SIMS Quantitative Analysis and Optimization for Ion Implantation Angle Deviation

2015 ◽  
Author(s):  
JiangBei Shi ◽  
WeiTing Chien ◽  
QiHua Zhang ◽  
AiMin Li ◽  
ChuanJun Liu
Keyword(s):  
Ion Implantation ◽  
Process Design ◽  
Secondary Ion Mass Spectrometry ◽  
Optimization Method ◽  
Implantation Energy ◽  
Angle Deviation ◽  
Deviation Rate ◽  
Set Up ◽  
The Individual ◽  
Energy Dose

Abstract The accuracy of ion implantation is very important in semiconductor manufacturing and will directly affect the performance of the individual devices and even the whole chip. The deviations of ion implantation energy, dose and angle often result from abnormality of implant equipment or process design limit. The information of ion implantation energy, dose and angle can be qualitatively and quantitatively analyzed by SIMS (Secondary Ion Mass Spectrometry) [1], which provides a way to diagnose ion implanter issue. Based on SIMS analysis results, we can judge whether ion implanter meets the requirements and whether the process design achieves the expected goal. In this paper, we report a SIMS data analysis method determine the deviation of ion implantation angle. A term of deviation rate is defined and a related calculation method was introduced, which is proportional to the deviation angles of the ion implanter. Then, a statistical analysis on a large number of data of deviation rates and ion implantation angles showed that the sampling data followed normal distribution, and thus the corresponding 3 sigma could be obtained. Using the determined 3 sigma range of the deviation rates, we can define the acceptable range for deviation rate. Further, we can use the actual deviation rate to judge if the implant equipment needs maintenance or not, or suggest the direction for improvement. Finally, we set up an oriented and quantitative optimization method of angle deviation by the full mapping of SIMS depth profiles, which can directly set the relationship between the angle deviation and the adjustment parameters of ion implantation disk (Δ alpha, Δ beta). The equipment’s maintenance time and cost can thus be minimized. This method can be used as early detection to the abnormity of ion implant equipment.

scholarly journals TEAM MIDTERM IN AN INTRODUCTORY PROCESS DESIGN COURSE

2017 ◽  
Author(s):  
Marnie V. Jamieson ◽  
John M. Shaw
Keyword(s):  
Learning Outcomes ◽  
Process Design ◽  
Summative Assessment ◽  
Immediate Feedback ◽  
Student Teams ◽  
Assessment Techniques ◽  
Set Up ◽  
The Individual ◽  
Reduced Time

The introductory design course combines team and individual formative and summative assessment techniques. Individual summative midterm and final examinations were used to assess individual performance.Students were given the opportunity to increase their individual midterm examination marks by rewriting the same examination as a team following the individual summative assessment. This formative exercise providedstudents with a comparison of the efficacy and quality of teamwork versus individual work, and provided immediate feedback and correction for many conceptual and mechanical errors on the summative midterm  examination. This paper reports on the strategy and set up of the midterm examination, the results obtained by individual students and student teams, and learning outcomes (including anecdotal comments from students regarding the experience and reduced time spent reviewing examinations with students) based on two iterations of the course.

Optical Activation of Ion Implanted Rare-Earths

1993 ◽  
Vol 301 ◽  
Author(s):  
P.N. Favennec ◽  
H. L'haridon ◽  
D. Moutonnet ◽  
M. Salvi ◽  
M. Gauneau
Keyword(s):  
Rare Earth ◽  
Ion Implantation ◽  
Rare Earth Elements ◽  
Rare Earths ◽  
Annealing Temperature ◽  
Implantation Energy ◽  
Optical Activation ◽  
Energy Dose ◽  
The Rare Earth ◽  
Ion Implanted

ABSTRACTA review of the main results concerning the ion implantation of the rare-earth elements is given.To obtain the best optical activation of rare-earths, we attempt to optimize the implantation (energy, dose) and annealing (temperature, duration) conditions. The studied materials are Si, II-VI binaries (ZnTe, CdS), III-V binaries (GaAs, InP), III-V ternaries (GaAlAs, GaInAs) and III-V quaternaries (GaInAsP).

Temperature And Dose Dependence of An Amorphous Layer Formed By Ion Implantation

1985 ◽  
Vol 51 ◽  
Author(s):  
Eliezer Dovid Richmond ◽  
Alvin R. Knudson
Keyword(s):  
Ion Implantation ◽  
Amorphous Layer ◽  
Dose Dependence ◽  
Layer Width ◽  
Implantation Energy ◽  
Amorphous Si ◽  
Energy Dose

ABSTRACTA model is formulated to predict the width of an amorphous layer in Si produced by ion implantation. The dependency of the amorphous Si layer width on the ion implantation energy, dose, and temperature is computed.

