Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

AbstractThe origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.

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High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

MRS Proceedings ◽

10.1557/proc-451-521 ◽

1996 ◽

Vol 451 ◽

Cited By ~ 1

Author(s):

T. Shimizu ◽

M. Murahara

Keyword(s):

Contact Angle ◽

High Resolution ◽

Laser Beam ◽

Thin Layer ◽

Functional Groups ◽

Excimer Laser ◽

Laser Fluence ◽

Large Area ◽

Three Solutions ◽

Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

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Laser-induced damage threshold by high pulse repetition rate ArF excimer laser radiation

Laser-induced Damage in Optical Materials 2019 ◽

10.1117/12.2536268 ◽

2019 ◽

Author(s):

Takahito Kumazaki ◽

Daisuke Tei ◽

Masakazu Hattori ◽

Yousuke Fujimaki ◽

Junichi Fujimoto ◽

...

Keyword(s):

Laser Radiation ◽

Excimer Laser ◽

Repetition Rate ◽

Pulse Repetition Rate ◽

Damage Threshold ◽

High Pulse Repetition Rate ◽

High Pulse ◽

Excimer Laser Radiation ◽

Arf Excimer Laser ◽

Laser Induced Damage

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High-repetition-rate ArF excimer laser for microlithography

10.1117/12.405749 ◽

2000 ◽

Author(s):

Osamu Wakabayashi ◽

Tatsuo Enami ◽

Ken Ishii ◽

Katsutomo Terashima ◽

Yasuo Itakura ◽

...

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

High Repetition Rate ◽

High Repetition ◽

Arf Excimer Laser

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Reduction of Acoustic Waves Induced by Discharge in High Repetition Rate ArF Excimer Laser Cavity to Obtain Narrow-Bandwidth Laser Light

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.7719 ◽

2006 ◽

Vol 45 (10A) ◽

pp. 7719-7723 ◽

Cited By ~ 3

Author(s):

Koji Kakizaki ◽

Takayuki Yabu ◽

Tsukasa Hori ◽

Hakaru Mizoguchi ◽

Yosuke Sakai

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Acoustic Waves ◽

Laser Light ◽

Laser Cavity ◽

High Repetition Rate ◽

High Repetition ◽

Narrow Bandwidth ◽

Arf Excimer Laser

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Argon Fluoride Laser-Excited Atomic Fluorescence of Arsenic in a H2/Air Flame and in an Ar ICP

Applied Spectroscopy ◽

10.1366/0003702944027462 ◽

1994 ◽

Vol 48 (10) ◽

pp. 1213-1217 ◽

Cited By ~ 11

Author(s):

D. Hueber ◽

B. W. Smith ◽

S. Madden ◽

J. D. Winefordner

Keyword(s):

Excimer Laser ◽

Broad Band ◽

Resonance Excitation ◽

Atomic Fluorescence Spectrometry ◽

Fixed Frequency ◽

Atomic Fluorescence ◽

Laser Systems ◽

Arf Excimer Laser ◽

Argon Fluoride ◽

Sensitive Method

Laser-excited atomic fluorescence spectrometry (LEAFS) can be an extremely sensitive method of trace analysis. However, some elements, such as As, have strong absorption lines only below 200 nm. Dye laser systems capable of resonance excitation of As are complicated and very expensive. By coincidence, a simple fixed-frequency argon fluoride (ArF) excimer laser produces a broad-band output centered at 193.0–193.2 nm overlapping the As absorption line at 193.7 nm. The use of an ArF excimer laser as a source for LEAFS detection of As in a H2/air flame and an Ar-ICP has been evaluated. Detection limits of about 20 ng/mL were obtained with both atomizers. The limiting noise was laser-induced scatter in both cases. Methods of improving the detection powers are discussed.

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