Studies on a Qualification Method (OSSD) for Microchip Al Bondpads

2015 ◽  
Author(s):  
Hua Younan ◽  
Shen Yue ◽  
Chen Yixin ◽  
Fu Chao ◽  
Li Xiaomin
Keyword(s):  
Electron Microscopy ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Oxide Thickness ◽  
Contamination Level ◽  
Auger Analysis ◽  
Tem Analysis ◽  
Transmission Electron ◽  
Reduced Costs ◽  
Xps Surface Analysis

Abstract In authors’ previous paper, an OSAT [Optical, SEM (Scanning Electron Microscopy), Auger (Auger Electron Spectroscopy) and TEM (Transmission Electron Microscopy)] methodology was developed for qualification of microchip aluminum (Al) bondpads. Using the OSAT methodology, one can qualify microchip Al bondpads. In this paper, we will further study the NSOP (Non-Stick On Pad) problem on microchip Al bondpads. A new qualification methodology, OSSD [(Optical, SEM, and Surface and Depth profiling X-ray Photoelectron Spectroscopy (XPS)] will be proposed, in which XPS surface analysis is used to check the contamination level of fluorine and carbon on bondpad surfaces instead of Auger analysis. XPS depth profiling analysis will also be used to measure Al oxide thickness instead of TEM analysis. By using OSSD, Al bondpads can be qualified with both reduced costs and shortened turnaround times versus OSAT.

High Pressure Oxidation of Strained Si1−xGe Alloys

1990 ◽  
Vol 204 ◽  
Author(s):  
Christine Caragianis ◽  
David C. Paine ◽  
Carson B. Roberts ◽  
Everett Crisman
Keyword(s):  
High Pressure ◽  
Photoelectron Spectroscopy ◽  
Depth Profiling ◽  
Oxide Thickness ◽  
Misfit Dislocations ◽  
Atmospheric Conditions ◽  
Cross Sectional ◽  
Pressure Oxidation ◽  
Transmission Electron ◽  
High Pressure Oxidation

ABSTRACTThermal passivation of Si1−x Gex using high pressure (10,000 psi) oxidation was studied. Alloys of Si1−xGex (with x=5.4, 11.6, and 17 at. %) approximately 200 nm thick were oxidized using two processes: (i) dry oxygen at 10,000 psi at a temperature of 550°C and (ii) conventional, 1 atm steam at 800°C. The wet oxidation conditions were chosen to produce an oxide thickness comparable (=100 nm for xGe=11.6 at. %) to that obtained during high pressure oxidation at 550°C. Auger sputter depth profiling (AES), X-ray photoelectron spectroscopy (XPS), and cross-sectional transmission electron microscopy (TEM) were used to characterize the as-grown oxides. XPS studies reveal that high pressure oxides formed from all three of the alloys of Si1−xGex have greatly enhanced incorporation of Ge compared to those grown to a similar thickness under wet atmospheric conditions. We report that a significant benefit of this increase in Ge incorporation is the minimization of Ge enrichment near the oxide/Si1−xGex interface. Cross-sectional TEM images reveal a 30 nm thick Ge-rich band at the wet oxide/alloy interface and a dramatically thinner band (<5 nm) present at the oxide/alloy interface produced by high pressure oxidation. For the atmospheric oxidation samples, interfacial misfit dislocations were observed at the alloy/substrate interface indicating that the film relaxed during oxidation. In contrast, the high pressure samples showed no interfacial defects after oxidation.

