Raman Spectroscopy Analysis of Nitrogen Ion Implantation in Silicon and Correlation with Transmission Electron Microscopy

ABSTRACTIn this work Si samples implanted with nitrogen (N+ or N2+) at a dose of 1017 cm−2 are characterized by Raman spectroscopy and cross section transmission electron microscopy (XTEM). The correlation between the Raman spectra obtained with different excitation wavelengths and XTEM observations allows to determine the structural features related to the layers contributing to the total spectra. The evolution of these features with the annealing treatments (up to 1150°C) is studied. The results obtained show, after the annealing treatment at the highest temperature, the presence of silicon nitride precipitates in the silicon subsurface region, and the formation of a nitrogen rich polycrystalline Si layer with Si3N4 grains. The Raman spectra from the subsurface region show a remaining shift of -0.15 cm−1 when compared to the spectra from unimplanted Si. This shift, together with the similar shape of both Raman lines, suggests the presence in this region of an average tensile stress of 37.5 MPa.

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Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: a Comparative Study

MRS Proceedings ◽

10.1557/proc-324-255 ◽

1993 ◽

Vol 324 ◽

Cited By ~ 6

Author(s):

David R. Tallant ◽

Thomas J. Headley ◽

John W. Medernach ◽

Franz Geyling

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Raman Spectroscopy ◽

Raman Spectra ◽

Cross Section ◽

Nanometer Scale ◽

Sampling Depth ◽

Transmission Electron ◽

Polysilicon Films

AbstractSamples of chemically-vapor-deposited sub-micrometer-thick films of polysilicon were analyzed by transmission electron microscopy (TEM) in cross-section and by Raman spectroscopy with illumination at their surface. TEM and Raman spectroscopy both find varying amounts of polycrystalline and amorphous silicon in the wafers. Raman spectra obtained using blue, green and red excitation wavelengths to vary the Raman sampling depth are compared with TEM crosssections of these films. Some films have Raman spectra with a band near 497 cm−1, corresponding to numerous nanometer-scale faulted regions in the TEM micrographs.

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Structure of Oxides Grown on Zr-20Nb Alloy

MRS Proceedings ◽

10.1557/proc-357-219 ◽

1994 ◽

Vol 357 ◽

Cited By ~ 3

Author(s):

O.T. Woo ◽

D.J. Lockwood ◽

Y.P. Lin ◽

V.F. Urbanic

Keyword(s):

Crystal Structure ◽

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Raman Spectroscopy ◽

Raman Spectra ◽

High Symmetry ◽

X Ray Diffraction ◽

Short Term ◽

X Ray ◽

Transmission Electron

AbstractOxides grown on Zr-20Nb were characterized by Raman Spectroscopy (RS), X-Ray Diffraction (XRD) and Transmission Electron Microscopy (TEM). These oxides were steamformed at 400°C, water-formed at 360 °C and at 300 °C, and air-grown at 400°C. For the oxides grown after relatively short exposures at 360°C and at 400°C, Raman spectra revealed broad peaks at 260 and 660 cm− indicating a crystal structure with high symmetry. Comparison with reference Raman spectra of cubic (c), tetragonal (t), and monoclinic (m) ZrO2 suggested that the oxide was predominantly nearly-cubic (tetragonal with c/a ratio ≈ 1), with minor amounts of moxide. The tetragonality is found to be consistent with TEM analyses and XRD results which showed the presence of a doublet near 2θ ° 74°. The crystal structure in the short-term exposed oxides is interpreted in terms of a tetragonal distortion arising from the displacement of oxygen atoms within the cubic ZrO2 crystal structure. For oxides grown after longer periods of exposure at 300°C and at 400°C, RS and XRD indicate increased amounts of m-oxide.

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Phonon Confinement in SiC Nanocrystals: Comparison of the Size Determination Using Transmission Electron Microscopy and Raman Spectroscopy

Applied Spectroscopy ◽

10.1366/000370207781540187 ◽

2007 ◽

Vol 61 (8) ◽

pp. 855-859 ◽

Cited By ~ 20

Author(s):

