Comparison Precision XTEM Specimen Preparation Techniques for Semiconductor Failure Analysis

1997 ◽  
Author(s):  
C. A. Hunt
Keyword(s):  
Failure Analysis ◽  
Cross Section ◽  
Small Volume ◽  
Semiconductor Device ◽  
Specimen Preparation ◽  
Illustrative Case ◽  
Transmission Electron ◽  
Illustrative Case Study ◽  
Preparation Techniques

Abstract Transmission electron microscopy (TEM) is now commonly employed in semiconductor device quality control and failure analysis. Precision cross-section specimens (PXTEM) are often required - these are samples that isolate an extremely small volume such as a single failed transistor. PXTEM samples are among the most difficult TEM samples to prepare. It is important for laboratories that perform PXTEM to master a variety of techniques so that the issues of cost, quality, and risk can be properly balanced. This paper addresses these issues while explaining the most common methods of PXTEM preparation along with an illustrative case study.

The Challenge and Methods of TEM Cross-Sectioning of < 0.25 Micron Plugs

1998 ◽  
Vol 523 ◽  
Author(s):  
C. Amy Hunt ◽  
Yuhong Zhang ◽  
David Su
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Failure Analysis ◽  
Cross Section ◽  
Adhesion Layer ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Sectional Plane ◽  
Preparation Techniques

AbstractTransmission electron microscopy (TEM) is a useful tool in process evaluation and failure analysis for semiconductor industries. A common focus of semiconductor TEM analyses is metalization vias (plugs) and it is often desirable to cross-section through a particular one. If the cross-sectional plane deviates away from the center of the plug, then the thin adhesion layer around the plug will be blurred by surrounding materials such as the inter-layer dielectric and the plug material. The importance of these constraints, along with the difficulty of precision sample preparation, has risen sharply as feature sizes have fallen to 0.25 μm and below. The suitability of common sample preparation techniques for these samples is evaluated.

The application of Transmission Electron Microscope to semiconductor device problems

1993 ◽  
Vol 51 ◽  
pp. 796-797
Author(s):  
Brian Cunningham ◽  
J. Daniel Mis
Keyword(s):  
Semiconductor Device ◽  
Bipolar Transistors ◽  
Current Gain ◽  
Specimen Preparation ◽  
Device Performance ◽  
Structural Components ◽  
Interfacial Layers ◽  
Transmission Electron ◽  
Preparation Techniques ◽  
Crystal Interface

In the last 5-10 years there has been a large increase in the application of TEM to semiconductor device problems. This increase is due to several factors. Higher density chips and decreasing device dimensions have led to structural components which are frequently in the nanometer range. The ease with which present day microscopes can measure nanometer dimensions along with the advances in specimen preparation techniques now make the TEM invaluable as a tool for routine constructional analysis. As device dimensions shrink, the structure and composition of thin interfacial layers becomes increasingly important to device performance. In fact, in some cases, such as the emitter polysilicon to single crystal interface in bipolar transistors, the interface can dominate device parametrics such as current gain and emitter resistance. The ability to examine these interfaces in actual devices is therefore extremely important, and TEM is again proving to be uniquely suited to this task.

Anamnesis in Failure Analysis—How a System-Related Approach Can Save Failure Analysis (FA) Time, Shorten Learning Loops and Reduce Cost

2013 ◽  
Author(s):  
Peter Jacob
Keyword(s):  
Failure Analysis ◽  
System Level ◽  
Illustrative Case ◽  
Medical Sciences ◽  
Device Failure ◽  
Root Cause ◽  
Related Approach ◽  
Illustrative Case Study ◽  
The Right

Abstract Anamnesis is known as an important method for pre-diagnosis in medical sciences. In device failure analysis (FA) it is not so far used, yet – especially with regard to system- and application-aspects. As a consequence, a lot of useless rootcause-related FA efforts are done on device level, while the root cause is on system level. Introduced by an illustrative case study, the benefit of a suitable anamnesis is shown as well as the way to do it – by posing the right questions before FA starts. Many FA efforts can be saved or optimized and frequently, a sound anamnesis already may lead towards the root-cause conclusion.

Magnetic Recording Disk Specimen Preparation for Transmission Electron Microscopy

1990 ◽  
Vol 199 ◽  
Author(s):  
Michael A. Parker ◽  
K. L. Parker ◽  
M. Meininger ◽  
A. Bermea
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Cross Section ◽  
Magnetic Recording ◽  
Specimen Preparation ◽  
Disk Specimen ◽  
Transmission Electron ◽  
Preparation Techniques

ABSTRACTModifications to conventional techniques required to prepare specimens from magnetic recording disks are described. Both the preparation of through-foil and cross-section specimens are discussed. The differences between preparation techniques for particulate and thin film disks are elucidated. Micrographs of specimens prepared by various techniques from both types of disk technology are presented that show the relative merits of these methods.

