Investigating Root Cause of a Bubble Formation in Spin on Hardmask

Author(s):  
Rebecca Dar ◽  
Jason Behnke ◽  
Frieder Baumann ◽  
Tim Shepherd ◽  
Kok Hin (Rick) Teo ◽  
...  

Abstract Through inline processing of a prospective Spin on Hardmask (SOH) material, bubble defects were observed randomly across a wafer. Several complementary FA techniques were utilized to characterize the bubble defects including SEM, TEM, and chemical analysis techniques. The root cause of defect formation was identified as a raw material imperfection in SOH, which led to excessive outgassing. Imperfections within the substrate formed nucleation sites for outgassing of SOH material forming bubbles, which allowed voids to propagate. These findings led to implementation of greater quality control methods by the raw material manufacturer.

2005 ◽  
Vol 554 (1-2) ◽  
pp. 207-217 ◽  
Author(s):  
Lidia Maria Bodecchi ◽  
Marina Cocchi ◽  
Marcello Malagoli ◽  
Matteo Manfredini ◽  
Andrea Marchetti

2016 ◽  
Vol 19 (3) ◽  
pp. 77-83 ◽  
Author(s):  
Miroslav Prístavka ◽  
Martina Kotorová ◽  
Radovan Savov

AbstractThe tools for quality management are used for quality improvement throughout the whole Europe and developed countries. Simple statistics are considered one of the most basic methods. The goal was to apply the simple statistical methods to practice and to solve problems by using them. Selected methods are used for processing the list of internal discrepancies within the organization, and for identification of the root cause of the problem and its appropriate solution. Seven basic quality tools are simple graphical tools, but very effective in solving problems related to quality. They are called essential because they are suitable for people with at least basic knowledge in statistics; therefore, they can be used to solve the vast majority of problems.


2018 ◽  
Vol 2 (3) ◽  
pp. 39 ◽  
Author(s):  
Alessandro Battistella ◽  
Sander Aelen ◽  
Ivo Roghair ◽  
Martin van Sint Annaland

Phase transition, and more specifically bubble formation, plays an important role in many industrial applications, where bubbles are formed as a consequence of reaction such as in electrolytic processes or fermentation. Predictive tools, such as numerical models, are thus required to study, design or optimize these processes. This paper aims at providing a meso-scale modelling description of gas–liquid bubbly flows including heterogeneous bubble nucleation using a Discrete Bubble Model (DBM), which tracks each bubble individually and which has been extended to include phase transition. The model is able to initialize gas pockets (as spherical bubbles) representing randomly generated conical nucleation sites, which can host, grow and detach a bubble. To demonstrate its capabilities, the model was used to study the formation of bubbles on a surface as a result of supersaturation. A higher supersaturation results in a faster rate of nucleation, which means more bubbles in the column. A clear depletion effect could be observed during the initial growth of the bubbles, due to insufficient mixing.


2018 ◽  
Vol 221 ◽  
pp. 02005
Author(s):  
Swee Shu Luing Nikalus ◽  
Guan Toh Guat ◽  
Mum Wai Yip ◽  
See Chew Tai

This paper provides a detailed analysis on the systematic innovation process in improving the quality control of latex gloves production. The systematic innovation tool such as TRIZ is applied in this case study. Function analysis, cause and effect chain analysis, physical contradiction, By-separation model and 40 Inventive Principles are applied in order to derive some feasible and low cost solutions to alleviate the problem. Findings revealed that the rejected (leaking) gloves on the production line will be manually monitored by a checker during the air blowing test and will be discarded by the same checker instantly. The main root cause is that the quality control worker is not able to concentrate all the times to detect the torn gloves, mainly is due to the fast speed production line and other distractions. The problem is solved by applying function analysis, physical contradiction, by-separation tool and Inventive Principles to generate low cost but elegant solutions within the defined scope of several constraints and without making the production line more complex. Therefore, it can be concluded that TRIZ is a systematic and innovative problem solving methodology.


2007 ◽  
Vol 72 (2) ◽  
pp. 133-138 ◽  
Author(s):  
Dragoja Radanovic ◽  
Svetlana Antic-Mladenovic ◽  
Miodrag Jakovljevic ◽  
Mirjana Kresovic

An experimental field for the cultivated production of Gentiana lutea L. was established five years ago at the Suvobor Mountain, Serbia. Soil analysis of this area revealed the occurrence of high pseudo-total (Ni - 1270 mg/kg, Cr - 423 mg/kg, Co - 385 mg/kg) and available (especially Ni - 133 mg/kg) heavy metals contents in the soil. Hence, the aim of this research was to evaluate the quality of Gentiana lutea L. - roots and galenic forms (liquid extract in 70 % ethanol, spissum and siccum) produced from the roots, because, for most plants, heavy metals accumulate in the root tissue. The amounts of Ni and Cr found in the analyzed roots were very high (54 mg/kg and 14 mg/kg, respectively). The efficiency of ethanol in extracting heavy metals from the roots varied depending on the particular element. The highest efficiency was obtained for Ni (41.3 %), then for Cd (39.5 %), Pb (37.0%) and Co (30.4 %). According to this, a potential hazard exists for humans, if gentian's galenic forms are produced from the raw material with high heavy metals contents. It is concluded that quality control of the raw material must be carried out before further utilization of gentian. .


Rodriguésia ◽  
2020 ◽  
Vol 71 ◽  
Author(s):  
Ernesto Diaz Rocha ◽  
Vitória EA Silva ◽  
Fernanda CS Pereira ◽  
Valery M Jean ◽  
Fabio L Costa Souza ◽  
...  

Abstract With the upcoming medical Cannabis regulation, quality control methods on raw material will be required. Besides testing for contaminants and potency, there are also pharmaceutical and forensic interests in the determination of the terpene profile in different strains of Cannabis as complementary identification methods. A simple non-destructive HS-SPME GC-MS method was used to identify the terpene content in twelve Cannabis samples, four of them were of the hemp type (Harle-tsu), seven from various marihuana types and one of the intermediate type. They all were previously analyzed by HPLC to determine the potency (THC and CBD content). Spectral library matching was used to identify the terpenes compounds. Thirty terpenes compounds were detected, nine of them were present in all Cannabis samples and used to find their terpene profile: α-pinene, β-pinene, β-myrcene, D-limonene, terpinolene, linalool, caryophyllene, α-bergamotene and humulene. Three of them, caryophyllene, α-pinene and β-myrcene were found as larger components in most of samples. A principal components analyses (PCA) was performed. The four hemp type samples showed two different profiles, two samples showed caryophyllene as main component and the others two with β-myrcene as such. The marihuana type samples showed wider profiles with no clear patterns at all, which is not surprising because of the low number of samples. The simple methodology shows viable to set the terpenes profile for analyses of raw Cannabis material. Suitability for differentiation between different sorts of types needs more studies, with increasing numbers of samples.


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