scholarly journals Sensing applications of micro- and nanoelectromechanical resonators

2007 ◽  
Vol 221 (2) ◽  
pp. 59-65 ◽  
Author(s):  
F Niebelschütz ◽  
V Cimalla ◽  
K Brückner ◽  
R Stephan ◽  
K Tonisch ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminium Nitride ◽  
Nanoelectromechanical Systems ◽  
Silicon Substrates ◽  
Mass Loading ◽  
Quality Factors ◽  
Ambient Conditions ◽  
Resonant Frequencies ◽  
Sensing Applications ◽  
Active Layers

The sensitivity of micro- and nanoscale resonator beams for sensing applications in ambient conditions was investigated. Micro-electromechanical (MEMS) and nanoelectromechanical systems (NEMS) were realized using silicon carbide (SiC) and polycrystalline aluminium nitride (AlN) as active layers on silicon substrates. Resonant frequencies and quality factors in vacuum as well as in air were measured. The sensitivity behaviour under ambient conditions with a mass loading in the range of picogram (pg) was verified and measurements with biological mass loading were performed. In addition, the sensitivity to pressure variations was analysed.

Resonant Sensors for Microfluidic Applications

2006 ◽  
Vol 951 ◽  
Author(s):  
Florentina Niebelschütz ◽  
Katja Tonisch ◽  
Volker Cimalla ◽  
Klemens Brückner ◽  
Ralf Stephan ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Aluminum Nitride ◽  
Microfluidic Channels ◽  
Biological Cells ◽  
Ambient Conditions ◽  
Resonant Sensors ◽  
Sensing Applications ◽  
Resonance Shift ◽  
Active Layers ◽  
Physical Sensor

ABSTRACTIn this work we present both resonators working at ambient conditions and their first application as a biological and physical sensor. Singly- and doubly-clamped resonators of different geometries were realized using active layers of silicon carbide and aluminum nitride. The resonators were excited by magneto-motive actuation. The quality factor reached 350 and 50000 in air and in vacuum (2-5 10−5 mbar), respectively, which is sufficient for sensing applications in air. The resonance shift caused by mass loadings in the range of picograms and by single biological cells was measured at ambient conditions. Initial non-resonant measurements in liquids such as propanol were performed to investigate the possibility of viscosity measurements in small volumes such as microfluidic channels and droplets.

Electrofluidic Assembly of Nanoelectromechanical Systems

2001 ◽  
Vol 687 ◽  
Author(s):  
Stephane Evoy ◽  
Ben Hailer ◽  
Martin Duemling ◽  
Benjamin R. Martin ◽  
Thomas E. Mallouk ◽  
...  
Keyword(s):  
Nanoelectromechanical Systems ◽  
Quality Factors ◽  
Top Down ◽  
High Quality ◽  
Resonant Frequencies ◽  
Surface Machining ◽  
Sensor Applications ◽  
Surface Assembly ◽  
Manufacturing Technologies ◽  
20 Nm

AbstractRecent advances in surface nanomachining have allowed the fabrication of mechanical structures with dimensions reaching 20 nm, and resonant frequencies in the 100s of MHz. Structural issues prevent the “top-down” surface machining of high-quality NEMS resonators. Such systems are alternatively to be bestowed by “bottom-up” manufacturing technologies. We report the surface assembly of RF-range NEMS. Using electrofluidic assembly, we have successfully positioned Rh mechanical beams onto specific sites of a silicon circuit. With diameters as small as 250 nm and lengths varying from 2 to 3 [.proportional]m, preliminary results show mechanical resonances ranging from 5 MHz to 80 MHz, and quality factors reaching 500. We also report the development of nanostructured NEMS for sensor applications, and present strategies for their deployment in integrative nanosystems.

Surface Characterization of Silicon Carbide Following Shallow Implantation of Palladium Ions

2005 ◽  
Vol 900 ◽  
Author(s):  
Claudiu I. Muntele ◽  
Sergey Sarkisov ◽  
Iulia Muntele ◽  
Daryush Ila
Keyword(s):  
Silicon Carbide ◽  
Surface Characterization ◽  
Wide Bandgap ◽  
Electrical Contacts ◽  
Temperature Dependent ◽  
Wide Bandgap Semiconductor ◽  
Hydrogen Sensing ◽  
Fast Switching ◽  
Sensing Applications

ABSTRACTSilicon carbide is a promising wide-bandgap semiconductor intended for use in fabrication of high temperature, high power, and fast switching microelectronics components running without cooling. For hydrogen sensing applications, silicon carbide is generally used in conjunction with either palladium or platinum, both of them being good catalysts for hydrogen. Here we are reporting on the temperature-dependent surface morphology and depth profile modifications of Au, Ti, and W electrical contacts deposited on silicon carbide substrates implanted with 20 keV Pd ions.

Deposition of Epitaxially Oriented Films of Cubic SiC on Silicon by Laser Ablation of Elemental Targets.