Atomic force microscopy (AFM) of the topography of silicon surfaces exposed to ion beams

1992 ◽  
Vol 50 (2) ◽  
pp. 1132-1133
Author(s):  
Mark Denker ◽  
Jennifer Wall ◽  
Mark Ray ◽  
Richard Linton
Keyword(s):  
Secondary Ion Mass Spectrometry ◽  
Incidence Angle ◽  
Ion Beam ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Ion Beams ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Trace Impurities ◽  
Energy Dose

Reactive ion beams such as O2+ and Cs+ are used in Secondary Ion Mass Spectrometry (SIMS) to analyze solids for trace impurities. Primary beam properties such as energy, dose, and incidence angle can be systematically varied to optimize depth resolution versus sensitivity tradeoffs for a given SIMS depth profiling application. However, it is generally observed that the sputtering process causes surface roughening, typically represented by nanometer-sized features such as cones, pits, pyramids, and ripples. A roughened surface will degrade the depth resolution of the SIMS data. The purpose of this study is to examine the relationship of the roughness of the surface to the primary ion beam energy, dose, and incidence angle. AFM offers the ability to quantitatively probe this surface roughness. For the initial investigations, the sample chosen was <100> silicon, and the ion beam was O2+.Work to date by other researchers typically employed Scanning Tunneling Microscopy (STM) to probe the surface topography.

Patient Scheduling — (Bibliography)

1977 ◽  
Vol 16 (02) ◽  
pp. 112-115 ◽  
Author(s):  
C. O. Köhler ◽  
G. Wagner ◽  
U. Wolber
Keyword(s):  
Information Processing ◽  
Medical Care ◽  
Medical Informatics ◽  
Relevant Literature ◽  
Patient Scheduling ◽  
Individual Scientist ◽  
Set Up ◽  
The Individual ◽  
New Literature ◽  
Current Systems

The entire field of information processing in medicine is today already spread out and branched to such an extent that it is no longer possible to set up a survey on relevant literature as a whole. But even in narrow parts of medical informatics it is hardly possible for the individual scientist to keep up to date with new literature. Strictly defined special bibliographies on certain topics are most helpful.In our days, problems of optimal patient scheduling and exploitation of resources are gaining more and more importance. Scientists are working on the solution of these problems in many places.The bibliography on »Patient Scheduling« presented here contains but a few basic theoretical papers on the problem of waiting queues which are of importance in the area of medical care. Most of the papers cited are concerned with practical approaches to a solution and describe current systems in medicine.In listing the literature, we were assisted by Mrs. Wieland, Mr. Dusberger and Mr. Henn, in data acquisition and computer handling by Mrs. Gieß and Mr. Schlaefer. We wish to thank all those mentioned for their assistance.

Process design and equipment selection for optimized steam and power concepts – the “zero” process steam sugar factory

2020 ◽  
pp. 40-50
Author(s):  
Boris Morgenroth ◽  
Thomas Stark ◽  
Julian Pelster ◽  
Harjeet Singh Bola
Keyword(s):  
Process Design ◽  
Sugar Industry ◽  
Electrical Power ◽  
Power Requirement ◽  
Equipment Selection ◽  
Good Potential ◽  
Set Up ◽  
The Right ◽  
Key Aspects ◽  
Steam Drying

Optimization of process steam requirement in order to maximize sugar recovery and export power along with manpower optimization is a must for sugar factories to survive under difficult conditions and to earn additional revenues. The process steam demand of greenfield and revamped plants has been reduced to levels of 32–38% from originally more than 50% steam on cane in the case of the brownfield plants. In addition, significant improvement in the power requirement of the plants has been achieved. Bagasse drying offers a good potential to improve the power export. Different available concepts are compared with a focus on bagasse steam drying and low temperature bagasse drying. In order to set up an optimized highly efficient plant or to optimize an existing plant to achieve competitive benchmarks, good process design and the right equipment selection are very important. Experience has been gained with multiple stage or double effect crystallization in the beet sugar industry offering further steam optimization potential. Vapour recompression is also an option to substitute live steam by electrical power. This even provides options to reduce the steam demand from the power plant for the sugar process down to zero. Key aspects concerning the process design and equipment selection are described.

scholarly journals Nudge Versus Boost: Agency Dynamics Under Libertarian Paternalism

2019 ◽  
Vol 130 (629) ◽  
pp. 1384-1415 ◽  
Author(s):  
Ralph Hertwig ◽  
Michael D Ryall
Keyword(s):  
Cognitive Biases ◽  
Policy Implications ◽  
Best Interests ◽  
Libertarian Paternalism ◽  
The Future ◽  
Set Up ◽  
The Individual

ABSTRACT Thaler and Sunstein (2008) advance the concept of ‘nudge’ policies—non-regulatory and non-fiscal mechanisms designed to enlist people's cognitive biases or motivational deficits so as to guide their behaviour in a desired direction. A core assumption of this approach is that policymakers make artful use of people's cognitive biases and motivational deficits in ways that serve the ultimate interests of the nudged individual. We analyse a model of dynamic policymaking in which the policymaker's preferences are not always aligned with those of the individual. One novelty of our set-up is that the policymaker has the option to implement a ‘boost’ policy, equipping the individual with the competence to overcome the nudge-enabling bias once and for all. Our main result identifies conditions under which the policymaker chooses not to boost in order to preserve the option of using the nudge (and its associated bias) in the future—even though boosting is in the immediate best interests of both the policymaker and the individual. We extend our analysis to situations in which the policymaker can be removed (e.g., through an election) and in which the policymaker is similarly prone to bias. We conclude with a discussion of some policy implications of these findings.

