Структура и оптические характеристики пленок ниобатов бария-стронция на подложках Al-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=-
Keyword(s):
X Ray
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AbstractThe structure and optical characteristics of thin films of relaxor ferroelectric Ba_0.5Sr_0.5Nb_2O_6 grown by RF sputtering in an oxygen atmosphere on an Al_2O_3 substrate ( c cut) have been studied. X-ray diffraction analysis shows that Ba_0.5Sr_0.5Nb_2O_6 films are c -oriented and unit-cell parameter c is 3.948(1) Å. Ellipsometric measurements confirm that SBN-50 films are characterized by a natural growth direction, which coincides with the direction of the optical crystal axis. An analysis of ellipsometric results shows that there is no transition layer at the film/substrate interface; the damaged layer on the free film surface is 7.5 nm thick, and the volume filling factor is estimated to be 0.625.