Characterization of Reactive Ion Etch Damage in GaAs by Triple Crystal X-Ray Diffraction

1993 ◽  
Vol 324 ◽  
Author(s):  
Victor S. Wang ◽  
Richard J. Matyi ◽  
Karen J. Nordheden
Keyword(s):  
Bias Voltage ◽  
Diffuse Scattering ◽  
Reciprocal Lattice ◽  
Surface Region ◽  
Perfect Crystal ◽  
X Ray Diffraction ◽  
Reciprocal Lattice Point ◽  
Near Surface ◽  
X Ray ◽  
Imperfect Crystal

AbstractTriple crystal x-ray diffraction (TCXD) is a non-destructive structural characterization tool capable of the separation and direct observation of the dynamic (perfect crystal) and the kinematic (imperfect crystal) components of the total intensity diffracted by a crystal. Specifically, TCXD can be used to measure the magnitude of the diffuse scattering arising from defects in the crystal structure in the immediate vicinity of a reciprocal lattice point. In this study, the effects of BC13 reactive ion etching (RIE) on the near-surface region of GaAs were investigated by analyzing the changes in the diffuse scattering using both the symmetric 004 reflection as well as the highly asymmetric and more surface sensitive 113 reflection. While the results from the 004 reflections revealed little difference between the unetched and the BC13-etched samples, maps of the diffracted intensity around the 113 reflections showed an unexpected and reproducible decrease in the extent of the diffuse scattering in the transverse direction (perpendicular to the < 113 > direction) as the RIE bias voltage was increased. This decrease suggests that the degree of etch damage induced in the GaAs near-surface region is reduced with increasing bias voltage and ion energy. Additionally, the symmetry and orientation of the kinematic scattering was altered. Possible mechanisms for these results willbe discussed.

Microstructure and Oxidation of a Cast Nickel Aluminide Alloy

2002 ◽  
Vol 753 ◽  
Author(s):  
D. Y. Lee ◽  
M. L. Santella ◽  
I. M. Anderson ◽  
G. M. Pharr
Keyword(s):  
Nickel Aluminide ◽  
Volume Fraction ◽  
Surface Region ◽  
Oxidation Products ◽  
Al Alloy ◽  
X Ray Diffraction ◽  
Multivariate Statistical ◽  
Near Surface ◽  
X Ray ◽  
Spectrum Imaging

ABSTRACTSpecimens of the cast Ni3Al alloy IC221M were annealed in air at 900°C to examine the effects of oxidation and thermal aging on the microstructure. The alloy is comprised of a dendritically solidified γ-γ′ matrix containing γ+Ni5Zr eutectic colonies in the interdendritic regions. Microstructures of aged specimens were examined by optical microscopy and energy dispersive X-ray (EDX) spectrum imaging in the scanning electron microscope (SEM). Two primary changes in the microstructures were observed: (1) there is considerable homogenization of the cast microstructures with aging, and (2) the volume fraction of the γ+Ni5Zr eutectic decreases. Oxidation products were identified using x-ray diffraction and EDX spectrum imaging with multivariate statistical analysis (MSA). During the initial stages of oxidation, the first surface oxide to form is mostly NiO with small amounts of Cr2O3, ZrO2, NiCr2O4, and θ-Al2O3. Initially, oxidation occurs primarily in the interdendritic regions due to microsegregation of alloying elements during casting. With further aging, a continuous film of α-Al2O3 forms immediately beneath the surface that eventually evolves into a double layer of α-Al2O3 and NiAl2O4. Although these oxides are constrained to the near surface region, others penetrate to greater depths facilitated by oxidation of the γ+Ni5Zr eutectic colonies. These oxides appear in the microstructure as long, thin spikes of ZrO2 surrounded by a thin sheath of Al2O3.

In situ X-ray diffraction study of stacking fault formation in the near-surface region of transformation induced plasticity steels

2013 ◽  
Vol 530 ◽  
pp. 105-112 ◽  
Author(s):  
David Rafaja ◽  
Christina Krbetschek ◽  
Daria Borisova ◽  
Gerhard Schreiber ◽  
Volker Klemm
Keyword(s):  
Diffraction Study ◽  
Surface Region ◽  
Stacking Fault ◽  
X Ray Diffraction ◽  
Near Surface ◽  
Transformation Induced Plasticity ◽  
X Ray

