Machine-Learning-Assisted Segmentation of Focused Ion Beam-Scanning Electron Microscopy Images with Artifacts for Improved Void-Space Characterization of Tight Reservoir Rocks

SPE Journal ◽  
2021 ◽  
pp. 1-20
Author(s):  
Andrey Kazak ◽  
Kirill Simonov ◽  
Victor Kulikov

Summary The modern focused ion beam-scanning electron microscopy (FIB-SEM) allows imaging of nanoporous tight reservoir-rock samples in 3D at a resolution up to 3 nm/voxel. Correct porosity determination from FIB-SEM images requires fast and robust segmentation. However, the quality and efficient segmentation of FIB-SEM images is still a complicated and challenging task. Typically, a trained operator spends days or weeks in subjective and semimanual labeling of a single FIB-SEM data set. The presence of FIB-SEM artifacts, such as porebacks, requires developing a new methodology for efficient image segmentation. We have developed a method for simplification of multimodal segmentation of FIB-SEM data sets using machine-learning (ML)-based techniques. We study a collection of rock samples formed according to the petrophysical interpretation of well logs from a complex tight gas reservoir rock of the Berezov Formation (West Siberia, Russia). The core samples were passed through a multiscale imaging workflow for pore-space-structure upscaling from nanometer to log scale. FIB-SEM imaging resolved the finest scale using a dual-beam analytical system. Image segmentation used an architecture derived from a convolutional neural network (CNN) in the DeepUNet (Ronneberger et al. 2015) configuration. We implemented the solution in the Pytorch® (Facebook, Inc., Menlo Park, California, USA) framework in a Linux environment. Computation exploited a high-performance computing system. The acquired data included three 3D FIB-SEM data sets with a physical size of approximately 20 × 15 × 25 µm with a voxel size of 5 nm. A professional geologist manually segmented (labeled) a fraction of slices. We split the labeled slices into training, validation, and test data. We then augmented the training data to increase its size. The developed CNN delivered promising results. The model performed automatic segmentation with the following average quality indicators according to test data: accuracy of 86.66%, precision of 54.93%, recall of 83.76%, and F1 score of 55.10%. We achieved a significant boost in segmentation speed of 14.5 megapixel (MP)/min. Compared with 0.18 to 1.45 MP/min for manual labeling, this yielded an efficiency increase of at least 10 times. The presented research work improves the quality of quantitative petrophysical characterization of complex reservoir rocks using digital rock imaging. The development allows the multiphase segmentation of 3D FIB-SEM data complicated with artifacts. It delivers correct and precise pore-space segmentation, resulting in little turn-around-time saving and increased porosity-data quality. Although image segmentation using CNNs is mainstream in the modern ML world, it is an emerging novel approach for reservoir-characterizationtasks.

2020 ◽  
Vol 6 (10) ◽  
pp. 107
Author(s):  
Iryna Reimers ◽  
Ilia Safonov ◽  
Anton Kornilov ◽  
Ivan Yakimchuk

Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) tomography provides a stack of images that represent serial slices of the sample. These images are displaced relatively to each other, and an alignment procedure is required. Traditional methods for alignment of a 3D image are based on a comparison of two adjacent slices. However, such algorithms are easily confused by anisotropy in the sample structure or even experiment geometry in the case of porous media. This may lead to significant distortions in the pore space geometry, if there are no stable fiducial marks in the frame. In this paper, we propose a new method, which meaningfully extends existing alignment procedures. Our technique allows the correction of random misalignments between slices and, at the same time, preserves the overall geometrical structure of the specimen. We consider displacements produced by existing alignment algorithms as a signal and decompose it into low and high-frequency components. Final transformations exclude slow variations and contain only high frequency variations that represent random shifts that need to be corrected. The proposed algorithm can operate with not only translations but also with arbitrary affine transformations. We demonstrate the performance of our approach on a synthetic dataset and two real FIB-SEM images of natural rock.


Author(s):  
Ilia Safonov ◽  
Anton Kornilov ◽  
Iryna Reimers

Digital rock analysis is a prospective approach to estimate properties of oil and gas reservoirs. This concept implies constructing a 3D digital twin of a rock sample. Focused Ion Beam - Scanning Electron Microscope (FIB-SEM) allows to obtain a 3D image of a sample at nanoscale. One of the main specific features of FIB-SEM images in case of porous media is pore-back (or shine-through) effect. Since pores are transparent, their back side is visible in the current slice, whereas, in fact, it locates in the following ones. A precise segmentation of pores is a challenging problem. Absence of annotated ground truth complicates fine-tuning the algorithms for processing of FIB-SEM data and prevents successful application of machine- learning-based methods, which require a huge training set. Recently, several synthetic FIB- SEM images based on stochastic structures were created. However, those images strongly differ from images of real samples. We propose fast approaches to render semisynthetic FIB- SEM images, which imply that intensities of voxels of mineral matrix in a milling plane, as well as geometry of pore space, are borrowed from an image of rock sample saturated by epoxy. Intensities of voxels in pores depend on the distance from milling plane to the given voxel along a ray directed at an angle equal to the angle between FIB and SEM columns. The proposed method allows to create very realistic FIB-SEM images of rock samples with precise ground truth. Also, it opens the door for numerical estimation of plenty of algorithms for processing FIB-SEM data.


