Application of KOH Electrochemical Etch and Passive Voltage Contrast Techniques for Deep Sub-Micron CMOS Leaky Gate Detection

2000 ◽  
Author(s):  
Fred Y. Chang ◽  
Victer Chan
Keyword(s):  
Case Studies ◽  
Detection Technique ◽  
Cobalt Silicide ◽  
Process Technology ◽  
Process Flow ◽  
Voltage Contrast ◽  
Emission Detection ◽  
Wet Etch ◽  
Direct Confirmation

Abstract This paper describes a novel de-process flow by combining cobalt silicide / nitride wet etch with KOH electrochemical wet etch (ECW) to identify leaky gate in silicided deep sub-micron process technology. Traditionally, leaky gate identification requires direct confirmation by gate level electrical or emission detection technique. Ohtani [1] used KOH electrochemical etch application to identify nonsilicided leaky gate capacitor in DRAM without using the above confirmation. The result of the case study demonstrates the expanded application of ECW etch to both silicided 0.18um logic and SRAM devices. Voltage contrast at metal 1 to assist leaky gate localization is also proposed. By combining both techniques, the possibility for isolating gate related defects are greatly enhanced. Case studies also show the advantages of the proposed technique over conventional poly level voltage contrast in leaky gate identification especially with devices that use local interconnect and nitride liner process.

Patientenbezogene Komplexität in der Pflege – Kollektive Case Studies im Akutspital

Pflege ◽  
2018 ◽  
Vol 31 (5) ◽  
pp. 237-244 ◽  
Author(s):  
Caroline Gurtner ◽  
Rebecca Spirig ◽  
Diana Staudacher ◽  
Evelyn Huber
Keyword(s):  
Case Studies ◽  
Study Designs

Zusammenfassung. Hintergrund: Die patientenbezogene Komplexität der Pflege ist durch die Merkmale „Instabilität“, „Unsicherheit“ und „Variabilität“ definiert. Aufgrund der reduzierten Aufenthaltsdauer und der steigenden Zahl chronisch und mehrfach erkrankter Personen erhöht sich die Komplexität der Pflege. Ziel: In dieser Studie untersuchten wir das Phänomen patientenbezogener Komplexität aus Sicht von Pflegefachpersonen und Pflegeexpertinnen im Akutspital. Methode: Im Rahmen eines kollektiven Case-Study-Designs schätzten Pflegefachpersonen und Pflegeexpertinnen die Komplexität von Pflegesituationen mit einem Fragebogen ein. Danach befragten wir sie in Einzelinterviews zu ihrer Einschätzung. Mittels Within-Case-Analyse verdichteten wir die Daten induktiv zu Fallgeschichten. In der Cross-Case-Analyse verglichen wir die Fallgeschichten hinsichtlich deduktiv abgeleiteter Merkmale. Ergebnisse: Die Ausprägung der Komplexität hing in den vier Cases im Wesentlichen davon ab, ob klinische Probleme kontrollierbar und prognostizierbar waren. Je nach individuellen Ressourcen der Patientinnen und Patienten stieg bzw. sank die Komplexität. Schlussfolgerungen: Komplexe Patientensituationen fordern von Pflegefachpersonen Fachwissen, Erfahrung, kommunikative Kompetenzen sowie die Fähigkeit zur Reflexion. Berufsanfänger und Berufsanfängerinnen werden zur Entwicklung dieser Fähigkeiten idealerweise durch erfahrene Berufskolleginnen oder -kollegen unterstützt und beraten.