Measurement of the Oxide Film on Cold Rolled Steel by XPS and TEM

2013 ◽  
Vol 774-776 ◽  
pp. 1141-1144
Author(s):  
Sang Yong Lee
Keyword(s):  
Oxide Film ◽  
Photoelectron Spectroscopy ◽  
Sheet Material ◽  
Depth Profiling ◽  
Oxide Thickness ◽  
Dark Field ◽  
Rolled Sheet ◽  
Tem Analysis ◽  
Thin Oxide Film ◽  
Cold Rolled

X-ray photoelectron spectroscopy (XPS) and high resolution transmission electron microscopy (TEM) with high annular dark-field (HAADF) microscopy have been used to characterize the nanoscale oxide film formed naturally on the surface of cold-rolled sheet of mild steel. Main aim of this research was to confirm that XPS could be used in determining the thickness of thin oxide film as a substitute for the laborious TEM analysis. The preparation and analysis technique for the XPS depth profiling has been investigated to characterize the oxide film. The selection of appropriate sputter rate and sputter area according to sheet material components and the exact estimation of sputter depth from sputter rate during depth profiling were essential for the determination of the nanoscale oxide thickness.

Transmission Electron Microscopy of an Aluminum-Silver-Stainless Steel Solid State Bond

1985 ◽  
Vol 43 ◽  
pp. 172-173
Author(s):  
M. J. Carr ◽  
J. F. Shewbridge ◽  
T. O. Wilford
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Solid State ◽  
Specimen Preparation ◽  
Dimensional Control ◽  
Tem Analysis ◽  
Metal Parts ◽  
Dissimilar Metal ◽  
Transmission Electron ◽  
Short Time

Strong solid state bonds are routinely produced between physical vapor deposited (PVD) silver coatings deposited on sputter cleaned surfaces of two dissimilar metal parts. The low temperature (200°C) and short time (10 min) used in the bonding cycle are advantageous from the standpoint of productivity and dimensional control. These conditions unfortunately produce no microstructural changes at or near the interface that are detectable by optical, SEM, or microprobe examination. Microstructural problems arising at these interfaces could therefore easily go undetected by these techniques. TEM analysis has not been previously applied to this problem because of the difficulty in specimen preparation. The purpose of this paper is to describe our technique for preparing specimens from solid state bonds and to present our initial observations of the microstructural details of such bonds.

Investigation of Polyoxometalate-(Poly)pyrrole Heterogeneous Nanostructures as Cathodes for Rechargeable Magnesium-Ion Batteries

2018 ◽  
Author(s):  
Hakeem K. Henry ◽  
Sang Bok Lee
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Photoelectron Spectroscopy ◽  
Active Material ◽  
Conductive Polymer ◽  
Current Collector ◽  
Constant Current ◽  
Anodized Aluminum ◽  
Transmission Electron ◽  
Pyrrole Monomer

The PMo<sub>12</sub>-PPy heterogeneous cathode was synthesized electrochemically. In doing so, the PMo<sub>12</sub> redox-active material was impregnated throughout the conductive polymer matrix of the poly(pyrrole) nanowires. All chemicals and reagents used were purchased from Sigma-Aldrich. Anodized aluminum oxide (AAO) purchased from Whatman served as the porous hard template for nanowire deposition. A thin layer of gold of approximately 200nm was sputtered onto the disordered side of the AAO membrane to serve as the current collector. Copper tape was connected to the sputtered gold for contact and the device was sealed in parafilm with heat with an exposed area of 0.32 cm<sup>2</sup> to serve as the electroactive area for deposition. All electrochemical synthesis and experiments were conducted using a Bio-Logic MPG2 potentiostat. The deposition was carried out using a 3-electrode beaker cell setup with a solution of acetonitrile containing 5mM and 14mM of the phosphomolybdic acid and pyrrole monomer, respectively. The synthesis was achieved using chronoamperometry to apply a constant voltage of 0.8V vs. Ag/AgCl (BASi) to oxidatively polymerize the pyrrole monomer to poly(pyrrole). To prevent the POM from chemically polymerizing the pyrrole, an injection method was used in which the pyrrole monomer was added to the POM solution only after the deposition voltage had already been applied. The deposition was well controlled by limiting the amount of charge transferred to 300mC. Following deposition, the AAO template was removed by soaking in 3M sodium hydroxide (NaOH) for 20 minutes and rinsed several times with water. After synthesis, all cathodes underwent electrochemical testing to determine their performance using cyclic voltammetry and constant current charge-discharge cycling in 0.1 M Mg(ClO<sub>4</sub>)<sub>2</sub>/PC electrolyte. The cathodes were further characterized using scanning electron microscopy (SEM), transmission electron microscopy (TEM), scanning transmission electron microscopy (STEM), and x-ray photoelectron spectroscopy (XPS).

