Characterization of Laser Induced Backside Damage for Gettering Purposes

1981 ◽  
Vol 4 ◽  
Author(s):  
G.E.J. Eggermont ◽  
D.F. Allison ◽  
S.A. Gee ◽  
K.N. Ritz ◽  
R.J. Falster ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Surface Roughness ◽  
Side Effects ◽  
Laser Pulse ◽  
Laser Pulse Energy ◽  
Limited Range ◽  
The Other ◽  
Tem Analysis ◽  
Initial Oxidation

ABSTRACTA characterization of Q-switched Nd-YAG laser induced backside damage in various stages of a bipolar process is presented. TEM-analysis shows the occurence of microcracks, low angle boundaries and dislocations in as-irradiated wafers, of which the microcracks anneal out during an initial oxidation at 1050°C. The other damage is very stable and remains even after a heat treatment at 1200°C. This is quite in contrast with mechanically or Ar implantation induced backside damage, which anneal out completely at such high temperatures. Side effects of laser induced backside damage such as surface roughness and influence on wafer strength are found to be of no consequence within a limited range of laser pulse energy densities where the gettering efficiency is found to be very promising.

Analysis of CoCrMo Surface Oxide Removal by Alumina Blasting before Porcelain Firing in Dental Restorations

2012 ◽  
Vol 730-732 ◽  
pp. 9-14 ◽  
Author(s):  
Bruno Henriques ◽  
Filipe Silva ◽  
Delfim Soares
Keyword(s):  
Heat Treatment ◽  
Surface Roughness ◽  
Chemical Composition ◽  
High Alumina ◽  
X Ray ◽  
Dental Restorations ◽  
Ceramic Bond ◽  
Xrf Scanning ◽  
Oxide Removal

The purpose of this work was to perform a chemical and mechanical characterization of a preoxidized CoCrMo alumina blasted surface. This is a commonly performed surface treatment used in metal-porcelain systems for dental restorations to remove oxides formed during preoxidation heat treatment from the metal’s surface. CoCrMo dental alloy’s specimens produced by lost wax process were examined in terms of chemical composition using X-Ray fluorescence spectroscopy (XRF), Scanning Electron Microscopy (SEM) and Energy Dispersive X-Ray Spectroscopy (EDS); in terms of mechanical characteristics through the means of a microhardness test and in terms of surface roughness using a profilometer. It was investigated the chemical composition of various surface conditions: non-preoxidized, preoxidized, ground oxidized surface and sandblasted oxidized surface. After alumina blasting, the oxides level on metal’s surface remained high. Alumina blasting treatment (Ø110 µm) produced an 84% increase of CoCrMo surface hardening and an increase in surface roughness (Ra=0.58 µm). It was found alumina contaminants on the metal’s surface. Therefore, it was concluded that alumina blasting do not entirely removes the oxide layer formed during preoxidation heat treatment. It produced a chemical and mechanical surface modification that can influence the metal-ceramic bond strength.

CHARACTERIZATION OF THE SINTERED Nd15Fe77B8 ALLOY

2011 ◽  
Vol 25 (06) ◽  
pp. 877-884
Author(s):  
L. HADJADJ
Keyword(s):  
Heat Treatment ◽  
Magnetic Properties ◽  
Optical Microscope ◽  
The Other ◽  
Average Value ◽  
Nd15fe77b8 Alloy

In this work the purpose is, in addition to the determination of microhardness, to get some information about the effect of heat treatment on the microstructure of the magnetic Nd 15 Fe 77 B 8 alloy. For this study we have used an optical microscope and an electronic microprobe. The results show that the structure of the Nd 2 Fe 14 B phase, which confers good mechanical and magnetic properties on the alloy, is well tetragonal, as mentioned in several works. The morphology, the concentration and the quantity of this phase depend on the temperature of annealing. The microhardness of the phase has an average value between those of the other involved phases.

scholarly journals Characterization of human heterophil hemolysins induced by Schistosoma mansoni infection

1983 ◽  
Vol 78 (3) ◽  
pp. 257-267 ◽  
Author(s):  
Munir Chamone ◽  
L. Alves Oliveira ◽  
P. M. Z. Coelho ◽  
G. Gazzinelli ◽  
A. Oliveira Lima ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Schistosoma Mansoni ◽  
Hemolytic Activity ◽  
Gel Filtration ◽  
The Other ◽  
Other Hand ◽  
Classic Pathway

Heterophil antibodies could be detected in sera from normal or from patient with chronic schistosomiasis. Their hemolytic activities depend on the integrity of the complement classic pathway. The heterophil antibodies from patient sera presented a higher specificity for Schistosoma mansoni antigen preparations than those detected in normal sera. Most of the hemolytic activity observed in normal sera can be destroyed at 56ºC for 4 min. On the other hand, about 80% of the sera from infected patients are partially or totally resistant to this heat-treatment. The hemolytic activities of sera were eluted from a gel filtration column in different fractions of the first peak.

scholarly journals The Q-switched Nd:YAG laser shock processing effects on mechanical properties of C86400 Cu-Zn alloy

