface between the mold and laminates or embedded inside the laminates during the liquid composite molding process. Experimental results demonstrated that the liquid composite molding process can be effectively monitored by the embedded Networked Elements for Resin Visualization and Evaluation network with a piezoelectric lead-zirconate-titanate sensor network.

Low thermal budget lead zirconate titanate thick films integrated on Si for piezo-MEMS applications

2020 ◽  
Vol 219 ◽  
pp. 111145 ◽  
Author(s):  
Yingying Wang ◽  
Jing Yan ◽  
Hongbo Cheng ◽  
Ning Chen ◽  
Peng Yan ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Thick Films ◽  
Lead Zirconate ◽  
Thermal Budget ◽  
Zirconate Titanate ◽  
Low Thermal Budget
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