Исследование методов текстурирования светодиодов на основе гетероструктур AlGaAs/GaAs
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Investigations of methods for texturing the light-emitting surface of IR light-emitting diodes (LEDs) (wavelength 850 nm) based on AlGaAs/GaAs heterostructures with Bragg reflectors have been carried out. Developed were methods of liquid and plasma-chemical etching of solid solution for creating peaks (pyramids) of different form, 0.2–1.5 µm height. Estimation of the effect of texturing methods and also configuration of peaks on the light-emitting diode electroluminescence intensity has been performed. The increase of the electroluminescence intensity by 25% has been achieved.
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2018 ◽
Vol 1124
◽
pp. 041024
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2016 ◽
Vol 4
(48)
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pp. 11482-11487
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