Properties of TiN Coatings Deposited on Nitrogen Ion Implanted Steel C1045

2007 ◽  
Vol 555 ◽  
pp. 59-64
Author(s):  
D. Peruško ◽  
N. Bibić ◽  
S. Petrović ◽  
M. Popović ◽  
M. Novaković ◽  
...  
Keyword(s):  
Diffraction Analysis ◽  
Strong Dependence ◽  
Surface Region ◽  
Grazing Incidence ◽  
Iron Nitrides ◽  
X Ray Diffraction ◽  
Near Surface ◽  
X Ray ◽  
Tin Coatings ◽  
Nitrogen Ion

The effects of nitrogen pre-implantation of AISI C1045 steel substrates on the properties of deposited TiN coatings were investigated. Nitrogen ion implantations were performed at 40 keV, to the fluences from 5x1016 – 5x1017 ions/cm2. On so prepared substrates we deposited 1.3 μm thick TiN layers by reactive sputtering. Structural characterizations of the samples were performed by grazing incidence X-ray diffraction analysis (GXRD), standard X-ray diffraction analysis (XRD), and scanning electron microscopy (SEM). Microhardness was measured by Vicker’s method. The obtained results indicate the formation of iron-nitrides in the near surface region of the substrates, more pronounced for higher implanted fluences. The structure of the deposited TiN coatings shows a strong dependence on the pre-implantation of the substrates, which is attributed to the changed local structure at the surface. Ion implantation and deposition of hard TiN coatings induce an increase of the microhardness of this low performance steel of more than eight times.

Determination by high-resolution X-ray diffraction of shape, size and lateral separation of buried empty channels in silicon-on-nothing architectures

2007 ◽  
Vol 40 (2) ◽  
pp. 338-343 ◽  
Author(s):  
Marco Servidori
Keyword(s):  
High Resolution ◽  
Lattice Point ◽  
Reciprocal Lattice ◽  
Reciprocal Lattice Vector ◽  
X Ray Diffraction ◽  
Lattice Vector ◽  
Reciprocal Lattice Point ◽  
One Dimensional ◽  
X Ray ◽  
Planar Array

High-resolution multi-crystal X-ray diffraction was employed to characterize silicon-on-nothing samples made by a one-dimensional periodic planar array of buried empty channels. When the channels are normal to the scattering plane, under the constraint of lattice continuity from the perfect substrate to the surface, this periodic array gives rise to a well defined Fraunhofer diffraction in a scan crossing a selected reciprocal lattice point and normal to the reciprocal lattice vector (transverse or ω scan). In a longitudinal scan (ω/2θ scan crossing the reciprocal lattice point and parallel to the reciprocal lattice vector) interference fringes are observed. By analysis of the ω scan and numerical fit of the ω/2θ scan, the period of the buried empty channels and their shape, size and lateral gap were easily determined, thanks to the high-resolution optics used for the measurements.

scholarly journals Improved crystal orientation and physical properties from single-shot XFEL stills

2014 ◽  
Vol 70 (12) ◽  
pp. 3299-3309 ◽  
Author(s):  
Nicholas K. Sauter ◽  
Johan Hattne ◽  
Aaron S. Brewster ◽  
Nathaniel Echols ◽  
Petrus H. Zwart ◽  
...  
Keyword(s):  
Crystal Orientation ◽  
Degrees Of Freedom ◽  
Reciprocal Lattice ◽  
Single Shot ◽  
X Ray Diffraction ◽  
Reciprocal Lattice Point ◽  
X Ray ◽  
Structure Factors ◽  
Rotational Degrees Of Freedom ◽  
Diffraction Patterns

X-ray diffraction patterns from still crystals are inherently difficult to process because the crystal orientation is not uniquely determined by measuring the Bragg spot positions. Only one of the three rotational degrees of freedom is directly coupled to spot positions; the other two rotations move Bragg spots in and out of the reflecting condition but do not change the direction of the diffracted rays. This hinders the ability to recover accurate structure factors from experiments that are dependent on single-shot exposures, such as femtosecond diffract-and-destroy protocols at X-ray free-electron lasers (XFELs). Here, additional methods are introduced to optimally model the diffraction. The best orientation is obtained by requiring, for the brightest observed spots, that each reciprocal-lattice point be placed into the exact reflecting condition implied by Bragg's law with a minimal rotation. This approach reduces the experimental uncertainties in noisy XFEL data, improving the crystallographicRfactors and sharpening anomalous differences that are near the level of the noise.

