High Resolution Auger Depth Profiles Using a Dual Ion Gun System

1985 ◽  
Vol 54 ◽  
Author(s):  
S. Ingrey ◽  
J.P.D. Cook
Keyword(s):  
Electron Beam ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Grazing Incidence ◽  
Low Energy ◽  
Multilayer Structures ◽  
Dramatic Decrease ◽  
Depth Profiles ◽  
Order Of Magnitude ◽  
Magnitude Improvement

A dual ion gun system has been proposed (D.E. Sykes et al, Appl. Surf. Sci. 5(1980)103) to reduce texturing and improve depth resolution during Auger sputter depth profiling. We have evaluated this ion gun configuration by profiling a variety of multilayer structures. With careful alignment of the guns, we have obtained a dramatic decrease in ion-induced texturing often seen when a single ion gun is used. This effect was particularly pronounced for polycrystalline Al films on Si where an order of magnitude improvement in depth resolution was achieved. Further refinements of the technique include the use of low energy (IkeV) grazing incidence xenon ions and a small electron beam probe area. Depth profiles obtained from Ni/Cr, W/Si, and GaAs/GaAlAs multilayer structures will also be discussed.

Depth Profiling Investigation of Seawater Using Combined Multi-Optical Spectrometry

2020 ◽  
Vol 74 (5) ◽  
pp. 563-570 ◽  
Author(s):  
Wangquan Ye ◽  
Jinjia Guo ◽  
Nan Li ◽  
Fujun Qi ◽  
Kai Cheng ◽  
...  
Keyword(s):  
Deep Sea ◽  
Depth Profiling ◽  
Deep Ocean ◽  
Euphotic Zone ◽  
Depth Resolution ◽  
Remotely Operated Vehicle ◽  
Sea Trial ◽  
Depth Profiles ◽  
Diving Depth ◽  
Optical Spectrometry

Depth profiling investigation plays an important role in studying the dynamic processes of the ocean. In this paper, a newly developed hyphenated underwater system based on multi-optical spectrometry is introduced and used to measure seawater spectra at different depths with the aid of a remotely operated vehicle (ROV). The hyphenated system consists of two independent compact deep-sea spectral instruments, a deep ocean compact autonomous Raman spectrometer and a compact underwater laser-induced breakdown spectroscopy system for sea applications (LIBSea). The former was used to take both Raman scattering and fluorescence of seawater, and the LIBS signal could be recorded with the LIBSea. The first sea trial of the developed system was taken place in the Bismarck Sea, Papua New Guinea, in June 2015. Over 4000 multi-optical spectra had been captured up to the diving depth about 1800 m at maximum. The depth profiles of some ocean parameters were extracted from the captured joint Raman–fluorescence and LIBS spectra with a depth resolution of 1 m. The concentrations of [Formula: see text] and the water temperatures were measured using Raman spectra. The fluorescence intensities from both colored dissolved organic matter (CDOM) and chlorophyll were found to be varied in the euphotic zone. With LIBS spectra, the depth profiles of metallic elements were also obtained. The normalized intensity of atomic line Ca(I) extracted from LIBS spectra raised around the depth of 1600 m, similar to the depth profile of CDOM. This phenomenon might be caused by the nonbuoyant hydrothermal plumes. It is worth mentioning that this is the first time Raman and LIBS spectroscopy have been applied simultaneously to the deep-sea in situ investigations.

scholarly journals Sub-nm depth resolution in sputter depth profiling by low energy ion bombardment

2004 ◽  
Vol 2 ◽  
pp. 24-27
Author(s):  
Hyung-Ik Lee ◽  
Dae Won Moon ◽  
Suhk Kun Oh ◽  
Hee Jae Kang ◽  
Hyun Kyong Kim ◽  
...  
Keyword(s):  
Depth Profiling ◽  
Depth Resolution ◽  
Ion Bombardment ◽  
Low Energy

Neutron Depth Profiling by Large Angle Coincidence Spectroscopy

1994 ◽  
Vol 354 ◽  
Author(s):  
J. Vacík ◽  
J. Cervenä ◽  
V. Hnatowicz ◽  
V. Havränek ◽  
D. Fink
Keyword(s):  
Analytical Method ◽  
Large Angle ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Solid Material ◽  
Detection Sensitivity ◽  
Neutron Depth Profiling ◽  
Depth Profiles ◽  
Low Concentrations ◽  
Coincidence Spectroscopy

AbstractExtremely low concentrations of several technologically important elements (mainly lithium and boron) have been studied by a modified neutron depth profiling technique. Large angle coincidence spectroscopy using neutrons to probe solids with a thickness not exceeding several micrometers has proved to be a powerful analytical method with an excelent detection sensitivity. Depth profiles in the ppb atomic range are accessible for any solid material. A depth resolution of about 20 nanometers can be achieved.