2019 ◽  
Vol 17 (42) ◽  
pp. 136-140 ◽  
Author(s):  
Mays Oday Hashim ◽  
Dr. Razi Al-Azawi ◽  
Dr. Abdul Hadi Kadhim
Keyword(s):  
Surface Roughness ◽  
Laser Pulse ◽  
Pulse Energy ◽  
Nd:Yag Laser ◽  
Laser Pulse Energy ◽  
Laser Shock ◽  
Micro Hardness ◽  
Laser Shock Processing ◽  
Shock Processing ◽  
Zn Alloy

The aim of this paper is to investigate the effects of Nd:YAG laser shock processing (LSP) on micro-hardness and surface roughness of 86400Cu-Zn alloy. X-ray fluorescence technique was used to analyze the chemical composition of this alloy. LSP treatment was performed with a Q-switched Nd: YAG laser with a wavelength of 1064 nm. The results show that laser shock processing can significantly increase. The micro-hardness and surface roughness of the LSP-treated sample. Vickers diamond indenter was used to measure the micro-hardness of all samples with different laser pulse energy and the different number of laser pulses. It is found that the metal hardness can be significantly increased to more than 80% by increasing the laser energy and the number of laser pulse irradiated per unit area. The relationship between laser pulse energy and the value of surface roughness is a proportionality due to the increase in ablation processes which are associated with LSP at sample surface caused by the increasing of laser pulse energy.

Surface Morphology of Silicon Induced by Laser Ablation in Flowing Water

2016 ◽  
Vol 861 ◽  
pp. 115-120 ◽  
Author(s):  
Wisan Charee ◽  
Viboon Tangwarodomnukun
Keyword(s):  
Surface Roughness ◽  
Laser Ablation ◽  
Laser Pulse ◽  
Flow Rate ◽  
Pulse Energy ◽  
Laser Pulse Energy ◽  
Water Flow Rate ◽  
Traverse Speed ◽  
Flowing Water ◽  
Cut Surface

Underwater laser machining process has a high potential over the typical laser ablation to remove materials with less thermal damage occurring along the cut. However, the formations of vapor bubble and cut debris in water can substantially disturb the incident laser beam, thereby reducing the ablation performance. Instead of performing the ablation in still water, the flowing water technique was applied to flush away the cut debris and bubble generated. In this study, the effects of laser pulse energy, traverse speed and water flow rate on the cut surface roughness and heat-affected zone in the laser grooving of silicon were experimentally investigated and analyzed. The findings revealed that the cut surface roughness decreased with the increases in laser pulse energy and laser traverse speed. Though a higher water flow rate resulted in a rougher cut surface, the heat-affected zone can be minimized when the increased flow rate was applied.

scholarly journals Study of the Effects of MeV Ag, Cu, Au and Sn Implantation on the Optical Properties of LiNbO3

1997 ◽  
Vol 504 ◽  
Author(s):  
E. K. Williams ◽  
D. Ila ◽  
S. Sarkisov ◽  
M. Curley ◽  
D. B. Poker ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Optical Absorption ◽  
Room Temperature ◽  
Linear Absorption ◽  
Tem Analysis ◽  
Au Clusters ◽  
Optical Absorption Peak ◽  
Nonlinear Index ◽  
Ag Clusters

ABSTRACTWe present the results of characterization of linear absorption and nonlinear refractive index of Au, Ag, Cu and Sn ion implantation into LiNbO3. Silver was implanted at 1.5 MeV to fluences of 2 to 17 × 1016/cm2 at room temperature. Gold and copper were implanted to fluences of 5 to 20 × 1016/cm2 at an energy of 2.0 MeV. Tin was implanted to a fluence of 1.6 × 1017/cm2 at 160 kV. After heat treatment at 1000°C a strong optical absorption peak for the Au implanted samples appeared at ∼620 nm. The absorption peaks of the Ag implanted samples shifted from ∼450 nm before heat treatment to 550 nm after 500°C for lh. Heat treatment at 800°C returned the Ag implanted crystals to a clear state. Cu nanocluster absorption peaks disappears at 500°C. No Sn clusters were observed by optical absorption or XRD. The size of the Ag and Au clusters as a function of heat treatment were determined from the absorption peaks. The Ag clusters did not appreciably change in size with heat treatment. The Au clusters increased from 3 to 9 nm in diameter upon heat treatment at 1000°C. TEM analysis performed on a Au implanted crystal indicated the formation of Au nanocrystals with facets normal to the c-axis. Measurements of the nonlinear refractive indices made using the Z-scan method showed that Ag implantation changed the sign of the nonlinear index of LiNbO3 from negative to positive.

