Comparison of Ni/Au, Pd/Au, and Cr/Au Metallizations for Ohmic Contacts to p-GaN

ABSTRACTReactions between electron beam evaporated thin films of Ni/Au, Pd/Au, and Cr/Au on p-GaN with a carrier concentration of 9.8 × 1016 cm−3 were investigated in terms of their structural and electronic properties both as-deposited and following heat treatments up to 600°C (furnace anneals) and 900°C (RTA) in a flowing N2 ambient. Auger electron spectroscopy (AES) depth profiles were used to study the interfacial reactions between the contact metals and the p-GaN. The electrical properties were studied using room temperature current-voltage (1-V) measurements and the predominant conduction mechanisms in each contact scheme were determined from temperature dependent I-V measurements. The metallization schemes consisted of a 500 Å interfacial layer of Ni, Pd, or Cr followed by a 1000 Å capping layer of Au. All schemes were shown to be rectifying as-deposited with increased ohmic character upon heat treatment. The Cr/Au contacts became ohmic upon heating to 900°C for 15 seconds while the other schemes remained rectifying with lower breakdown voltages following heat treatment. The specific contact resistance of the Cr/Au contact was measured to be 4.3×10−1 Ωcm2. Both Ni and Cr have been shown to react with the underlying GaN above 400 °C while no evidence of a Pd:GaN reaction was seen. Pd forms a solid solution with the Au capping layer while both Ni and Cr tend to diffuse through the capping layer to the surface. All contacts were shown to have a combination of thermionic emission and thermionic field emission as their dominant conduction mechanism, depending on the magnitude of the applied reverse bias.