TEM Sample Preparation Tricks for Advanced DRAMs

2015 ◽  
Author(s):  
Ching Shan Sung ◽  
Hsiu Ting Lee ◽  
Jian Shing Luo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Characterization Of Materials

Abstract Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for process evaluation and failure analysis in the integrated circuit (IC) industry as device shrinkage continues. It is well known that a high quality TEM sample is one of the keys which enables to facilitate successful TEM analysis. This paper demonstrates a few examples to show the tricks on positioning, protection deposition, sample dicing, and focused ion beam milling of the TEM sample preparation for advanced DRAMs. The micro-structures of the devices and samples architectures were observed by using cross sectional transmission electron microscopy, scanning electron microscopy, and optical microscopy. Following these tricks can help readers to prepare TEM samples with higher quality and efficiency.

A Methodology to Reduce Ion Beam Induced Damage in TEM Specimens Prepared by FIB

2002 ◽  
Author(s):  
Chin Kai Liu ◽  
Chi Jen. Chen ◽  
Jeh Yan.Chiou ◽  
David Su
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Tem Analysis ◽  
Sensitive Issue ◽  
Transmission Electron

Abstract Focused ion beam (FIB) has become a useful tool in the Integrated Circuit (IC) industry, It is playing an important role in Failure Analysis (FA), circuit repair and Transmission Electron Microscopy (TEM) specimen preparation. In particular, preparation of TEM samples using FIB has become popular within the last ten years [1]; the progress in this field is well documented. Given the usefulness of FIB, “Artifact” however is a very sensitive issue in TEM inspections. The ability to identify those artifacts in TEM analysis is an important as to understanding the significance of pictures In this paper, we will describe how to measure the damages introduced by FIB sample preparation and introduce a better way to prevent such kind of artifacts.

scholarly journals Structural Analysis of Jumbo Coliphage phAPEC6

2020 ◽  
Vol 21 (9) ◽  
pp. 3119 ◽  
Author(s):  
Jeroen Wagemans ◽  
Jessica Tsonos ◽  
Dominique Holtappels ◽  
Kiandro Fortuna ◽  
Jean-Pierre Hernalsteens ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Capsid Protein ◽  
Tem Analysis ◽  
Host Interaction ◽  
Cryo Electron Microscopy ◽  
Transmission Electron ◽  
Tail Sheath ◽  
Associated Proteins ◽  
Contractile Tail ◽  
Phage Capsid

The phAPEC6 genome encodes 551 predicted gene products, with the vast majority (83%) of unknown function. Of these, 62 have been identified as virion-associated proteins by mass spectrometry (ESI-MS/MS), including the major capsid protein (Gp225; present in 1620 copies), which shows a HK97 capsid protein-based fold. Cryo-electron microscopy experiments showed that the 350-kbp DNA molecule of Escherichia coli virus phAPEC6 is packaged in at least 15 concentric layers in the phage capsid. A capsid inner body rod is also present, measuring about 91 nm by 18 nm and oriented along the portal axis. In the phAPEC6 contractile tail, 25 hexameric stacked rings can be distinguished, built of the identified tail sheath protein (Gp277). Cryo-EM reconstruction reveals the base of the unique hairy fibers observed during an initial transmission electron microscopy (TEM) analysis. These very unusual filaments are ordered at three annular positions along the contractile sheath, as well as around the capsid, and may be involved in host interaction.