SenCity – Evaluating Users’ Experiences of Intelligent Lighting for Well-Being in Smart Cities

2018 ◽  
pp. 60-67
Author(s):  
Henrika Pihlajaniemi ◽  
Anna Luusua ◽  
Eveliina Juntunen
Keyword(s):  
Case Studies ◽  
Smart City ◽  
Smart Cities ◽  
Well Being ◽  
Evaluation Methods ◽  
Data Analyses ◽  
Sense Of Security ◽  
System Data

This paper presents the evaluation of usersХ experiences in three intelligent lighting pilots in Finland. Two of the case studies are related to the use of intelligent lighting in different kinds of traffic areas, having emphasis on aspects of visibility, traffic and movement safety, and sense of security. The last case study presents a more complex view to the experience of intelligent lighting in smart city contexts. The evaluation methods, tailored to each pilot context, include questionnaires, an urban dashboard, in-situ interviews and observations, evaluation probes, and system data analyses. The applicability of the selected and tested methods is discussed reflecting the process and achieved results.

Nonwovens: Global Trends in World Economy, European Foreign Trade, and Selected Case Studies from Poland and Asian Brics Countries

2020 ◽  
Vol 0 (0) ◽  
Author(s):  
Zofia Wysokińska ◽  
Tomasz Czajkowski ◽  
Katarzyna Grabowska
Keyword(s):  
Case Studies ◽  
World Economy ◽  
World Market ◽  
Global Trends ◽  
Textile Materials ◽  
Brics Countries ◽  
Recent Trends ◽  
Almost All ◽  
Special Case

AbstractNonwovens are one of the most versatile textile materials and have become increasingly popular in almost all sectors of the economy due to their low manufacturing costs and unique properties. In the next few years, the world market of nonwovens is predicted to grow by 7%–8% annually (International Nonwovens & Disposables Association [INDA], European Disposables and Nonwovens Association [EDANA], and Markets and Markets). This article aims to analyze the most recent trends in the global export and import of nonwovens, to present two case studies of Polish companies that produce them, and to present one special case study of the market of nonwoven geotextiles in China and India, which are the Asian transition economies among the BRICS countries (Brazil, Russia, India, China, and South Africa).

Interpreting Laser-Based Fault Localization Results: Case Studies

2019 ◽  
Author(s):  
Sukho Lee ◽  
John van den Biggelaar ◽  
Marc van Veenhuizen
Keyword(s):  
Case Studies ◽  
Circuit Design ◽  
High Sensitivity ◽  
Failure Behavior ◽  
Process Technology ◽  
Resistance Change ◽  
Voltage Imaging ◽  
Root Cause ◽  
First Case ◽  
Proper Interpretation

Abstract Laser-based dynamic analysis has become a very important tool for analyzing advanced process technology and complex circuit design. Thus, many good reference papers discuss high resolution, high sensitivity, and useful applications. However, proper interpretation of the measurement is important as well to understand the failure behavior and find the root cause. This paper demonstrates this importance by describing two insightful case studies with unique observations from laser voltage imaging/laser voltage probing (LVP), optical beam induced resistance change, and soft defect localization (SDL) analysis, which required an in-depth interpretation of the failure analysis (FA) results. The first case is a sawtooth LVP signal induced by a metal short. The second case, a mismatched result between an LVP and SDL analysis, is a good case of unusual LVP data induced by a very sensitive response to laser light. The two cases provide a good reference on how to properly explain FA results.

Comparison of Active and Passive Voltage Contrast for Failure Localization

2007 ◽  
Author(s):  
R. Rosenkranz ◽  
W. Werner
Keyword(s):  
Case Studies ◽  
Optical Beam ◽  
Leakage Currents ◽  
Localization Method ◽  
Voltage Contrast ◽  
Failure Localization

Abstract In many cases of failure localization, passive voltage contrast (PVC) localization method does not work, because it is not possible to charge up conducting structures which supposed to be dark in the SEM and FIB images. The reason for this is leakage currents. In this article, the authors show how they succeeded in overcoming these difficulties by the application of the active voltage contrast (AVC) method as it was described as biased voltage contrast by Campbell and Soden. They identified three main cases where the PVC didn't work but where they succeeded in failure localization with the AVC method. This is illustrated with the use of two case studies. Compared to the optical beam based methods the resolution is much better so a single failing contact of e.g. 70 nm technology can clearly be identified which cannot be done by TIVA or OBIRCH.

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