scholarly journals A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Micromachines ◽  
2020 ◽  
Vol 11 (11) ◽  
pp. 1022
Author(s):  
Chao Xiang ◽  
Yulan Lu ◽  
Pengcheng Yan ◽  
Jian Chen ◽  
Junbo Wang ◽  
...  
Keyword(s):  
Temperature Sensor ◽  
Temperature Compensation ◽  
Compensation Method ◽  
Silicon On Insulator ◽  
Anodic Bonding ◽  
Pressure Sensitive ◽  
Pressure Scale ◽  
Compensation Approach ◽  
Full Pressure

This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa).

scholarly journals Temperature Compensation Method for Digital Cameras in 2D and 3D Measurement Applications

Sensors ◽  
2018 ◽  
Vol 18 (11) ◽  
pp. 3685 ◽  
Author(s):  
Marcin Adamczyk ◽  
Paweł Liberadzki ◽  
Robert Sitnik
Keyword(s):  
Temperature Compensation ◽  
Three Dimensional ◽  
Compensation Method ◽  
Effect Of Temperature ◽  
Calibration Model ◽  
Digital Cameras ◽  
Compensation Model ◽  
Camera Design ◽  
Compensation Approach ◽  
2D And 3D

This paper presents the results of several studies concerning the effect of temperature on digital cameras. Experiments were performed using three different camera models. The presented results conclusively demonstrate that the typical camera design does not adequately take into account the effect of temperature variation on the device’s performance. In this regard, a modified camera design is proposed that exhibits a highly predictable behavior under varying ambient temperature and facilitates thermal compensation. A novel temperature compensation method is also proposed. This compensation model can be applied in almost every existing camera application, as it is compatible with every camera calibration model. A two-dimensional (2D) and three-dimensional (3D) application of the proposed compensation model is also described. The results of the application of the proposed compensation approach are presented herein.

scholarly journals An Improved Temperature Compensation Method for Fiber Bragg Grating Pressure Sensor Based on Extreme Learning Machine

2021 ◽  
Vol 15 ◽  
pp. 1091-1098
Author(s):  
Hongying Guo ◽  
Jiang Chen ◽  
Zhumei Tian ◽  
Aizhen Wang
Keyword(s):  
Extreme Learning Machine ◽  
Nonlinear Model ◽  
Temperature Compensation ◽  
Compensation Method ◽  
Machine Model ◽  
Output Wavelength ◽  
Pressure Sensitive ◽  
Training Samples ◽  
Prediction Test ◽  
Learning Machine

According to the problem of the sensor nonlinear changes occur at high temperatures, extreme learning machine model, is presented in this thesis the pressure sensitive grating and removing the temperature of the grating experiment data for training, establish a nonlinear model of wavelength, temperature, predict the experimental temperature, then the temperature data of pressure-sensitive grating the training set of training samples, the nonlinear model, temperature - wavelength prediction test set sample output wavelength, achieve the goal of improved temperature compensation method. The experimental results show that the algorithm can achieve a more ideal temperature compensation effect.

A digital output MEMS DRG on-chip temperature compensation method based on virtual sensor

2020 ◽  
Vol 34 (36) ◽  
pp. 2050422
Author(s):  
Yihang Wang ◽  
Xiaowei Liu ◽  
Yufeng Zhang ◽  
Qiang Fu
Keyword(s):  
Temperature Sensor ◽  
Temperature Compensation ◽  
Scale Factor ◽  
Compensation Method ◽  
Digital Output ◽  
Virtual Sensor ◽  
Chip Temperature ◽  
Change Of Scale ◽  
On Chip ◽  
Virtual Temperature

A digital output Disk Resonator Gyroscope (DRG) on-chip temperature compensation method based on virtual sensor is proposed in this paper. DRG is a combination of solid wave gyroscope and MEMS gyroscope, it has become the research emphasis of high precision gyroscope. In practical application, the ambient temperature changing will cause several problems such as the change of scale factor, zero drift and so on. To increase the environmental adaptability of DRG, the DRG temperature characteristics are analyzed, the temperature compensation models of scale factor and zero output are established in this paper. The concept of virtual temperature sensor is introduced to solve the lead or lag problem caused by integrated temperature sensor. Based on the trend of AC drive amplitude changing with temperature, the temperature measurement is converted into AC voltage amplitude measurement. The virtual temperature sensor is used to complete the on-chip temperature compensation of the DRG angular velocity output, the second-order compensation realizes the scale factor change of 40 ppm/[Formula: see text]C and zero output change of 27[Formula: see text]/h over the full temperature range varying from [Formula: see text] to 60[Formula: see text]C according to the simulation result.