Fabrication of CaWO4:Eu3+ Thin Films via Electrochemical Methods Assisted by a Novel Post Treatment

2011 ◽  
Vol 194-196 ◽  
pp. 2458-2461 ◽  
Author(s):  
Lian Ping Chen ◽  
Yuan Hong Gao ◽  
Jian Xiong Yuan ◽  
Qing Hua Zhang ◽  
Yan Hong Yin ◽  
...  
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
Electrochemical Techniques ◽  
Surface Region ◽  
Luminescent Properties ◽  
Emission Peak ◽  
X Ray Diffraction ◽  
Near Surface ◽  
X Ray ◽  
Rare Earth Doped

It is hardly possible to obtain rare earth doped CaWO4 thin films directly through electrochemical techniques. A novel post processing has been proposed to synthesize CaWO4:Eu3+ thin films at room temperature. X-ray diffraction, X-ray photoelectron spectrometry, spectrophotometer were used to characterize their phase, composition and luminescent properties. Results reveal that Eu3+-doped CaWO4 films have a tetragonal phase; the content of Eu in the near surface region is much higher than that of the bulk; under the excitation of 310 nm, a sharp emission peak at 616 nm has been observed for Ca0.9WO4:Eu0.13+ thin films.

Layer-disordered wurtzite (ZnS-2H): diffuse X-ray scattering recorded by c-axis precession photography

1987 ◽  
Vol 20 (3) ◽  
pp. 191-194 ◽  
Author(s):  
M. E. Fleet
Keyword(s):  
Diffraction Pattern ◽  
Diffuse Scattering ◽  
Reciprocal Lattice ◽  
X Ray Diffraction ◽  
Closed Loops ◽  
X Ray ◽  
X Ray Scattering ◽  
Precession Cycle ◽  
Dimensional Parameters ◽  
Disordered Crystal

A novel type of X-ray diffraction pattern results when a layer-disordered crystal is photographed by X-ray precession using the stacking direction as the precession axis and no layer-line screen. The 10l, 20l, 21l and symmetry-equivalent rows of diffuse scattering of layer-disordered wurtzite (ZnS-2H) are represented by compound loops superimposed on the zero-level hk0 diffraction pattern. Closed loops result because the reciprocal-lattice rows associated with diffuse scattering remain in contact with the sphere of reflection during the precession cycle. Formulae for dimensional parameters of the compound loops of diffuse scattering are derived from the sphere-of-reflection construction.

scholarly journals Simultaneous scanning near-field optical and X-ray diffraction microscopy for correlative nanoscale structure–property characterization

2019 ◽  
Vol 26 (5) ◽  
pp. 1790-1796 ◽  
Author(s):  
Qian Li ◽  
Samuel D. Marks ◽  
Sunil Bean ◽  
Michael Fisher ◽  
Donald A. Walko ◽  
...  
Keyword(s):  
Multimodal Imaging ◽  
Near Field ◽  
Surface Region ◽  
Crystallographic Structure ◽  
Structure Property ◽  
X Ray Diffraction ◽  
Mechanical Pressure ◽  
Near Surface ◽  
X Ray ◽  
Nanoscale Characterization

A multimodal imaging instrument has been developed that integrates scanning near-field optical microscopy with nanofocused synchrotron X-ray diffraction imaging. The instrument allows for the simultaneous nanoscale characterization of electronic/near-field optical properties of materials together with their crystallographic structure, facilitating the investigation of local structure–property relationships. The design, implementation and operating procedures of this instrument are reported. The scientific capabilities are demonstrated in a proof-of-principle study of the insulator–metal phase transition in samarium sulfide (SmS) single crystals induced by applying mechanical pressure via a scanning tip. The multimodal imaging of an in situ tip-written region shows that the near-field optical reflectivity can be correlated with the heterogeneously transformed structure of the near-surface region of the crystal.

Determination of dispersion and polarization of thermal plane waves in crystals

1971 ◽  
Vol 134 (3-4) ◽  
Author(s):  
P. L. La Fleur
Keyword(s):  
Intensity Distribution ◽  
Phonon Scattering ◽  
Reciprocal Lattice ◽  
Plane Waves ◽  
Lattice Points ◽  
X Ray Diffraction ◽  
Diffraction Intensity ◽  
Reciprocal Lattice Point ◽  
X Ray

AbstractThe dispersion of the thermal plane waves (phonons) in crystals can be determined from the x-ray diffraction intensity distribution around a reciprocal lattice point. In the method presented here no higher-order phonon-scattering corrections are necessary. It is shown furthermore that polarizations and dispersion of the phonons can be determined from the intensity distributions around six properly chosen reciprocal lattice points.

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