1994 ◽  
Vol 339 ◽  
Author(s):  
L. Rimai ◽  
R. Ager ◽  
W. H. Weber ◽  
J. Hangas ◽  
B. D. Poindexter
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Crystalline Silicon ◽  
Epitaxial Films ◽  
Ablation Plume ◽  
Silicon Substrates ◽  
Pure Silicon ◽  
Silicon Target ◽  
Oriented Films ◽  
Pure Carbon

ABSTRACTSilicon carbide films are grown epitaxially on crystalline silicon substrates heated above 1000 °C, by laser ablation of pure carbon targets to thicknesses between 300 and 400 nm. These films grow on top of the silicon substrate from the carbon in the ablation plume and from the silicon of the substrate. By using a method of alternate ablation of a pure carbon and a pure silicon target, similar epitaxial films can be grown to thicknesses in excess of 1 μm with part of the silicon being supplied by the ablation plume of the silicon target.

scholarly journals Opto-Mechanical Photonic Crystal Cavities for Sensing Application

2020 ◽  
Vol 10 (20) ◽  
pp. 7080
Author(s):  
Ji Xia ◽  
Qifeng Qiao ◽  
Guangcan Zhou ◽  
Fook Siong Chau ◽  
Guangya Zhou
Keyword(s):  
Photonic Crystal ◽  
Light Propagation ◽  
Mass Force ◽  
Mechanical Interaction ◽  
Quality Factors ◽  
Photonic Crystal Cavities ◽  
New Class ◽  
Experimental Systems ◽  
Sensing Applications ◽  
On Chip

A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and small mode volumes as well as good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the opto-mechanical interaction, a PhC cavity integrated opto-mechanical system provides an attractive platform for ultrasensitive sensors to detect displacement, mass, force, and acceleration. In this review, we introduce basic physical concepts of opto-mechanical PhC system and describe typical experimental systems for sensing applications. Opto-mechanical interaction-based PhC cavities offer unprecedented opportunities to develop lab-on-a-chip devices and witness a promising prospect to further manipulate light propagation in the nanophotonics.

scholarly journals Cantilever-Droplet-Based Sensing of Magnetic Particle Concentrations in Liquids

Sensors ◽  
2019 ◽  
Vol 19 (21) ◽  
pp. 4758 ◽  
Author(s):  
Wilson Ombati Nyang’au ◽  
Andi Setiono ◽  
Maik Bertke ◽  
Harald Bosse ◽  
Erwin Peiner
Keyword(s):  
Water Droplet ◽  
Water Evaporation ◽  
Ambient Conditions ◽  
Evaporation Time ◽  
Particle Count ◽  
Microcantilever Sensors ◽  
Small Water ◽  
Monodispersed Particles ◽  
Sensing Applications ◽  
Cantilever Sensor

Cantilever-based sensors have attracted considerable attention in the recent past due to their enormous and endless potential and possibilities coupled with their dynamic and unprecedented sensitivity in sensing applications. In this paper, we present a technique that involves depositing and vaporizing (at ambient conditions) a particle-laden water droplet onto a defined sensing area on in-house fabricated and commercial-based silicon microcantilever sensors. This process entailed the optimization of dispensing pressure and time to generate and realize a small water droplet volume (Vd = 49.7 ± 1.9 pL). Moreover, we monitored the water evaporation trends on the sensing surface and observed total evaporation time per droplet of 39.0 ± 1.8 s against a theoretically determined value of about 37.14 s. By using monodispersed particles in water, i.e., magnetic polystyrene particles (MPS) and polymethyl methacrylate (PMMA), and adsorbing them on a dynamic cantilever sensor, the mass and number of these particles were measured and determined comparatively using resonant frequency response measurements and SEM particle count analysis, respectively. As a result, we observed and reported monolayer particles assembled on the sensor with the lowest MPS particles count of about 19 ± 2.

Analysis of a circular microstrip antenna on isotropic or uniaxially anisotropic substrate using neurospectral approach

2013 ◽  
Vol 33 (1/2) ◽  
pp. 567-580 ◽  
Author(s):  
Sami Bedra ◽  
Siham Benkouda ◽  
Tarek Fortaki
Keyword(s):  
Resonant Frequency ◽  
Quality Factor ◽  
Microstrip Antenna ◽  
Numerical Results ◽  
Spectral Domain ◽  
Quality Factors ◽  
Resonant Frequencies ◽  
Content Type ◽  
Anisotropic Substrate ◽  
Circular Microstrip Antenna

Purpose – The paper aims to propose an artificial neural network (ANN) in conjunction with spectral domain formulation for fast and accurate determination of the resonant frequency and quality factor of circular microstrip antenna printed on isotropic or anisotropic substrate. This neurospectral approach reduces the problem complexity. Design/methodology/approach – The moment method implemented in the spectral domain provides good accuracy but its computational cost is high due to the evaluation of the slowly decaying integrals and the iterative nature of the solution process. The paper introduces the electromagnetic knowledge combined with ANN in the analysis of circular microstrip antenna on isotropic or uniaxially anisotropic substrate to reduce the complexity of the spectral approach and to minimize the CPU time necessary to obtain the numerical results. Findings – The resonant frequency results obtained from the neural model are in very good agreement with the experimental and theoretical results available in the literature. Finally, numerical results for the substrate anisotropy effect on the resonant frequency, quality factor and radiation pattern are also presented. Originality/value – The paper develops fast and accurate model based on ANN technique to calculate the resonant frequencies and quality factors of circular microstrip antennas. ANN is used to model the relationship between the parameters of the microstrip antenna and the resonant frequencies and quality factors obtained from the spectral domain approach. This relatively simple model allows designers to predict accurately the resonant frequencies and quality factors for a given design without having to develop or run the spectral method codes themselves. The main advantages of the method are: less computing time than the spectral model, results with accuracy equivalent to that of full-wave models and cost effectiveness, since the client can use a simple PC for implementation. Another advantage of the proposed ANN model is that it takes into account the uniaxial anisotropy in the substrate without increasing the network size. This is done by combining ANN with electromagnetic knowledge.

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