Experimental Investigations On Optimizing Manufacturing Parameters For Electro-Spark Deposition Diamond Wire Saw

Author(s):  
Chengyun Li ◽  
Peiqi Ge ◽  
Wenbo Bi ◽  
Qihao Wang

Abstract The third generation of superhard semiconductor materials, represented by single-crystal SiC, is used widely in microelectronics due to their excellent physical and mechanical properties. However, their high hardness and brittleness become the bottleneck of their development. Diamond wire saw (DWS) has become the mainstream tool for sawing hard and brittle crystal materials. However, the diamond abrasive is consolidated on the core wire through resin or electroplated nickel, and the holding strength is not high. When sawing superhard crystal materials, the efficiency is low. In order to improve the sawing efficiency of superhard crystal materials, it is of great significance to improve the wear resistance of wire saw and the holding strength of abrasive particles. Electro-spark deposition (ESD) can deposit electrode materials on the substrate with low heat input to achieve metallurgical bonding between metal materials. It can effectively improve the gripping strength of the abrasive grains. And the sawing ability of the wire saw to make the consolidated DWS by the ESD process. In this paper, the ESD equipment has been designed according to the characteristics of the ESDDWS process. The discharge gap size and electrode consumption are monitored in real-time by a single-chip microcomputer (SCM). Orthogonal experiments were carried out for the two motion modes. The effects of process parameters, such as (A) Grain size, (B) Abrasive content, (C) Pulse duration time, (D) Compacting pressure, (E) Current, (F) Electrode diameter, (G) Pulse interval time, (H) Reciprocating times, (I) Wire feed speed, on the quality of ESDDWS were analyzed. Through the extremum difference analysis, the optimal parameter combinations of ESDDWS were obtained. The results of the validation experiment are better than the original experimental results.

2010 ◽  
Vol 450 ◽  
pp. 296-299 ◽  
Author(s):  
Xiao Ye Wang ◽  
Yan Li ◽  
Shu Juan Li

The experiment that WXD170-type reciprocating rotating diamond wire saw cuts SiC wafer was studied using orthogonal test method in this paper. The influence of cutting speed of diamond wire saw, work-piece feed speed and rotating speed of work-piece on cutting process were analyzed. The optimized cutting parameters which can improve surface quality of slices and reduce tangential force were obtained. The results show that: the surface quality of slices which was cloud-shaped can be improved significantly due to the increase of the work-piece rotation. The work-piece feed speed and the rotation speed have greater impact on the tangential force than the saw wire speed; the work-piece feed speed and the work-piece rotation speed have greater impact on surface roughness than the saw wire speed. An important way to be obtained the smaller tangential force and better surface quality of slices is considering of a reasonable match among cutting speed of diamond wire saw, work-piece feed speed and rotating speed of work-piece comprehensively.


2018 ◽  
Vol 232 ◽  
pp. 03002 ◽  
Author(s):  
Lun Li ◽  
Shaodong Yang ◽  
Jishun Li

For the process of optimizing the process parameters in the process of cutting the hard and brittle materials such as single-crystal SiC by diamond wire saw, the process parameters such as wire saw speed, workpiece feed speed and workpiece rotation speed are the design variables, and the sawing force and surface roughness are the processing targets by orthogonal experimental design. The grey system theory is introduced to optimize the multi-objective cutting process. According to the experimental data, the grey correlation resolution coefficient is determined. The significant relationship between the processing parameters and the target characteristics is analyzed. The optimal combination of process parameters under multi-target conditions is obtained, namely the workpiece feed rate is 0.025mm/min, the wire saw speed is 1.6m/s, and the workpiece rotating speed is 16r/min.


