Doped Metasurfaces: Optical Metasurfaces without Etched Structure based on Regular Spatially-doped Semiconductor and Compatible with General Functional Optical Films
Abstract As a new-type artificial two-dimensional planar array structure, metasurfaces can achieve the modulation of light field through a reasonable design and arrangement of sub-wavelength nano-structure units, which is expected to surpass conventional optical components theoretically. However, the metal or dielectric metasurfaces fabricated by etching process are often trapped in the problems including low focusing efficiency and difficult preparation, which greatly hinders their practical implementation. Here, an idea of “Doped metasurfaces” based on a spatial and regular doping of semiconductor thin films is proposed for the first time. This kind of metasurfaces without etched structure owns smooth and flat surface, allowing the addition of optical functional films like anti-reflection film, which thus gets their optical properties greatly improved and enriched on the basis of meta-structured focusing characteristics. In order to verify the effectiveness of this strategy, we simulate a doped metalens suitable for wide mid-infrared (MIR) range and design an anti-reflection film on it. It is shown that this designed MIR metalens possesses wide operating range, high transmittance and high focusing efficiency. The method proposed here provides a new idea or perspective for constructing metasurfaces devices compatible with traditional optical thin films.