Effect of Mechanical Loading and Increased Gap on the Dynamic Response of Multiple Degree of Freedom Electrostatic Actuator
A novel monolithic structural design of an electrostatic actuator with a multiple degree of freedom is presented as an approach for a system that is capable of performing scalable stroke and large electrostatic force beyond mN range. An electromechanical system model based on Simulink software was developed for a proposed design of the electrostatic actuator. The dynamic response of the actuator was simulated and the mechanical bouncing response due to effect of realizing extra mechanical stoppers or passivation layer was investigated. Additionally, the mechanical bouncing as well as steady state response of the actuator was investigated under various mechanical loading values. The results showed that the switching time increased as the mechanical load was increased. In addition, bouncing maximum peak increased as the collision force was increased.