High Resolution Displacement of Functional Groups onto Fluorocarbon Resin Surface by Using ArF Excimer Laser

1996 ◽  
Vol 451 ◽  
Author(s):  
T. Shimizu ◽  
M. Murahara
Keyword(s):  
Contact Angle ◽  
High Resolution ◽  
Laser Beam ◽  
Thin Layer ◽  
Functional Groups ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Large Area ◽  
Three Solutions ◽  
Arf Excimer Laser

ABSTRACTA Fluorocarbon resin surface was selectively modified by irradiation with a ArF laser beam through a thin layer of NaAlO2, B(OH)3, or H2O solution to give a hydrophilic property. As a result, with low fluence, the surface was most effectively modified with the NaAlO2 solution among the three solutions. However, the contact angle in this case changed by 10 degrees as the fluence changed only 1mJ/cm2. When modifying a large area of the surface, high resolution displacement could not be achieved because the laser beam was not uniform in displacing functional groups. Thus, the laser fluence was successfully made uniform by homogenizing the laser beam; the functional groups were replaced on the fluorocarbon resin surface with high resolution, which was successfully modified to be hydrophilic by distributing the laser fluence uniformly.

Comparison with Amino Group and Hydrophilic Group for Protein Afftnity by Excimer Laser Induced Functional Groups Substitution Onto Pet Film

2002 ◽  
Vol 735 ◽  
Author(s):  
Hitoshi Omuro ◽  
Masato Nakagawa ◽  
Hiroaki Fukuda ◽  
Masataka Murahara
Keyword(s):  
Contact Angle ◽  
Functional Groups ◽  
Excimer Laser ◽  
Bonding Strength ◽  
Functional Group ◽  
Laser Light ◽  
Artificial Ligament ◽  
Untreated Sample ◽  
Ammonia Gas ◽  
Arf Excimer Laser

ABSTRACTPET has been widely used for medical materials such as an artificial ligament. However, the affinity of tissues is no good. To compensate this, the mesh formed PET has clinically been used for artificial ligament intruding tissue into mesh. However, this method has not shown sufficient affinity with the tissue; that is, the initial adapting strength of the material and tissue is weak. · The artificial ligament must be biocompatible to contact blood and tissue. The foregoing artificial ligament, however, doesn't satisfy the biocompatibility. ·Thus, we have modified the PET surface into hydrophilic by substituting NH2 or OH functional groups. Firstly, an ArF excimer laser light was irradiated the PET with water on top. The OH functional group was substituted on the PET surface by this photochemical reaction. Secondly, the ArF excimer laser light was irradiated the PET in ammonia gas ambient. In this photochemical reaction, the NH2 functional group was substituted on the PET surface.· In this study, the untreated sample had the contact angle with water of 80 degrees and the bonding strength with protein of only 1.0kg/cm2. The contact angle of the modified sample improved to 40 degrees and the bonding strength, to 23kg/cm2. When treated in ammonia gas, the contact angle also improved to 40 degrees; however, the bonding strength was almost the same as that of the untreated sample.It was confirmed that the affinity of the PET for water and protein could be controlled by increasing or decreasing the substitution concentration of OH and NH2 functional groups on the surface.

High Selective Etching of SiO2/Si by ArF Excimer Laser

1993 ◽  
Vol 334 ◽  
Author(s):  
K. Kitamura ◽  
M. Murahara
Keyword(s):  
Laser Beam ◽  
Excimer Laser ◽  
Wavelength Region ◽  
Chemical Behavior ◽  
Mixed Gas ◽  
Reaction Cell ◽  
Si Substrates ◽  
Excimer Laser Irradiation ◽  
Arf Excimer Laser ◽  
Uv Absorption Spectrum

AbstractDry etching of SiO2 insulation layer has been required in the Si semiconductor manufacturing process. The etching of SiO2/Si is chemically carried out by using HF solution. We successfully demonstrated a new method for exclusive etching of SiO2 using the nitrosyle fluoride (NFO) gas which was produced from the mixed gas of NF3 and O2 with an ArF excimer laser irradiation.SiO2 and Si substrates were placed side by side in a reaction cell which was filled with 3% O2 gas in NF3 at the gas pressure of 380 Torr. ArF excimer laser beam was irradiated parallel to the substrates. The laser fluence was kept at lOOmJ/cm2. As soon as the mixed gas of NF3 and O2 was irradiated with the ArF laser beam, an intermediate product of NFO was produced. The chemical behavior of NFO was confirmed from the UV absorption spectrum with absorption in the 310 to 330nm wavelength region. In the presence of SiO2, the absorption of NFO diminished. The absorption of NO2, instead of NFO, appeared at 350nm. This indicates that the oxygen atoms of SiO2 were pulled out by NFO.The etching reactions continued for 3 minutes after irradiation when the SiO2 and Si substrates were kept in an atmosphere of the reactant gases. As a result, not the Si but SiO2 substrate was etched with the depth of 2000Å.

ArF excimer laser beam delivery systems for medical applications

1994 ◽  
Author(s):  
Uichi Kubo ◽  
Yuichi Hashishin ◽  
Hitoshi Nakano ◽  
Takeyoshi Nakayama ◽  
Hiroyuki Tanaka
Keyword(s):  
Laser Beam ◽  
Excimer Laser ◽  
Delivery Systems ◽  
Medical Applications ◽  
Arf Excimer Laser ◽  
Beam Delivery

Inner Pore of Porous Fluoropolymer to Hydrophilic by using UV Light and H20 Vapor

1998 ◽  
Vol 544 ◽  
Author(s):  
Shinsuke Ito ◽  
Masataka Murahara
Keyword(s):  
Contact Angle ◽  
Excimer Laser ◽  
Water Permeability ◽  
Uv Light ◽  
Ethanol Solution ◽  
Oh Radicals ◽  
Arf Excimer Laser ◽  
Inner Pore

AbstractInner pores of porous PTFE was modified photochemically by using ArF excimer laser for improvement of water permeability. In this study, two modification methods are described. One is using ethanol solution, and another is H20 vapor as a reaction gas. These reaction sources were employed for modification of inner pores. In the case of using ethanol solution, the modified sample indicates both hydrophilication and oleophilication. On the contrary, the hydrophilic groups are substituted into the inner pore with H20 vapor. The hydrophilication of modified samples were evaluated by the measurement of contact angle with water and water permeability. The substituted OH radicals were inspected by ATR-FTIR measurement.

Origin of the Laser-Induced Broad Band Luminescence from a WF6/H2/Ar Gas Mixture

1991 ◽  
Vol 236 ◽  
Author(s):  
P. Heszler ◽  
P. Mogyorósi ◽  
J.O. Carlsson
Keyword(s):  
Light Intensity ◽  
Excimer Laser ◽  
Laser Fluence ◽  
Repetition Rate ◽  
Broad Band ◽  
Gas Mixture ◽  
Arf Excimer Laser ◽  
Ar Gas ◽  
20 Nm

AbstractThe origin of the ArF excimer laser induced luminescence from a WF6/H2/Ar gas mixture was investigated. The experiments prove that the emission originates from excited W clusters with a size of about 10-20 nm. The influence of the H2 and Ar concentrations, the laser fluence and the repetition rate on the light intensity was studied.

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