Pzt Interaction with Metal and Oxides Studied by Rutherford Backscattering Spectrometry
Keyword(s):
Pzt Film
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AbstractAnnealing behavior in oxygen ambients of the of the ferroelectric PZT on Hf and Zr electrodes has been studied in the temperature range of 500-800°C using the 3.045MeV O16(∝,∝)O16 resonance in backscattering spectrometry. Internal oxidation of the buried metal electrode was observed. Oxygen concentration of the PZT film decreases with increasing temperature. Pb loss of the PZT film occurred above 700°C.
Keyword(s):
2019 ◽
Vol 37
(2)
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pp. 020601
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2002 ◽
Vol 188
(1-4)
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pp. 84-89
1992 ◽
Vol 71
(4)
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pp. 445-450
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1986 ◽
Vol 4
(6)
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pp. 2463-2469
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2008 ◽
Vol 266
(8)
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pp. 1502-1506
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