Low-energy electron-induced decarbonylation of Fe(CO)5 films adsorbed on Au(111) surfaces

2011 ◽  
Vol 89 (10) ◽  
pp. 1163-1173 ◽  
Author(s):  
Christelle Hauchard ◽  
Paul A. Rowntree
Keyword(s):  
Electron Beam ◽  
Cross Sections ◽  
Protective Layer ◽  
Incident Beam ◽  
High Sensitivity ◽  
Grazing Incidence ◽  
Film Structure ◽  
Low Energy ◽  
Structural Motif ◽  
Incident Electron Energy

The decarbonylation of Fe(CO)5 adsorbed in monolayer and multilayer films on Au(111)/mica substrates has been induced by 0–20 eV electrons and studied by grazing incidence IR spectroscopy. Our results show that the cross sections for the initial stages of this process in as-deposited films range from 60–300 Å2 and show considerable variations with the incident electron energy. The high sensitivity to low-energy electrons is believed to be the result of secondary reactions of anion fragments in the film with the neighbouring Fe(CO)5 moieties, leading to increasingly massive heteronuclear Fen(CO)m species and progressive CO elimination. Continued exposure to the electron beam leads to the slower degradation of these newly created species into an Fe-rich deposit containing traces of CO. These traces are removed by subsequent heating to ~300 K. Fe(CO)5 films that have been subjected to temperatures exceeding 125 K have no measurable sensitivity to the electron beam in the 0–20 eV regime; this is believed to be due to the structural transformation of the as-deposited thin film structure into 3D aggregates. This structural motif presents a very limited quantity of the adsorbed Fe(CO)5 to the incident beam, and may also form a protective layer of the robust Fen(CO)m species during the initial stages of exposure to the electrons.

scholarly journals Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

2015 ◽  
Vol 30 (5) ◽  
pp. 1086-1099 ◽  
Author(s):  
Yves Kayser ◽  
Philipp Hönicke ◽  
Dariusz Banaś ◽  
Jean-Claude Dousse ◽  
Joanna Hoszowska ◽  
...  
Keyword(s):  
Depth Distribution ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Low Energy ◽  
X Ray ◽  
Non Destructive

Grazing XRF measurements allow for a non-destructive investigation of the depth distribution of ion implantations.

scholarly journals Effect of extinction beam-plasma discharge while the injection thermoelectrons during transportation of the electron beam in the forevacuum pressure range

2021 ◽  
Vol 2064 (1) ◽  
pp. 012117
Author(s):  
A A Zenin ◽  
I Y Bakeev ◽  
A S Klimov
Keyword(s):  
Electron Beam ◽  
Power Loss ◽  
Pressure Range ◽  
Plasma Discharge ◽  
Low Energy ◽  
Small Current ◽  
Beam Plasma ◽  
Order Of Magnitude ◽  
Medium Vacuum ◽  
Powerful Electron

Abstract The article presents the results of experiments aimed at studying the effect of low-energy thermoelectrons on the parameters of the beam plasma and plasma of the beam-plasma discharge generated during the transportation of a powerful electron beam in the pressure range of the medium vacuum. It is shown that the injection of a sufficiently small current of low-energy thermoelectrons is capable of violating the conditions for the combustion of the beam-plasma discharge and reducing the power loss of the electron beam for SPR generation. In this case, the plasma concentration decreases by almost an order of magnitude (to 1015 m–3) and the temperature of plasma electrons decreases by almost three (to 0.3 eV).

Suppression by low-energy thermionic electrons of instabilities in the transport of a high-power electron beam in the forevacuum pressure range.

2021 ◽  
Author(s):  
Aleksey Zenin ◽  
Ilya Bakeev ◽  
A. S. Klimov ◽  
E M Oks
Keyword(s):  
Electron Beam ◽  
Electron Temperature ◽  
High Power ◽  
Pressure Range ◽  
Plasma Discharge ◽  
Plasma Electron ◽  
Low Energy ◽  
Plasma Cathode ◽  
Beam Plasma ◽  
Order Of Magnitude

Abstract We report here the results of our studies on the effect of injection of low-energy thermionic electrons on the suppression of instabilities of the beam-plasma discharge type in a beam-plasma during the transport of a powerful continuous electron beam generated by a plasma-cathode electron source in the forevacuum range of pressure. As result of thermionic electron injection, the plasma electron temperature decreased to 0.3 eV and the plasma density decreased by an order of magnitude to 10^15 m-3. The minimal thermoelectron current required for suppressing the beam-plasma discharge increases with increasing emission current and decreases with increase of the beam accelerating voltage.

Thermal Behaviour of Implanted Nitrogen and Accumulated Hydrogen in Titanium

1997 ◽  
Vol 504 ◽  
Author(s):  
M. Soltani-Farshi ◽  
H. Baumann ◽  
D. Rück ◽  
G. Walter ◽  
K. Bethge
Keyword(s):  
Ion Implantation ◽  
Depth Distribution ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
Nitrogen Ion Implantation ◽  
X Ray ◽  
Depth Profiles ◽  
Hydrogen Accumulation ◽  
Nitrogen Ion

ABSTRACTThe influence of nitrogen ion implantation on the hydrogen accumulation in titanium was investigated as function of sample temperature and ion fluence. 150 keV nitrogen (15N) ions were implanted at different sample temperatures up to 700°C with fluences ranging from 1 × 1017 to 1 × 1018 ions/cm2. The amount of accumulated hydrogen and its depth distribution was measured quantitatively with the 15N depth profiling method. The implanted 15N depth profiles were measured by the reverse reaction 15N(p, αγ)12C at 429 keV. The binary phases of the implanted nitrogen with titanium are detected by grazing incidence x-ray diffraction. The results are compared with those obtained for samples implanted at RT and subsequently thermally treated.

ToF-SIMS Depth Profiling of Organic Delta Layers with Low-Energy Cesium Ions: Depth Resolution Assessment

2019 ◽  
Vol 30 (8) ◽  
pp. 1537-1544 ◽  
Author(s):  
Céline Noël ◽  
Yan Busby ◽  
Nicolas Mine ◽  
Laurent Houssiau
Keyword(s):  
Depth Profiling ◽  
Depth Resolution ◽  
Low Energy ◽  
Cesium Ions ◽  
Tof Sims ◽  
Sims Depth Profiling
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