M. Havel ◽

D. Baron ◽

L. Mazerolles ◽

Ph. Colomban

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Raman Spectroscopy ◽

Raman Spectra ◽

Phonon Confinement ◽

Silicon Carbide Fibers ◽

Transmission Electron ◽

Crystallite Dimension ◽

Average Size ◽

Actual Size

Silicon carbide fibers of different generation/processing routes (NLM-Nicalon and Tyranno SA3) were thermally treated to trigger the growth of nanocrystals, which were analyzed using Raman spectroscopy and transmission electron microscopy (TEM). The nanocrystals were also aged in molten sodium nitrate to investigate their reactivity. The spatial correlation model has been used to model the Raman spectra and extract accurate and statistical information on the nanocrystallites' structure and dimension. For the NLM fibers, an average size of 2.5 to 7.0 nm was calculated, which was in good agreement with TEM observations. For the Tyranno SA3 fiber, despite the heavily faulted stacking sequence, the Raman peaks remained sharp, indicating that the crystallite dimension calculated from the Raman spectra is only dependent on the actual size of the nanocrystals and is not affected by the sequence of the stacking faults.

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Transmission electron microscopy studying of structural features of NiTi B2 phase formed under pulsed electron-beam impact

10.1063/1.4932837 ◽

2015 ◽

Author(s):

Ludmila L. Meisner ◽

Alexey A. Neiman ◽

Alexander I. Lotkov ◽

Nikolai N. Koval ◽

Viktor O. Semin ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Electron Beam ◽

Structural Features ◽

Pulsed Electron Beam ◽

Transmission Electron ◽

B2 Phase

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Polish‐induced damage in 〈100〉 GaAs: A comparison of transmission electron microscopy and Raman spectroscopy

Journal of Applied Physics ◽

10.1063/1.344928 ◽

1990 ◽

Vol 67 (9) ◽

pp. 4363-4365 ◽

Cited By ~ 4

Author(s):

T. George ◽

Z. L. Weber ◽

E. R. Weber ◽

Fred H. Pollak

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Raman Spectroscopy ◽

Transmission Electron

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Protein–nanoparticle interaction in bioconjugated silver nanoparticles: A transmission electron microscopy and surface enhanced Raman spectroscopy study

Applied Surface Science ◽

10.1016/j.apsusc.2016.07.082 ◽

2016 ◽

Vol 389 ◽

pp. 17-24 ◽

Cited By ~ 22

Author(s):

Sébastien Reymond-Laruinaz ◽

Lucien Saviot ◽

Valérie Potin ◽

María del Carmen Marco de Lucas

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Raman Spectroscopy ◽

Silver Nanoparticles ◽

Surface Enhanced Raman Spectroscopy ◽

Spectroscopy Study ◽

Transmission Electron ◽

Surface Enhanced ◽

Surface Enhanced Raman

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Correlation between structure and mass distribution of the nuclear pore complex and of distinct pore complex components.

The Journal of Cell Biology ◽

10.1083/jcb.110.4.883 ◽

1990 ◽

Vol 110 (4) ◽

pp. 883-894 ◽

Cited By ~ 310

Author(s):

R Reichelt ◽

A Holzenburg ◽

E L Buhle ◽

M Jarnik ◽

A Engel ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Nuclear Envelope ◽

Three Dimensional ◽

Structural Features ◽

Nuclear Pore ◽

Xenopus Laevis Oocyte ◽

Three Dimensional Model ◽

Transmission Electron ◽

Freeze Dried

Nuclear pore complexes (NPCs) prepared from Xenopus laevis oocyte nuclear envelopes were studied in "intact" form (i.e., unexposed to detergent) and after detergent treatment by a combination of conventional transmission electron microscopy (CTEM) and quantitative scanning transmission electron microscopy (STEM). In correlation-averaged CTEM pictures of negatively stained intact NPCs and of distinct NPC components (i.e., "rings," "spoke" complexes, and "plug-spoke" complexes), several fine structural features arranged with octagonal symmetry about a central axis could reproducibly be identified. STEM micrographs of unstained/freeze-dried intact NPCs as well as of their components yielded comparable but less distinct features. Mass determination by STEM revealed the following molecular masses: intact NPC with plug, 124 +/- 11 MD; intact NPC without plug, 112 +/- 11 MD; heavy ring, 32 +/- 5 MD; light ring, 21 +/- 4 MD; plug-spoke complex, 66 +/- 8 MD; and spoke complex, 52 +/- 3 MD. Based on these combined CTEM and STEM data, a three-dimensional model of the NPC exhibiting eightfold centrosymmetry about an axis perpendicular to the plane of the nuclear envelope but asymmetric along this axis is proposed. This structural polarity of the NPC across the nuclear envelope is in accord with its well-documented functional polarity facilitating mediated nucleocytoplasmic exchange of molecules and particles.

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