Electrical Characteristics of New LDD Poly-Si TFT with MIS-Alignment Tolerant Structure for AMLCDs
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ABSTRACTA new LDD poly-Si TFT structure having symmetrical electrical characteristics independent of the process induced mis-alignment is described in this paper. Based on the experimental results, we have established there is no difference between the forward and reverse characteristics and a low leakage current, comparable to a conventional LDD poly-Si TFT, has been maintained for this new poly-Si TFTs. The maximum ON/OFF current ratio of about 1×108 is obtained for the LDD length of 1.0 μm. In addition, the kink effect in the output characteristics is remarkably improved in the new TFTs in comparison to the conventional non-LDD single- or dual-gate TFTs.
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2011 ◽
Vol 485
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pp. 257-260
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2011 ◽
Vol 679-680
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pp. 694-697
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MOVPE growth of in situ SiNx/AlN/GaN MISHEMTs with low leakage current and high on/off current ratio
2015 ◽
Vol 414
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pp. 237-242
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2008 ◽
Vol 600-603
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pp. 939-942
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2014 ◽
Vol 35
(2)
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pp. 175-177
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1988 ◽
Vol 35
(11)
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pp. 1986-1989
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