Focused Ion Beam Analysis of Low-K Dielectrics

2000 ◽  
Author(s):  
H. J. Bender ◽  
R. A. Donaton
Keyword(s):  
Electron Microscope ◽  
Cross Section ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Single Step ◽  
Specimen Preparation ◽  
Transmission Electron ◽  
Beam Analysis ◽  
Low K ◽  
Scanning Electron

Abstract The characteristics of an organic low-k dielectric during investigation by focused ion beam (FIB) are discussed for the different FIB application modes: cross-section imaging, specimen preparation for transmission electron microscopy, and via milling for device modification. It is shown that the material is more stable under the ion beam than under the electron beam in the scanning electron microscope (SEM) or in the transmission electron microscope (TEM). The milling of the material by H2O vapor assistance is strongly enhanced. Also by applying XeF2 etching an enhanced milling rate can be obtained so that both the polymer layer and the intermediate oxides can be etched in a single step.

The Electrical Characterization and Physical Failure Analysis for Transistor Gate Leakage

2006 ◽  
Author(s):  
Tsung-Te Li ◽  
Chao-Chi Wu ◽  
Jung-Hsiang Chuang ◽  
Jon C. Lee
Keyword(s):  
Failure Analysis ◽  
Electrical Characterization ◽  
Physical Analysis ◽  
Gate Leakage ◽  
Force Microscopy ◽  
Atomic Force ◽  
Transmission Electron ◽  
Voltage Stress ◽  
Leakage Site

Abstract This article describes the electrical and physical analysis of gate leakage in nanometer transistors using conducting atomic force microscopy (C-AFM), nano-probing, transmission electron microscopy (TEM), and chemical decoration on simulated overstressed devices. A failure analysis case study involving a soft single bit failure is detailed. Following the nano-probing analysis, TEM cross sectioning of this failing device was performed. A voltage bias was applied to exaggerate the gate leakage site. Following this deliberate voltage overstress, a solution of boiling 10%wt KOH was used to etch decorate the gate leakage site followed by SEM inspection. Different transistor leakage behaviors can be identified with nano-probing measurements and then compared with simulation data for increased confidence in the failure analysis result. Nano-probing can be used to apply voltage stress on a transistor or a leakage path to worsen the weak point and then observe the leakage site easier.

Systemic Unsustainability as a Threat to Democracy

2020 ◽  
Author(s):  
Andrea Felicetti
Keyword(s):  
Research Agenda ◽  
Ecological Crisis ◽  
Illustrative Case ◽  
Sustainability Transition ◽  
Ways Of Thinking ◽  
Illustrative Case Study ◽  
New Research

Resilient socioeconomic unsustainability poses a threat to democracy whose importance has yet to be fully acknowledged. As the prospect of sustainability transition wanes, so does perceived legitimacy of institutions. This further limits representative institutions’ ability to take action, making democratic deepening all the more urgent. I investigate this argument through an illustrative case study, the 2017 People’s Climate March. In a context of resilient unsustainability, protesters have little expectation that institutions might address the ecological crisis and this view is likely to spread. New ways of thinking about this problem and a new research agenda are needed.

The Effects of Teaching Reflection Diaries on In-Service High School Teachers in Japan

Relay Journal ◽  
2020 ◽  
pp. 80-99
Author(s):  
Naoya Shibata
Keyword(s):  
High School ◽  
High School Teachers ◽  
Illustrative Case ◽  
Teaching Beliefs ◽  
Experienced Teacher ◽  
Female Teachers ◽  
Self Confidence ◽  
Research Findings ◽  
Illustrative Case Study

Although teaching reflection diaries (TRDs) are prevalent tools for teacher training, TRDs are rarely used in Japanese secondary educational settings. In order to delve into the effects of TRDs on teaching development, this illustrative case study was conducted with two female teachers (one novice, and one experienced) at a Japanese private senior high school. The research findings demonstrated that both in-service teachers perceived TRDs as beneficial tools for understanding their strengths and weaknesses. TRDs and class observations illustrated that the novice teacher raised their self-confidence in teaching and gradually changed their teaching activities. On the other hand, the experienced teacher held firm teaching beliefs based on their successful teaching experiences and were sometimes less willing to experiment with different approaches. However, they changed their teaching approaches when they lost balance between their class preparation and other duties. Accordingly, although teachers’ firm beliefs and successful experiences may sometimes become possible hindrances from using TRDs effectively, TRDs can be useful tools to train and help teachers realise their strengths and weaknesses.

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