2011 ◽  
Vol 175 ◽  
pp. 249-253
Author(s):  
Chun Yan Yao ◽  
Jin Sheng Wang ◽  
Wei Peng

Slicing the wafers with diamond wire saw is recently paid much attention. This study proposes a novel method for developing a kind of diamond wire saws with ultraviolet curing resin and spraying technique. The process of wire saw manufacturing and the selection of optimal parameters are introduced. The experiments of the slicing marble are carried out using different diamond wire saws. The effects of wire saw running speed, work-piece in-feed speed, work-piece rotation frequency on the material removal rate, and surface roughness were investigated. Result shows that new method for development of diamond wire saw is feasible.


2014 ◽  
Vol 1004-1005 ◽  
pp. 1295-1298
Author(s):  
Chun Yan Zhang ◽  
Wu Yang ◽  
Yuan Sun

In order to study the basic rule of diamond wire saw slicing SiCp-Al composites, the theoretical analysis and experiments were carried out. The influences of diamond wire saw slicing speed and workpiece feed speed on surface quality and machining efficiency were discussed. The analysis results show that the machined surface gets smoother when diamond wire saw slicing speed changes from 2m/s to 3.5m/s, but gets rougher when diamond wire saw slicing speed changes from 3.5m/s to 4m/s. And the surface gets rougher when workpiece feed speed changes from 0.5m/s to 1m/s.The machining efficiency gets higher when diamond wire saw slicing speed and workpiece feed speed increase. These results provide guidance for selecting reasonable parameters in future research.


2021 ◽  
Author(s):  
Chengyun Li ◽  
Peiqi Ge ◽  
Wenbo Bi

Abstract Due to their excellent physical and mechanical properties, third-generation super-hard semiconductor materials (such as SiC, GaN) are widely used in the field of microelectronics. However, due to its ultra-high hardness, the machining is very difficult, which has become the bottleneck of its development. The electro-spark deposition (ESD) process can deposit electrode materials on the substrate under the condition of low heat input to achieve metallurgical bonding between metal materials. And it can improve the wear resistance, corrosion resistance, and repair the size of the workpiece. It has been widely used in the field of surface modification engineering. It can effectively improve the bonding strength of the abrasive grains, and the sawing ability of the wire saw to make the consolidated diamond wire saw by the ESD process. Due to its thin matrix and poor thermal properties, the saw wire is easy to burning or even breaking in the manufacturing process. At present, the selection of pulse interval time in the ESD process is generally determined by the duty factor. However, the pulse interval time selected according to duty factor is difficult to meet the heat dissipation requirements of electro-spark deposition diamond wire saw (ESDDWS). In this paper, two kinds of motion modes of ESDDWS manufacturing are put forward, according to the manufacturing characteristics of ESDDWS. The boundary conditions of the continuous pulse discharge of ESDDWS are established. The thermal simulations of continuous pulse discharge of ESDDWS under two motion modes are analyzed. According to the simulation results, the basis of the value of pulse interval in the ESDDWS process is put forward. The effect of pulse interval time on the mechanical performance of the wire saw is analyzed experimentally. The results show that the discharge interval time selected base on the simulation results can ensure the continuous production of the ESDDWS.


2010 ◽  
Vol 431-432 ◽  
pp. 25-28 ◽  
Author(s):  
Li Gang Zhao ◽  
Dun Wen Zuo ◽  
Yu Li Sun ◽  
Min Wang

The experimental research on silicon was reported in this paper. The surface roughness under the different workpiece feed speed and linear velocity of the wire saws is studied mainly in this experiment. The effects of the workpiece feed Vs and the linear velocity of the wire saws Vw were analyzed.


2021 ◽  
Vol 133 ◽  
pp. 105939
Author(s):  
Pengcheng Gao ◽  
Baimei Tan ◽  
Fan Yang ◽  
Hui Li ◽  
Na Bian ◽  
...  

2021 ◽  
Vol 270 ◽  
pp. 118823
Author(s):  
Guangyu Chen ◽  
Yan Li ◽  
Wang Sheng ◽  
Liuqing Huang ◽  
Lizhi Tang ◽  
...  

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