scholarly journals The Effect of Magnetic Field Strength and Geometry on the Deposition Rate and Ionized Flux Fraction in the HiPIMS Discharge

Plasma ◽  
2019 ◽  
Vol 2 (2) ◽  
pp. 201-221 ◽  
Author(s):  
Hamidreza Hajihoseini ◽  
Martin Čada ◽  
Zdenek Hubička ◽  
Selen Ünaldi ◽  
Michael A. Raadu ◽  
...  

We explored the effect of magnetic field strength | B | and geometry (degree of balancing) on the deposition rate and ionized flux fraction F flux in dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS) when depositing titanium. The HiPIMS discharge was run in two different operating modes. The first one we refer to as “fixed voltage mode” where the cathode voltage was kept fixed at 625 V while the pulse repetition frequency was varied to achieve the desired time average power (300 W). The second mode we refer to as “fixed peak current mode” and was carried out by adjusting the cathode voltage to maintain a fixed peak discharge current and by varying the frequency to achieve the same average power. Our results show that the dcMS deposition rate was weakly sensitive to variations in the magnetic field while the deposition rate during HiPIMS operated in fixed voltage mode changed from 30% to 90% of the dcMS deposition rate as | B | decreased. In contrast, when operating the HiPIMS discharge in fixed peak current mode, the deposition rate increased only slightly with decreasing | B | . In fixed voltage mode, for weaker | B | , the higher was the deposition rate, the lower was the F flux . In the fixed peak current mode, both deposition rate and F flux increased with decreasing | B | . Deposition rate uniformity measurements illustrated that the dcMS deposition uniformity was rather insensitive to changes in | B | while both HiPIMS operating modes were highly sensitive. The HiPIMS deposition rate uniformity could be 10% lower or up to 10% higher than the dcMS deposition rate uniformity depending on | B | and in particular the magnetic field topology. We related the measured quantities, the deposition rate and ionized flux fraction, to the ionization probability α t and the back attraction probability of the sputtered species β t . We showed that the fraction of the ions of the sputtered material that escape back attraction increased by 30% when | B | was reduced during operation in fixed peak current mode while the ionization probability of the sputtered species increased with increasing | B | , due to increased discharge current, when operating in fixed voltage mode.

2011 ◽  
Vol 340 ◽  
pp. 167-172 ◽  
Author(s):  
Wen Chang Lang

In this work, a dynamic arched magnetic field steered arc source was deigned by virtue of Finite Element Method (FEM) calculation. The magnetic field was produced by two main electromagnetic coils so that the magnetic field can be adjusted with the help of the two currentI1and I2,whereI1is the current to the internal coil mounted coaxially in a magnetic yoke generating a static arched magnetic field to confine the cathode spots and I2is the current to the external coil mounted coaxially outside the above yoke adjusting the position of the vertex of arch. Base on the results of simulation, it was found this design enable the sweeping of the arc spots on the target surface by means of adjusting the ratio of current (I1/I2) , and cause the arc distribute evenly on the cathode surface in the diffuse arc mode transferred from the constricted arc mode. The effects of the target thickness and current ratio on the configuration and intensity of dynamic arched magnetic field were investigated. The optimized operating modes was proposed and discussed.


2004 ◽  
Vol 15 (04) ◽  
pp. 493-506
Author(s):  
H. X. QIAO ◽  
Y. C. ZOU ◽  
Z. J. ZHANG

An effective one-dimensional model approach combining time-dependent pseudospectral method and Taylor expansion [Haoxue Qiao et al., Phys. Rev. A65, 063403 (2002)] is generalized to study a real hydrogen atom in an intense laser field. High-order harmonic generations are calculated in several cases of different laser field parameters. The ionization probability is also calculated. The influence of the strong magnetic field on harmonic generations is investigated. It is found that the plateau of high harmonics can be extended by the magnetic field and the cutoff order increases with the increase of the field intensity.


Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 710
Author(s):  
Siya Lozanova ◽  
Ivan Kolev ◽  
Avgust Ivanov ◽  
Chavdar Roumenin

A novel coupling of a pair of identical two-contact (2C) magnetoresistors transformed into an in-plane sensitive Hall device is presented. The ohmic contacts are cross-linked, also adding a load resistor bridge, providing for constant current mode of operation and eliminating the inevitable parasitic offset. This silicon configuration, apart from its simplified layout, has linear and odd output voltage as a function of the magnetic field and current. The quadratic and even magnetoresistance in the two parts of this innovative device is completely compensated, which ensures high measurement accuracy alongside with identification of the magnetic field polarity. The experimental prototypes feature sensitivity of 110 V/AT. The mean lowest detected magnetic induction B at supply current of 3 mA over frequency range f ≤ 100 Hz at a signal-to-noise ratio equal to unity is Bmin ≈ 10 μT. Тhe high performance and the complete electrical, temperature and technological matching of the parts of this unusual Hall device make it very promising for many practical applications.


2013 ◽  
Vol 739 ◽  
pp. 489-492
Author(s):  
Toempong Phetchakul ◽  
Prateep Taisettavatkul ◽  
Wittawat Yamwong ◽  
Amporn Poyai

The split-current magnetoresistor is proposed here. The structure likes the series magnetoresistor that one end split into two symmetrical terminals, so it is the magnetoresistor with three terminals. It uses the Hall effect current mode as magnetoresistor but the output is the differential current instead of resistance. It shows good linearity and can detect the magnetic field direction. The sensitivity in the differential current of width 100 μm and length 200 μm at 1 mA is 2.788x10-6 A/T constantly while the conventional one in the differential resistance is varied with magnetic field. It is made of silicon non magnetic material so it is compatible with the modern low-voltage current-mode integrated circuit.


Author(s):  
Maany A. Hamada ◽  
Nagah El-Shishtawi ◽  
Esam A. Gomaa

The association constants KA for CoCl2 aqueous solutions were calculated using the experimental conductivity values at different salt concentrations. The molar conductivities were measured in the absence and presence of a magnetic field with an average power of 0. 677 KGauss. A new equation for asymmetric 1:2 salts was suggested and used. This equation was derived from Ostwald, Arrhenius, and Fuoss-Shedlovsky theories. The results obtained were discussed and the effect of the magnetic field on the association constants was explained.


Author(s):  
Chalin Sutthinet ◽  
Amporn Poyai ◽  
Toempong Phetchakul

This paper presents a new magnetodiode, the so-called dual magnetodiode, for wireless sensor application. The device is a current mode which can be integrated with a chip compatible with modern low power, low voltage integrated circuit (IC). The structure and operation are completely different from a conventional magnetodiode. The structure is composed of two p–n junctions in that one region is common and the others are split terminals for output of differential current. The underlying mechanism is carrier deflection by induced force from a magnetic field. The carriers are injected from the common region by forward bias. The defection carriers diffuse, deflect, and recombine along substrate through split terminals according to direction and density of the magnetic field linearly and symmetrically. From the comparison of complementary structure of the split cathode and the split anode structure of LD = 50 μm, the bias current 1 mA and magnetic field 0.5 T, the relative sensitivities (SR) are 11.01 and 11.19 T−1, respectively. This device is a simple p–n junction structure which is compatible with all micro/nanotechnology.


2021 ◽  
pp. 121-125
Author(s):  
O.S. Mazmanishvili ◽  
M.G. Reshetnyak ◽  
V.P. Romasko ◽  
I.A. Chertishchev

The dynamics of the dimensions of the electron beam generated by the magnetron gun in the particle transport channel and the efficiency of focusing the tubular electron beam in the gradient magnetic field are investigated. The experiments were carried out with magnetron guns with secondary-emission cathodes (cathode diameters 36 and 16 mm, anodes diameters 78 and 36 mm) at cathode voltage of 20...80 kV. Magnetic fields were created both by the solenoid and jointly by the solenoid and the permanent magnet. The dependence of the radial distribution of the beam on metal targets on the amplitude and gradient of the magnetic field along the axis of the system is inves-tigated. The possibility of controlling the beam diameter by varying the magnetic field is shown. The imprints of collimated beams were obtained experimentally on targets located at selected distances. The obtained experimental data agree with the results of numerical simulation. It is shown that with an increase in the amplitude of the gradient magnetic field, the effect of radial focusing of the beam is more pronounced.


1967 ◽  
Vol 31 ◽  
pp. 375-380
Author(s):  
H. C. van de Hulst

Various methods of observing the galactic magnetic field are reviewed, and their results summarized. There is fair agreement about the direction of the magnetic field in the solar neighbourhood:l= 50° to 80°; the strength of the field in the disk is of the order of 10-5gauss.


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