Application of Automated FIB for TEM Sample Preparation in Semiconductor Failure Analysis

2014 ◽  
Author(s):  
Jie Zhu ◽  
Soo Sien Seah ◽  
Irene Tee ◽  
Bing Hai Liu ◽  
Eddie Er ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Success Rate ◽  
Protective Layer ◽  
Factors Affecting ◽  
Dual Beam ◽  
Lamella Thickness ◽  
Surface Patterns ◽  
Working Parameters ◽  
Practical Factors ◽  
High Flexibility

Abstract In this paper, we describe automated FIB for TEM sample preparation using iFast software on a Helios 450HP dual-beam system. A robust iFast automation recipe needs to consider as many variables as possible in order to ensure consistent sample quality and high success rate. Variations mainly come from samples of different materials, structures, surface patterns, surface topography and surface charging. The recipe also needs to be user-friendly and provide high flexibility by allowing users to choose preferable working parameters for specific types of samples, such as: grounding, protective layer coating, milling steps, and final TEM lamella thickness/width. In addition to the iFast recipe, other practical factors affecting automation success rate are also discussed and highlighted.

scholarly journals Optimization of the In Situ Biasing FIB Sample Preparation for Hafnia-Based Ferroelectric Capacitor

Micromachines ◽  
2021 ◽  
Vol 12 (12) ◽  
pp. 1436
Author(s):  
Qilan Zhong ◽  
Yiwei Wang ◽  
Yan Cheng ◽  
Zhaomeng Gao ◽  
Yunzhe Zheng ◽  
...  
Keyword(s):  
Sample Preparation ◽  
Success Rate ◽  
Performance Optimization ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Random Access ◽  
Protective Layer ◽  
Structure Characterization ◽  
Ferroelectric Capacitor

Hafnia-based ferroelectric (FE) thin films have received extensive attention in both academia and industry, benefitting from their outstanding scalability and excellent CMOS compatibility. Hafnia-based FE capacitors in particular have the potential to be used in dynamic random-access memory (DRAM) applications. Obtaining fine structure characterization at ultra-high spatial resolution is helpful for device performance optimization. Hence, sample preparation by the focused ion beam (FIB) system is an essential step, especially for in situ biasing experiments in a transmission electron microscope (TEM). In this work, we put forward three tips to improve the success rate of in situ biasing experiments: depositing a carbon protective layer to position the interface, welding the sample on the top of the Cu column of the TEM grid, and cutting the sample into a comb-like shape. By these means, in situ biasing of the FE capacitor was realized in TEM, and electric-field-induced tetragonal (t-) to monoclinic (m-) structure transitions in Hf0.5Zr0.5O2 FE film were observed. The improvement of FIB sample preparation technology can greatly enhance the quality of in situ biasing TEM samples, improve the success rate, and extend from capacitor sample preparation to other types.

Accuracies of Computer versus Manual Linkages of Routine Health Records

1979 ◽  
Vol 18 (02) ◽  
pp. 89-97 ◽  
Author(s):  
Martha E. Smith ◽  
H. B. Newcombe
Keyword(s):  
Success Rate ◽  
Record Linkage ◽  
Central Processor ◽  
Processor Time ◽  
Health Records ◽  
Factors Affecting ◽  
Linkage Methods ◽  
Empirical Tests ◽  
Speed Accuracy ◽  
Computer Operation

Empirical tests of the application of computer record linkage methods versus the use of routine clerical searching, for bringing together various vital and ill-health records, have shown that the success rate for the computer operation was higher (98.3 versus 96.7 per cent) and the proportion of false linkages very much lower (0.1 versus 2.3 per cent). The rate at which the ill-health records were processed by the computer was approximately 14,000 per minute of central processor time, representing a cost of a half a cent apiece.Factors affecting the speed, accuracy and cost of computerized record linkage are discussed.

To Eliminate Curtain Effect of FIB TEM Samples by a Combination of Sample Dicing and Backside Milling

2014 ◽  
Author(s):  
Jian-Shing Luo ◽  
Hsiu Ting Lee
Keyword(s):  
Sample Preparation ◽  
Focused Ion Beam ◽  
Preparation Method ◽  
Low Cost ◽  
Ion Beam ◽  
Sample Preparation Method ◽  
Site Specific ◽  
Dual Beam ◽  
Transmission Electron

Abstract Several methods are used to invert samples 180 deg in a dual beam focused ion beam (FIB) system for backside milling by a specific in-situ lift out system or stages. However, most of those methods occupied too much time on FIB systems or requires a specific in-situ lift out system. This paper provides a novel transmission electron microscopy (TEM) sample preparation method to eliminate the curtain effect completely by a combination of backside milling and sample dicing with low cost and less FIB time. The procedures of the TEM pre-thinned sample preparation method using a combination of sample dicing and backside milling are described step by step. From the analysis results, the method has applied successfully to eliminate the curtain effect of dual beam FIB TEM samples for both random and site specific addresses.