scholarly journals Wear Resistance Improvement of Cemented Tungsten Carbide Deep-Hole Drills after Ion Implantation

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 239
Author(s):  
Dmitrij Morozow ◽  
Marek Barlak ◽  
Zbigniew Werner ◽  
Marcin Pisarek ◽  
Piotr Konarski ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Tungsten Carbide ◽  
Photoelectron Spectroscopy ◽  
Secondary Ion Mass Spectrometry ◽  
Carbon Layer ◽  
Hole Drilling ◽  
Deep Hole ◽  
Tungsten Nitrides ◽  
Lubrication Effect ◽  
Secondary Ion

The paper is dedicated to the lifetime prolongation of the tools designed for deep-hole drilling. Among available methods, an ion implantation process was used to improve the durability of tungsten carbide (WC)-Co guide pads. Nitrogen fluencies of 3 × 1017 cm−2, 4 × 1017 cm−2 and 5 × 1017 cm−2 were applied, and scanning electron microscope (SEM) observations, energy dispersive spectroscopy (EDS) analyses, X-ray photoelectron spectroscopy (XPS) and Secondary Ion Mass Spectrometry (SIMS) measurements were performed for both nonimplanted and implanted tools. The durability tests of nonimplanted and the modified tools were performed in industrial conditions. The durability of implanted guide pads was above 2.5 times more than nonimplanted ones in the best case, presumably due to the presence of a carbon-rich layer and extremely hard tungsten nitrides. The achieved effect may be attributed to the dissociation of tungsten carbide phase and to the lubrication effect. The latter was due to the presence of pure carbon layer with a thickness of a few dozen nanometers. Notably, this layer was formed at a temperature of 200 °C, much smaller than in previously reported research, which makes the findings even more valuable from economic and environmental perspectives.

scholarly journals Theorizing Teacher Responsibility in an Age of Neoliberal Accountability

2019 ◽  
Vol 1 (1) ◽  
pp. 179-195 ◽  
Author(s):  
Tina Besley
Keyword(s):  
Homo Economicus ◽  
Teacher Responsibility ◽  
Keynesian Economics ◽  
The Great Depression ◽  
Market Rationality ◽  
The Subject ◽  
Neoliberal Policies ◽  
Set Up ◽  
The Individual ◽  
The Welfare State

This article explores concepts of teacher responsibility, accountability, being in loco parentis, and responsibilization as many advanced capitalist societies have dropped policies and practices that were set up in the mid 19th century after the Great Depression in the welfare state under Keynesian economics. Since the early 1980s most of these states have adopted neoliberal policies and market rationality for all aspects of social policy including education. Under neoliberalism, the subject theorised by Homo economicus, is one that is theorised as a rational autonomous individual, with its responsibilized behavior underpinning much of how not only teachers but students now are compleed to behace and perform. These have resulted in major shifts in attitudes to professionalism of teachers, in responsibilising individuals and so have impacted on subjectivity as the state has pulled back from all manner of social provision and has responsibilized the individual to be a consumer-citizen, a prudential and entrepreneurial self even in terms of education. The upshot is increasing use of audits, checklists and accountability regimes for teachers who are becoming increasingly a de-professionalised in a low-trust managerialist environment with students as consumers.

A Hybrid Approach to Computer-Aided Process Planning for Prismatic Parts

1994 ◽  
Author(s):  
Y. F. Zhang ◽  
A. Y. C. Nee ◽  
J. Y. H. Fuh
Keyword(s):  
Process Planning ◽  
Hybrid Approach ◽  
Optimization Method ◽  
Optimal Operation ◽  
Operation Sequencing ◽  
Computer Aided Process Planning ◽  
Prismatic Parts ◽  
Minimum Number ◽  
Set Up

Abstract One of the most difficult tasks in automated process planning is the determination of operation sequencing. This paper describes a hybrid approach for identifying the optimal operation sequence of machining prismatic parts on a three-axis milling machining centre. In the proposed methodology, the operation sequencing is carried out in two levels of planning: set-up planning and operation planning. Various constraints on the precedence relationships between features are identified and rules and heuristics are created. Based on the precedence relationships between features, an optimization method is developed to find the optimal plan(s) with minimum number of set-ups in which the conflict between the feature precedence relationships and set-up sequence is avoided. For each set-up, an optimal feature machining sequence with minimum number of tool changes is also determined using a developed algorithm. The proposed system is still under development and the hybrid approach is partially implemented. An example is provided to demonstrate this approach.

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