scholarly journals An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer

Sensors ◽  
2020 ◽  
Vol 20 (13) ◽  
pp. 3652 ◽  
Author(s):  
Xiaoxiao Song ◽  
Huafeng Liu ◽  
Yanyan Fang ◽  
Chun Zhao ◽  
Ziqiang Qu ◽  
...  

Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physical quantities, it is often desirable to integrate temperature sensors with other physical sensors, including accelerometers. In this study, we introduce an integrated gold-film resistor-type temperature sensor for in situ temperature measurement of a high-precision MEMS accelerometer. Gold was chosen as the material of the temperature sensor, for both its great resistance to oxidation and its better compatibility with our in-house capacitive accelerometer micro-fabrication process. The proposed temperature sensor was first calibrated and then evaluated. Experimental results showed the temperature measurement accuracy to be 0.08 °C; the discrepancies among the sensors were within 0.02 °C; the repeatability within seven days was 0.03 °C; the noise floor was 1 mK/√[email protected] Hz and 100 μK/√[email protected] Hz. The integration test with a MEMS accelerometer showed that by subtracting the temperature effect, the bias stability within 46 h for the accelerometer could be improved from 2.15 μg to 640 ng. This demonstrates the capability of measuring temperature in situ with the potential to eliminate the temperature effects of the MEMS accelerometer through system-level compensation.

2020 ◽  
Vol 96 (1) ◽  
pp. 97-110
Author(s):  
James Hendee ◽  
Natchanon Amornthammarong ◽  
Lewis Gramer ◽  
Andrea Gomez

The role of elevated sea temperatures in coral bleaching has been well documented. Many of the sea temperature records utilized for purposes of widespread, multi-species bleaching predictions in recent publications have been acquired through satellite remote sensing. Satellites estimate sea temperatures at only a narrow range of depths near the surface of the ocean and may therefore not adequately represent the true temperatures endured by the world's coral ecosystems. To better characterize sea temperature regimes that coral reef ecosystems experience, as well as better define the individual thresholds for each species that bleaches, in situ sea temperature sensors are required. Commercial sensors are expensive in large quantities, however, reducing the capacity to conduct large- scale research programs to elucidate the range of significant scales of temperature variability. At the National Oceanic and Atmospheric Administration's (NOAA) Atlantic Oceanographic and Meteorological Laboratory (AOML), we designed a low-cost (roughly US$9 in parts) and high- precision sea temperature sensor that uses an Arduino microprocessor board and a high accuracy thermistor. This new temperature sensor autonomously records temperatures onto a memory chip and provides better accuracy (+0.05 °C) than a comparable commercial sensor (+0.2 °C). Moreover, it is not difficult to build; anyone who knows how to solder can build the temperature sensor. In March 2019, students at middle and high schools in Broward County, Florida, built close to 60 temperature sensors. During 2019, these sensors will be deployed by Reef Check, a global-scale coral reef monitoring organization, as well as by other programs to determine worldwide sea temperature regimes through the Opuhala Project (https://www. coral. noaa. gov/opuhala). This paper chronicles results from the initial proof-of-concept deployments for these AOML-designed sensors.


RSC Advances ◽  
2016 ◽  
Vol 6 (90) ◽  
pp. 87124-87127 ◽  
Author(s):  
Abu Riduan Md Foisal ◽  
Hoang-Phuong Phan ◽  
Takahiro Kozeki ◽  
Toan Dinh ◽  
Khoa Nguyen Tuan ◽  
...  

This letter reports on cubic silicon carbide (3C–SiC) transferred on a glass substrate as an ideal platform for thermoresistive sensors which can be used for in situ temperature measurement during optical analysis.


2014 ◽  
Vol 539 ◽  
pp. 177-180 ◽  
Author(s):  
Yi Zhen Nie

for Pt100 platinum resistance temperature measurement system has low accuracy, duplicate hardware circuit design and other issues, the articles design a high-precision temperature measurement system with Pt100 platinum resistance. With Pt100 temperature sensor, article takes STM32F103 as the control center through filtering, amplification and other signal conditioning circuit and a method of combining software look-up table to compensate the nonlinear compensation, thus achieving high-precision temperature measurement. Research results show that the system has a measurement accuracy high stability, scalability, and other characteristics.


2021 ◽  
Vol 2145 (1) ◽  
pp. 012068
Author(s):  
P Chanthamanee ◽  
P Jinda ◽  
M Mani ◽  
S Prasitpong

Abstract The research aims to develop the experimental set of the temperature measurement in liquid by Arduino program displaying data on a smartphone via the Blynk application. The experimental set is composed of 1) 2 liquid temperature sensors (DS18B20 model), 2) Arduino program, and 3) LED screen for showing the temperature value in unit of °C and connect to a smartphone. The Arduino temperature sensor 1 and sensor 2 of the experimental set have 0.57% and 0.51% errors, respectively, compared with the temperature sensor of the B Smart Science Co., Ltd. company. The instrument is applied to the physics laboratory on Newton’s law of cooling to find the cooling rate of water and coffee. This low-cost instrument revealed high accuracy results and easy to connect with other devices.


2020 ◽  
Vol 20 (7) ◽  
pp. 4263-4266 ◽  
Author(s):  
Ju-Hun Ahn ◽  
Henzeh Leeghim ◽  
Chang-Yull Lee

There are limitations on the shape of models that can be measured with commonly used temperature sensors. These disadvantages are difficult to measure temperatures of the curved surface. To overcome the shortcomings, a smart paint for temperature measurement is proposed in this work. A polymer solution was prepared for viscosity of the paint and dispersion of materials. The BaTiO3 and Ag nanopaste are used for PTC characteristics and conductivity of the paint, respectively. Smart paint were analyzed the arrangement and shape of particles according to the processes and production methods. Also, the change of resistance was measured while increasing the temperature. The results show that resistance increased as the temperature increased. The performance of the manufactured smart paint was confirmed as a surface temperature sensor.


2008 ◽  
Vol 381-382 ◽  
pp. 477-480 ◽  
Author(s):  
Jun Xu ◽  
Bo You ◽  
X. Li

This paper presents a high precision temperature measurement instrument based on quartz tuning-fork temperature sensor (QTTS) using Artificial Neural Networks (ANN). The advantage of QTTS is a great sensitivity which makes possible to determine the temperature with the accuracy of 0.01 °C , but the QTTS based temperature measurement instrument often appears as erroneous temperature reading when using standard polynomial calibration techniques over a large temperature range. For high precision temperature measurement, a new method is presented to compensate non-linearity of QTTS based instrument using non-linearity compensation model using ANN by Levenberg-Marquardt algorithm to settle its non-linear problem. The hardware and software parts of the system are integrated in a PC-based instrument used for operation and calibration. ANN based modelling and correction technique has been evaluated experimentally, followed by experimental results obtained by applying the method to QTTS calibration.


2020 ◽  
Vol 315 ◽  
pp. 112341
Author(s):  
Zhaojun Liu ◽  
Bian Tian ◽  
Xu Fan ◽  
Jiangjiang Liu ◽  
Zhongkai Zhang ◽  
...  

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