Effect of Hydrogen Ion Energy in the Process of Reactive Ion Etching of Sn Thin Films by Hydrogen Plasmas
Keyword(s):
1986 ◽
Vol 4
(3)
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pp. 440-442
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Keyword(s):
2009 ◽
Keyword(s):
Reactive ion etching of Pb(Zr[sub x]Ti[sub 1−x])O[sub 3] thin films in an inductively coupled plasma
1998 ◽
Vol 16
(4)
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pp. 1894
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Keyword(s):
1998 ◽
Vol 13
(2)
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pp. 362-367
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1999 ◽
Vol 116-119
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pp. 456-460
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