2021 ◽  
Author(s):  
Katya Giannios ◽  
Abhishek Chaurasia ◽  
Guillaume Thibault ◽  
Jessica L. Riesterer ◽  
Erin Stempinski ◽  
...  

Recent advances in Focused Ion Beam-Scanning Electron Microscopy (FIB- SEM) allows the imaging and analysis of cellular ultrastructure at nanoscale resolution, but the collection of labels and/or noise-free data sets has several challenges, often immutable. Reasons range from time consuming manual annotations, requiring highly trained specialists, to introducing imaging artifacts from the prolonged scanning during acquisition. We propose a fully unsupervised Noise Reconstruction and Removal Network for denoising scanning electron microscopy images. The architecture, inspired by gated recurrent units, reconstructs and removes the noise by synthesizing the sequential data. At the same time the fully un- supervised training guides the network in distinguishing true signal from noise and gives comparable results to supervised architectures. We demonstrate that this new network specialized on 3D electron microscopy data sets, achieves comparable and even better results than supervised networks.


Author(s):  
E. Hendarto ◽  
S.L. Toh ◽  
J. Sudijono ◽  
P.K. Tan ◽  
H. Tan ◽  
...  

Abstract The scanning electron microscope (SEM) based nanoprobing technique has established itself as an indispensable failure analysis (FA) technique as technology nodes continue to shrink according to Moore's Law. Although it has its share of disadvantages, SEM-based nanoprobing is often preferred because of its advantages over other FA techniques such as focused ion beam in fault isolation. This paper presents the effectiveness of the nanoprobing technique in isolating nanoscale defects in three different cases in sub-100 nm devices: soft-fail defect caused by asymmetrical nickel silicide (NiSi) formation, hard-fail defect caused by abnormal NiSi formation leading to contact-poly short, and isolation of resistive contact in a large electrical test structure. Results suggest that the SEM based nanoprobing technique is particularly useful in identifying causes of soft-fails and plays a very important role in investigating the cause of hard-fails and improving device yield.


Author(s):  
Dirk Doyle ◽  
Lawrence Benedict ◽  
Fritz Christian Awitan

Abstract Novel techniques to expose substrate-level defects are presented in this paper. New techniques such as inter-layer dielectric (ILD) thinning, high keV imaging, and XeF2 poly etch overflow are introduced. We describe these techniques as applied to two different defects types at FEOL. In the first case, by using ILD thinning and high keV imaging, coupled with focused ion beam (FIB) cross section and scanning transmission electron microscopy (STEM,) we were able to judge where to sample for TEM from a top down perspective while simultaneously providing the top down images giving both perspectives on the same sample. In the second case we show retention of the poly Si short after removal of CoSi2 formation on poly. Removal of the CoSi2 exposes the poly Si such that we can utilize XeF2 to remove poly without damaging gate oxide to reveal pinhole defects in the gate oxide. Overall, using these techniques have led to 1) increased chances of successfully finding the defects, 2) better characterization of the defects by having a planar view perspective and 3) reduced time in localizing defects compared to performing cross section alone.


2004 ◽  
Vol 822 ◽  
Author(s):  
A. Morata ◽  
A. Tarancón ◽  
G. Dezanneau ◽  
F. Peiró ◽  
J. R. Morante

AbstractIn the present work, the screen printing technique has been used to deposit thick films of Zr0.84Y016O1.92 (8YSZ). In order to control the final porosity in view of a specific application (SOFCs or gas sensor), an experimental design based on analysis of variances (ANOVA) has been carried out. From this, we were able to determine the influence of several technological parameters on films porosity and grain size. The films obtained have been analysed with both Scanning Electron Microscopy (SEM) and Focused Ion Beam (FIB) combined with SEM. We show that only the combination of experimental design and advanced observation technique such as Focused Ion Beam allowed us to extract significant information for the improvement of the deposition process.


Author(s):  
P. Olivero ◽  
J. Forneris ◽  
M. Jakšić ◽  
Ž. Pastuović ◽  
F. Picollo ◽  
...  

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