scholarly journals A Resonant Pressure Microsensor with a Wide Pressure Measurement Range

Micromachines ◽  
2021 ◽  
Vol 12 (4) ◽  
pp. 382
Author(s):  
Chao Xiang ◽  
Yulan Lu ◽  
Chao Cheng ◽  
Junbo Wang ◽  
Deyong Chen ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Measurement Range ◽  
Silicon On Insulator ◽  
Anodic Bonding ◽  
Pressure Measurements ◽  
Quality Factors ◽  
Deep Reactive Ion Etching ◽  
Wide Range ◽  
Form Pressure ◽  
Silicon Islands

This paper presents a resonant pressure microsensor with a wide range of pressure measurements. The developed microsensor is mainly composed of a silicon-on-insulator (SOI) wafer to form pressure-sensing elements, and a silicon-on-glass (SOG) cap to form vacuum encapsulation. To realize a wide range of pressure measurements, silicon islands were deployed on the device layer of the SOI wafer to enhance equivalent stiffness and structural stability of the pressure-sensitive diaphragm. Moreover, a cylindrical vacuum cavity was deployed on the SOG cap with the purpose to decrease the stresses generated during the silicon-to-glass contact during pressure measurements. The fabrication processes mainly contained photolithography, deep reactive ion etching (DRIE), chemical mechanical planarization (CMP) and anodic bonding. According to the characterization experiments, the quality factors of the resonators were higher than 15,000 with pressure sensitivities of 0.51 Hz/kPa (resonator I), −1.75 Hz/kPa (resonator II) and temperature coefficients of frequency of 1.92 Hz/°C (resonator I), 1.98 Hz/°C (resonator II). Following temperature compensation, the fitting error of the microsensor was within the range of 0.006% FS and the measurement accuracy was as high as 0.017% FS in the pressure range of 200 ~ 7000 kPa and the temperature range of −40 °C to 80 °C.

scholarly journals Characterization of Mach Zehnder interferometer plastic optical fiber for intensity-based temperature sensor

2021 ◽  
Vol 1918 (2) ◽  
pp. 022010
Author(s):  
Ian Yulianti ◽  
N M Dharma Putra ◽  
Fianti ◽  
H Rumiana ◽  
Z A F Latif ◽  
...  
Keyword(s):  
Optical Fiber ◽  
Temperature Sensor ◽  
Zehnder Interferometer ◽  
Plastic Optical Fiber ◽  
Mach Zehnder Interferometer

scholarly journals Correlation of Global Quantities at Material Characterization of Pressure-Sensitive Materials Using Sharp Indentation Testing

Lubricants ◽  
2021 ◽  
Vol 9 (3) ◽  
pp. 29
Author(s):  
Carl F. O. Dahlberg ◽  
Jonas Faleskog ◽  
Per-Lennart Larsson
Keyword(s):  
Finite Element ◽  
Material Characterization ◽  
Pressure Sensitivity ◽  
Pressure Sensitive ◽  
The Mean ◽  
Sharp Indentation ◽  
Von Mises ◽  
Von Mises Plasticity ◽  
Hardness Values

Correlation of sharp indentation problems is examined theoretically and numerically. The analysis focuses on elastic-plastic pressure-sensitive materials and especially the case when the local plastic zone is so large that elastic effects on the mean contact pressure will be small or negligible as is the case for engineering metals and alloys. The results from the theoretical analysis indicate that the effect from pressure-sensitivity and plastic strain-hardening are separable at correlation of hardness values. This is confirmed using finite element methods and closed-form formulas are presented representing a pressure-sensitive counterpart to the Tabor formula at von Mises plasticity. The situation for the relative contact area is more complicated as also discussed.

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