scholarly journals Synthesis of Ce1−xPdxO2−δ Solid Solution in Molten Nitrate

Catalysts ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 640
Author(s):  
Hideaki Sasaki ◽  
Keisuke Sakamoto ◽  
Masami Mori ◽  
Tatsuaki Sakamoto
Keyword(s):  
Electron Microscopy ◽  
Solid Solution ◽  
Solid Solutions ◽  
Photoelectron Spectroscopy ◽  
Synthesis Method ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Co Precipitation ◽  
Ionic States

CeO2-based solid solutions in which Pd partially substitutes for Ce attract considerable attention, owing to their high catalytic performances. In this study, the solid solution (Ce1−xPdxO2−δ) with a high Pd content (x ~ 0.2) was synthesized through co-precipitation under oxidative conditions using molten nitrate, and its structure and thermal decomposition were examined. The characteristics of the solid solution, such as the change in a lattice constant, inhibition of sintering, and ionic states, were examined using X-ray diffraction (XRD), scanning electron microscopy–energy-dispersive X-ray spectroscopy (SEM−EDS), transmission electron microscopy (TEM)−EDS, and X-ray photoelectron spectroscopy (XPS). The synthesis method proposed in this study appears suitable for the easy preparation of CeO2 solid solutions with a high Pd content.

Characterization of columns grown during KrF laser micromachining of Al2O3–TiC ceramics

2003 ◽  
Vol 18 (5) ◽  
pp. 1123-1130 ◽  
Author(s):  
V. Oliveira ◽  
R. Vilar
Keyword(s):  
Electron Microscopy ◽  
Photoelectron Spectroscopy ◽  
Laser Pulses ◽  
Formation Mechanisms ◽  
X Ray ◽  
Reducing Conditions ◽  
Transmission Electron ◽  
Column Formation ◽  
Krf Laser

This paper aims to contribute to the understanding of column formation mechanisms in Al2O3–TiC ceramics micromachined using excimer lasers. Chemical and structural characterization of columns grown in Al2O3–TiC composite processed with 200 KrF laser pulses at 10 J/cm2 was carried out by scanning electron microscopy, transmission electron microscopy, x-ray photoelectron spectroscopy, and x-ray diffraction analysis. Fully developed columns consist of a core of unprocessed material surrounded by an outer layer of Al2TiO5, formed in oxidizing conditions, and an inner layer, formed in reducing conditions, composed of TiC and Al3Ti or an AlTi solid solution. Possible mechanisms of column formation are discussed.

scholarly journals Green Synthesis of Feather-Shaped MoS2/CdS Photocatalyst for Effective Hydrogen Production

2013 ◽  
Vol 2013 ◽  
pp. 1-5 ◽  
Author(s):  
Yang Liu ◽  
Hongtao Yu ◽  
Xie Quan ◽  
Shuo Chen
Keyword(s):  
Electron Microscopy ◽  
Hydrogen Production ◽  
Photoelectron Spectroscopy ◽  
Diffuse Reflectance ◽  
Sulfur Source ◽  
X Ray ◽  
Transmission Electron ◽  
Microscopy Images ◽  
Effective Hydrogen ◽  
Better Than

MoS2/CdS photocatalyst was fabricated by a hydrothermal method for H2production under visible light. This method used low toxic thiourea as a sulfur source and was carried out at 200°C. Thus, it was better than the traditional methods, which are based on an annealing process at relatively high temperature (above 400°C) using toxic H2S as reducing agent. Scanning electron microscopy and transmission electron microscopy images showed that the morphologies of MoS2/CdS samples were feather shaped and MoS2layer was on the surface of CdS. The X-ray photoelectron spectroscopy testified that the sample was composed of stoichiometric MoS2and CdS. The UV-vis diffuse reflectance spectra displayed that the loading of MoS2can enhance the optical absorption of MoS2/CdS. The photocatalytic activity of MoS2/CdS was evaluated by producing hydrogen. The hydrogen production rate on MoS2/CdS reached 192 μmol·h−1. This performance was stable during three repeated photocatalytic processes.

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