Design of a Semi-Oval Shaped Ultrasonic Motor

2013 ◽  
Vol 7 (5) ◽  
pp. 537-543 ◽  
Author(s):  
Shine-Tzong Ho ◽  
◽  
Yan-Jhang Shin

A low voltage drive linear ultrasonic motor with a semi-oval shaped stator is proposed in this paper. In the stator, two multilayer piezoelectric actuators are clamped in the holder of the stator by pre-stressing to excite a semi-oval ring. The semi-oval shaped stator is designed to have normal vibration and tangential vibration modes, thus these two orthogonal mechanical vibration modes of the stator can be excited to generate elliptical motion at the contact point of the stator. In design of the motor, ANSYS finite element analysis software was used in this study to accomplish the design and analysis. A prototype motor was fabricated and measured. For single phase signal driving, typical output of the prototype is a no-load speed of 88 mm/s and maximum thrust force of 1.96 N at a voltage of 16 Vp. For two sine wave signals driving, typical output of the prototype is a no-load speed of 106 mm/s and maximum thrust force of 3.33 N at a voltage of 16 Vp.

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 958
Author(s):  
Jiayin Li ◽  
Yin Wang ◽  
Ziyan Chen ◽  
Fang Cheng ◽  
Qing Yu

A minimized linear ultrasonic motor was proposed, and two flexural bimorph vibrators were utilized to form its stator. The construction of the linear ultrasonic motor and its operation principle was introduced. Two working modes with the same local deformation distribution were chosen on the basis of Finite Element Analysis (FEA). To obtain its optimized structural parameters, sensitivities on frequency difference were calculated, and a way of decreasing the frequency difference of two working modes was introduced. A prototype of the optimized model was made. The modal testing of the stator and its performance evaluation was conducted. The modal testing results were in good agreement with that of the simulation. The maximum speed of the prototype is 245 mm/s, and its maximum thrust is 1.6 N.


2011 ◽  
Vol 211-212 ◽  
pp. 254-258
Author(s):  
Jun Kao Liu ◽  
Wei Shan Chen ◽  
Zhen Yu Xue

A new ring-type linear ultrasonic motor is proposed in this study. In this new design, bending vibration traveling wave is generated in a long ring by two groups of PZT ceramics bonded on the inner sides of the linear beams. Elliptical trajectory motions can be formed at particles on the teeth, which can realize the linear driving by frictional force. The working principle of the proposed design is introduced. Two bending vibration modes that have a phase difference of 90deg on space are analyzed. The elliptical motion trajectory of node on the tooth gained by the transient analysis verifies the excitation of bending traveling wave. A prototype motor is fabricated and measured, and a maximum speed of 15mm/s is reached.


Ultrasonics ◽  
2020 ◽  
Vol 107 ◽  
pp. 106158 ◽  
Author(s):  
Danhong Lu ◽  
Qiuxiang Lin ◽  
Bingxun Chen ◽  
Chunrong Jiang ◽  
Xia Hu

2016 ◽  
Vol 10 (4) ◽  
pp. 549-556 ◽  
Author(s):  
Ayato Kanada ◽  
◽  
Tomoaki Mashimo ◽  
Kazuhiko Terashima ◽  

We propose output shafts with a preload generation mechanism to improve the output torque and thrust force of the rotary-linear ultrasonic motor. The stator is comprised of a single metallic cube with a through-hole, and the output shafts are inserted into the hole to generate motion in both its circumferential and axial directions arbitrarily. In this paper, two design concepts for optimizing the preload using the output shafts are examined. The first involves a cylinder shaft with micron-order accuracy diameter realization. The cylinder shaft makes contact with the entire inner surface of the stator and generates a preload between the stator and shaft. The second concept employs a spring shaft having a slightly larger diameter than the stator hole, which expands in the radial direction and generates the preload. Experiments show that these design concepts improve the output torque and thrust force.


2014 ◽  
Vol 945-949 ◽  
pp. 1327-1332 ◽  
Author(s):  
He Long Wang ◽  
Wei Shan Chen ◽  
Jun Kao Liu

A new type linear ultrasonic motor using Second-order bending and First-order torsional modes (2B-1T) is proposed. The ultrasonic motor has two driving feet and the continuous linear motions of sliders are realized by the frictional force between stator and sliders. In this new design, bending vibration is excited by d33 mode, which controls the preload pressure, and torsional vibration is excited by d15 mode, which generates the driving force. The elliptical trajectories of both feet are achieved, when the phase difference of the two modes is 90° in time and space. The working principle of ultrasonic motor using 2B-1T is simulated. A parametric model of the stator is designed. The sensitive analyses of structural parameters are gained with modal analysis. The characteristics and trajectories of driver feet are studied by transient analysis. These results can provide theoretical basis for the development of this new type ultrasonic motor.


2016 ◽  
Vol 10 (4) ◽  
pp. 557-563 ◽  
Author(s):  
Manabu Aoyagi ◽  
◽  
Ryuichi Nakayasu ◽  
Hidekazu Kajiwara ◽  

A linear ultrasonic motor (LUSM) with two parallel beams and two multilayer piezoelectric actuators (MPAs) has been developed. The MPAs are aligned across the beams, and the force and displacement generated by the MPAs result in the deformation of the beams in the orthogonal direction. The LUSM has two types of operation modes: dynamic and static. In dynamic operation, the MPAs are driven by alternating voltages with a phase difference, and elliptical displacement motions are generated on the surfaces of the beams. Objects touching the surfaces of the beams can be moved in the same direction by friction. In addition, micro positioning is available over a wide range by combining dynamic and static operations. The characteristics of the LUSM include a maximum speed of 41 mm/s and a maximum thrust of 3.4 N at an operating voltage of 20 Vp-p. A movement range of approximately 8 μm has been confirmed during static operation.


2021 ◽  
Vol 29 (1) ◽  
pp. 91-99
Author(s):  
Wei-qing HUANG ◽  
◽  
Cheng-long YANG ◽  
Zhao-chen SHEN ◽  
Hao-dong XUE ◽  
...  

2019 ◽  
Vol 13 (3) ◽  
pp. 5334-5346
Author(s):  
M. N. Nguyen ◽  
L. Q. Nguyen ◽  
H. M. Chu ◽  
H. N. Vu

In this paper, we report on a SOI-based comb capacitive-type accelerometer that senses acceleration in two lateral directions. The structure of the accelerometer was designed using a proof mass connected by four folded-beam springs, which are compliant to inertial displacement causing by attached acceleration in the two lateral directions. At the same time, the folded-beam springs enabled to suppress cross-talk causing by mechanical coupling from parasitic vibration modes. The differential capacitor sense structure was employed to eliminate common mode effects. The design of gap between comb fingers was also analyzed to find an optimally sensing comb electrode structure. The design of the accelerometer was carried out using the finite element analysis. The fabrication of the device was based on SOI-micromachining. The characteristics of the accelerometer have been investigated by a fully differential capacitive bridge interface using a sub-fF switched-capacitor integrator circuit. The sensitivities of the accelerometer in the two lateral directions were determined to be 6 and 5.5 fF/g, respectively. The cross-axis sensitivities of the accelerometer were less than 5%, which shows that the accelerometer can be used for measuring precisely acceleration in the two lateral directions. The accelerometer operates linearly in the range of investigated acceleration from 0 to 4g. The proposed accelerometer is expected for low-g applications.


AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025238
Author(s):  
Danhong Lu ◽  
Qiuxiang Lin ◽  
Yanxiang Han ◽  
Bingxun Chen ◽  
Chunrong Jiang ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document