Synthesis and Characterization of Monodispersed Rare-earth Ion Doped CeO2 Coated on SiO2 Spheres

2008 ◽  
Vol 1074 ◽  
Author(s):  
Pandurangan Muralidharan ◽  
Seung Hwan Jo ◽  
Hyun Wook Lee ◽  
Do Kyung Kim
Keyword(s):  
Heat Treatment ◽  
Rare Earth ◽  
Sol Gel ◽  
Rare Earth Ion ◽  
Uniform Size ◽  
Tem Analysis ◽  
Xrd Patterns ◽  
Photoluminescence Studies ◽  
Sio2 Spheres

ABSTRACTCore–shell microspheres of monodispersed SiO2 coated with rare-earth ion doped CeO2 (Eu3+ Sm3+ Dy3+) were prepared through a sol-gel method and followed by heat treatment at 800 °C for 4 h. XRD patterns revealed the crystal structures of the doped CeO2 coated on amorphous SiO2 sphere as a shell subsequent to heat treatment at 800 °C. SEM and TEM analysis indicated the microstructures of the coating and uniform size distributions of microspheres. Photoluminescence studies showed that the luminescent property had significant influence depending on different dopant ions and the thickness of the shell coated on SiO2 spheres.

scholarly journals Multivalent Calixarene-Based Liposomes as Platforms for Gene and Drug Delivery

Pharmaceutics ◽  
2021 ◽  
Vol 13 (8) ◽  
pp. 1250
Author(s):  
José Antonio Lebrón ◽  
Manuel López-López ◽  
Clara B. García-Calderón ◽  
Ivan V. Rosado ◽  
Fernando R. Balestra ◽  
...  
Keyword(s):  
Drug Delivery ◽  
Side Effects ◽  
Encapsulation Efficiency ◽  
Transfection Efficiency ◽  
Genetic Material ◽  
The Other ◽  
Polar Group ◽  
Additional Amount ◽  
Upper Rim

The formation of calixarene-based liposomes was investigated, and the characterization of these nanostructures was carried out using several techniques. Four amphiphilic calixarenes were used. The length of the hydrophobic chains attached to the lower rim as well as the nature of the polar group present in the upper rim of the calixarenes were varied. The lipid bilayer was formed with one calixarene and with the phospholipid 1,2-dioleoyl-sn-glycero-3-phosphoethanolamine, DOPE. The cytotoxicity of the liposomes for various cell lines was also studied. From the results obtained, the liposomes formed with the least cytotoxic calixarene, (TEAC12)4, were used as nanocarriers of both nucleic acids and the antineoplastic drug doxorubicin, DOX. Results showed that (TEAC12)4/DOPE/p-EGFP-C1 lipoplexes, of a given composition, can transfect the genetic material, although the transfection efficiency substantially increases in the presence of an additional amount of DOPE as coadjuvant. On the other hand, the (TEAC12)4/DOPE liposomes present a high doxorubicin encapsulation efficiency, and a slow controlled release, which could diminish the side effects of the drug.

Characterization of Gate Oxide Pinhole Defect in NMOS FinFET Devices

2017 ◽  
Author(s):  
Liangshan Chen ◽  
Arnaud Bousquet ◽  
Tanya Schaeffer ◽  
Lucile C. Teague Sheridan ◽  
Lowell Hodgkins ◽  
...  
Keyword(s):  
Failure Mechanism ◽  
Electron Tomography ◽  
Gate Oxide ◽  
The Other ◽  
Physical Analysis ◽  
Tem Analysis ◽  
Root Cause ◽  
The Common ◽  
Tomography Analysis

Abstract This paper highlights the application of nanoprobing technique and electron tomography analysis to characterize the tiny gate oxide pinhole defect in NMOS FinFET devices. Nanoprobing technique was utilized to achieve a better understanding on the failure mechanism by characterizing the device electrical behaviors, and electron tomography, capable of mitigating the common projection issue encountered by general TEM analysis, was applied for physical analysis. It has been demonstrated through two cases, one logic fail and the other memory fail, that these two techniques together can effectively identify the root cause of pinhole defect. This type of pinhole defect, characterized by a tiny spot of oxide discontinuity and without excessive materials inter-diffusion, has been extremely challenging in FA analysis. This paper will provide the analysis details leading to the successful characterization of such type of oxide pinhole defect.

A very rapid in situ Kikuchi technique to determine relative crystal misorientation

1988 ◽  
Vol 46 ◽  
pp. 830-831
Author(s):  
J. I. Bennetch
Keyword(s):  
Electron Beam ◽  
Analytical Techniques ◽  
Superplastic Forming ◽  
The Other ◽  
Kikuchi Pattern ◽  
Kikuchi Line ◽  
Line Analysis

In a recent study of the superplastic forming (SPF) behavior of certain Al-Li-X alloys, the relative misorientation between adjacent (sub)grains proved to be an important parameter. It is well established that the most accurate way to determine misorientation across boundaries is by Kikuchi line analysis. However, the SPF study required the characterization of a large number of (sub)grains in each sample to be statistically meaningful, a very time-consuming task even for comparatively rapid Kikuchi analytical techniques.In order to circumvent this problem, an alternate, even more rapid in-situ Kikuchi technique was devised, eliminating the need for the developing of negatives and any subsequent measurements on photographic plates. All that is required is a double tilt low backlash goniometer capable of tilting ± 45° in one axis and ± 30° in the other axis. The procedure is as follows. While viewing the microscope screen, one merely tilts the specimen until a standard recognizable reference Kikuchi pattern is centered, making sure, at the same time, that the focused electron beam remains on the (sub)grain in question.

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