Deposition of Si Thin Films by Reactive CVD

ABSTRACTA new concept of Reactive CVD is proposed for the low-temperature growth of thin films by CVD and discussed in terms of general features of such film growth. One demonstrated example of the reactive CVD, called Spontaneous Chemical Deposition, features gas phase reactions of silane with fluorine is outlined in terms of the general characteristics of the film growth and properties.In addition, a second example of reactive CVD, called Reactive Thermal CVD and involving thermal CVD of poly-SiGe from germanium fluoride and disilane, is discussed and low-temperature growth using this method is reviewed.