The Novel TEM Sample Preparation Approach for Targeted via with Barrier/Cu Seed Layer Inspection

2009 ◽  
Author(s):  
Wen-Fei Hsieh ◽  
Shih-Hsiang Tseng ◽  
Bo Min She
Keyword(s):  
Sample Preparation ◽  
Cross Section ◽  
Seed Layer ◽  
Target Location ◽  
Process Development ◽  
Process Integration ◽  
Ion Beam ◽  
Main Tool ◽  
Dual Beam ◽  
Sample Preparation Procedure

Abstract In this study, an FIB-based cross section TEM sample preparation procedure for targeted via with barrier/Cu seed layer is introduced. The dual beam FIB with electron beam for target location and Ga ion beam for sample milling is the main tool for the targeted via with barrier/Cu seed layer inspection. With the help of the FIB operation and epoxy layer protection, ta cross section TEM sample at a targeted via with barrier/Cu seed layer could be made. Subsequent TEM inspection is used to verify the quality of the structure. This approach was used in the Cu process integration performance monitor. All these TEM results are very helpful in process development and yield improvement.

scholarly journals Surgical outcomes of acute acquired comitant esotropia of adulthood

2021 ◽  
Vol 21 (1) ◽  
Author(s):  
Dae Hyun Kim ◽  
Ha Jeong Noh
Keyword(s):  
Success Rate ◽  
Surgical Outcomes ◽  
Medical Records ◽  
Large Angle ◽  
Sudden Onset ◽  
Prism Diopter ◽  
Factors Affecting ◽  
The Mean ◽  
Motor Outcomes

Abstract Background Acute acquired comitant esotropia (AACE) is a type of strabismus characterized by a sudden onset of large angle esotropia with diplopia, which often occurs in children after infancy, teenagers, and young adolescents. However, studies on the surgical outcomes of only adults are rare. The purpose of this article is to analyze the surgical outcomes for adult patients diagnosed with AACE. Methods Medical records of 24 patients who had undergone surgery for AACE were retrospectively analyzed. The main outcome measures were the final motor and sensory success rate after surgery and factors affecting motor and sensory outcomes. Motor success was considered alignment within 8 prism diopter (PD) at both near and distance and sensory success was stereoacuity ≥ 60 sec/arc. Results The preoperative mean esodeviation angles were 33.1 ± 10.4 PD at distance and 33.3 ± 11.2 PD at near. The mean period of postoperative follow up was 7.5 ± 4.5 months (range 1–8 months). The postoperative mean esodeviation angles at final follow-up time were 3.4 ± 6.1 PD at distance and 3.8 ± 6.7 PD at near. The surgical motor success rate at final follow-up was 79.2% (19/24). The sensory success rate at final follow-up was 50.0% (12/24). The factor affecting the motor outcome was the type of surgery (p < 0.05). The factor affecting sensory outcome was postoperative follow-up time (p < 0.05). Conclusions Surgery type appears to affect surgical motor outcomes in adults with AACE. Although the sensory outcome was favorable, it seems that regaining bifoveal fixation takes time.

scholarly journals Factors Affecting Spermatozoa Motility Analysis using CASA

2019 ◽  
Vol 29 (3) ◽  
pp. 145
Author(s):  
Dian Ratnawati ◽  
N Isnaini ◽  
T Susilawati
Keyword(s):  
Sample Preparation ◽  
Influencing Factors ◽  
Frame Rate ◽  
Analysis Time ◽  
Factors Affecting ◽  
Spermatozoa Motility ◽  
Fast Implementation ◽  
Concentration Chamber

Motility is a very important parameter to determine the quality of semen. Spermatozoa motility assessment can be done manually (subjectively) or with CASA. The superiority of motility assessment using CASA compared to manually is more objective, accurate, fast, efficient and able to provide detailed motility of spermatozoa. However, in implementation, assessments with CASA produce varied data. So far, there has not been a spermatozoa motility standard with CASA, except by minimizing variations in the factors that influence the results of analysis with CASA. The purpose of this paper is to describe factors that affecting spermatozoa motility analysis using CASA to reach optimal motility analysis. Some influencing factors include: CASA settings, semen diluent, spermatozoa concentration, chamber, analyst, sample preparation and analysis time. Recommendation standard motility assessments using CASA include: experienced and consistent analysts, sample preparation properly (mixing, pipeting and sampling), spermatozoa concentration of 20 million / ml, consistent in chamber type (conditioned 37°C), semen diluents and CASA settings (frame rate of 60 Hz and frame per field 30) and fast implementation of analysis (<2 minutes).

scholarly journals The factors affecting surgical success rate for the patients with congenital esotropia

2015 ◽  
Vol 1 (2) ◽  
pp. 33
Author(s):  
Tuğba Göncü ◽  
Funda Dilmen ◽  
Ali Akal ◽  
Fatih Mehmet Adıbelli ◽  
Sevim Çakmak
Keyword(s):  
Success Rate ◽  
Factors Affecting ◽  
Surgical Success ◽  
Congenital Esotropia

Thermal Science of Weld Bead Defects: A Review

2010 ◽  
Vol 133 (3) ◽  
Author(s):  
P. S. Wei
Keyword(s):  
Stress Concentration ◽  
Experimental Results ◽  
Materials Processing ◽  
Scale Analysis ◽  
Fluid Physics ◽  
The Past ◽  
Good Comparison ◽  
Surface Patterns ◽  
Pattern Formations ◽  
Working Parameters

Mechanisms for the formation of bead defects, such as humping, gouging, rippling, and other unexpected surface patterns, encountered in welding or drilling are interpreted and reviewed from thermal-fluid science viewpoint. These defects usually accompanying with porosity, undercut, segregation, stress concentration, etc., seriously reduce the properties and strength of the joint or solidification. Even though different mechanisms for formation of the defects have been extensively proposed in the past, more systematical understanding of pattern formations from thermal, fluid, physics, electromagnetic, pattern selections, and metallurgy sciences is still limited. The effects of working parameters and properties on humping and rippling, for example, can be systematically and quantitatively interpreted from scale analysis presented in this work. Good comparison with experimental results reveals mechanisms of different surface patterns. The mechanistic findings for bead defects are also useful for other manufacturing and materials processing.

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