A mechanism of diamond-abrasive finishing of monocrystalline silicon carbide

2013 ◽  
Vol 35 (5) ◽  
pp. 303-308 ◽  
Author(s):  
Yu. D. Filatov ◽  
A. G. Vetrov ◽  
V. I. Sidorko ◽  
A. Yu. Filatov ◽  
S. V. Kovalev
Keyword(s):  
Silicon Carbide ◽  
Monocrystalline Silicon ◽  
Abrasive Finishing ◽  
Diamond Abrasive

MACHINERY OPERATIONAL PROPERTY CONTROL DURING DIAMOND-ABRASIVE FINISHING USING ACTIVE SOTS

2020 ◽  
Vol 2020 (9) ◽  
pp. 13-17
Author(s):  
Yuriy Ryzhov ◽  
Svetlana Abramova
Keyword(s):  
Corrosion Inhibitors ◽  
Tribological Behavior ◽  
Surface Layers ◽  
Physical Chemical ◽  
Abrasive Finishing ◽  
Alloying Additives ◽  
Phosphorus Containing ◽  
Micro Emulsion ◽  
Property Control ◽  
Diamond Abrasive

There is carried out a number of experiments with the purpose of analyzing SOTS impact upon both finishing productivity, and physical-chemical state and tribological behavior of surfaces machined, and also a possibility for creation according to the results of the investigations carried out a relatively universal micro-emulsion SOTS based on existing in the Ukraine the line of oils, PAV, corrosion inhibitors, alloying additives etc. As SOTS samples there were used both well-known compouds, for example, Camix, Nope Right (USA), and carbamide having in its structure boron, boron-phosphorus-containing additive, water-solvable phosphate, tributyl phosphate (oil-solvable), concentrate SOTS tribol, having in its structure compounds of boron, nitrogen and phosphorous; ethylic ether of fatty acids; methyl ether of colza oil; Sarkozyl-O having in its structure easily-decomposable chlorine compounds. From the results obtained it is possible to draw a conclusion that during finishing in the environment of water-compatible SOTS an important role in the formation of the properties of the surface worked is played by hydrocarbon components and additives which contribute to the formation of the thinnest surface layers modified with carbon and oxygen.

Polishing of optoelectronic components made of monocrystalline silicon carbide

2015 ◽  
Vol 37 (1) ◽  
pp. 48-56 ◽  
Author(s):  
Yu. D. Filatov ◽  
A. G. Vetrov ◽  
V. I. Sidorko ◽  
O. Yu. Filatov ◽  
S. V. Kovalev ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Monocrystalline Silicon

Characteristics of Diamond Abrasive Used in Magnetic Abrasive Finishing of Nickel-Based Superalloys

2020 ◽  
Vol 8 (3) ◽  
Author(s):  
Jason Ratay ◽  
Pei-Ying Wu ◽  
Alex Feirvezers ◽  
Hitomi Yamaguchi
Keyword(s):  
Turbine Blades ◽  
Target Surface ◽  
Surface Finishing ◽  
Complex Geometries ◽  
Magnetic Abrasive Finishing ◽  
Abrasive Particles ◽  
Abrasive Finishing ◽  
Wide Range ◽  
Abrasive Behavior ◽  
Diamond Abrasive

Abstract Nickel-based superalloys have a wide range of high-temperature applications such as turbine blades. The complex geometries of these applications and the specific properties of the materials raise difficulties in the surface finishing. Magnetic abrasive finishing (MAF) has proven effective in finishing the complex geometries. In MAF, the magnetic properties of the workpiece, tool, and abrasive play important roles in controlling finishing characteristics. This paper presents the effects of nickel coating on the abrasive behavior during finishing and resulting finishing characteristics of Ni-based superalloys. The Ni-coated diamond abrasive is more attracted to the magnet than the Ni-based superalloy surface. As a result, fewer Ni-coated diamond abrasive particles, which are stuck between the magnetic-particle brush and the target surface, participate in surface finishing. Because of this, coupled with the reduced sharpness of abrasive cutting edges due to the coating, Ni-coated diamond abrasive cannot effectively smooth the target surface in MAF. However, the Ni coating is worn off during finishing of the hard, rough, additively manufactured surface. Then, the diamond abrasive participates in finishing as uncoated diamond abrasive and facilitates the material removal, finishing the target surface.

Nano-finishing of the monocrystalline silicon wafer using magnetic abrasive finishing process

2019 ◽  
Vol 58 (13) ◽  
pp. 3447 ◽  
Author(s):  
Mohammad Mosavat ◽  
Abdolreza Rahimi ◽  
Mohammad Javad Eshraghi ◽  
Saeideh Karami
Keyword(s):  
Silicon Wafer ◽  
Monocrystalline Silicon ◽  
Magnetic Abrasive Finishing ◽  
Finishing Process ◽  
Abrasive Finishing

Surface roughness in diamond abrasive finishing

2009 ◽  
Vol 31 (3) ◽  
pp. 191-195 ◽  
Author(s):  
Yu. D. Filatov ◽  
V. I. Sidorko ◽  
A. Yu. Filatov ◽  
S. V. Kovalev ◽  
U. Heisel ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Abrasive Finishing ◽  
Diamond Abrasive

Technological support of crack resistance of silicon carbide plates during diamond-abrasive processing

2021 ◽  
pp. 46-48
Author(s):  
Keyword(s):  
Silicon Carbide ◽  
Crack Resistance ◽  
Material Removal Rate ◽  
Material Removal ◽  
Removal Rate ◽  
Semiconductor Devices ◽  
Technological Support ◽  
Ceramic Components ◽  
Processing Modes ◽  
Diamond Abrasive

A method is proposed for assigning diamond-abrasive processing modes that provide the required material removal rate and crack resistance of silicon carbide plates, taking into account the stresses arising in the manufacture of a product from the considered ceramic components, in order to reduce scrap in the production of semiconductor devices. Keywords:microcracks, diamond-abrasive processing, silicon carbide plates. [email protected]

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