Synergy effects of Al-V-co-doping and oxygen reactive sputtering on electrical and optical properties of ZnO films

2021 ◽  
Vol 60 (3) ◽  
pp. 035503
Author(s):  
Takeru Okada ◽  
Chisato Tateyama ◽  
Kotaro Hoshino ◽  
Tomoyuki Kawashima ◽  
Katsuyoshi Washio
Keyword(s):  
Optical Properties ◽  
Reactive Sputtering ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Co Doping ◽  
Synergy Effects

Electrical and optical properties of ZnO films sequentially implanted with P ions

2011 ◽  
Vol 26 (12) ◽  
pp. 125016 ◽  
Author(s):  
Y H Xue ◽  
X D Zhang ◽  
Y Y Shen ◽  
D C Zhang ◽  
F Zhu ◽  
...  
Keyword(s):  
Optical Properties ◽  
Zno Films ◽  
Electrical And Optical Properties

Effects of As Doping on Properties of ZnO Films

2001 ◽  
Vol 692 ◽  
Author(s):  
K. S. Huh ◽  
D. K. Hwang ◽  
K. H. Bang ◽  
M. K. Hong ◽  
D. H. Lee ◽  
...  
Keyword(s):  
Optical Properties ◽  
Secondary Ion Mass Spectrometry ◽  
Annealing Treatment ◽  
Zno Films ◽  
X Ray Diffraction ◽  
Electrical And Optical Properties ◽  
As Doping ◽  
Dopant Atoms ◽  
Increasing Temperature ◽  
Secondary Ion

AbstractA series of ZnO thin films with various deposition temperatures were prepared on (100) GaAs substrates by radio-frequency magnetron sputtering using ZnO target. The ZnO films were studied by field emission scanning electron microscope(FESEM), x-ray diffraction(XRD), photoluminescence(PL), cathodoluminescence(CL), and Hall measurements. The structural, optical, and electrical properties of the films were discussed as a function of the deposition temperature. With increasing temperature, the compressive stress in the films was released and their crystalline and optical properties were improved. From the depth profile of As measured by secondary ion mass spectrometry(SIMS), As doping was confirmed, and, in order to activate As dopant atoms, post-annealing treatment was performed. After annealing treatment, electrical and optical properties of the films were changed.

Effects of annealing conditions and film thickness on electrical and optical properties of epitaxial Al-doped ZnO films

2016 ◽  
Vol 599 ◽  
pp. 19-26 ◽  
Author(s):  
S. Kuprenaite ◽  
A. Abrutis ◽  
V. Kubilius ◽  
T. Murauskas ◽  
Z. Saltyte ◽  
...  
Keyword(s):  
Optical Properties ◽  
Film Thickness ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Annealing Conditions ◽  
Doped Zno

Electrical and Optical Properties of Ga-Doped ZnO Films Grown on Glass and Plastic Substrates by Using Plasma-Assisted Deposition

2008 ◽  
Vol 53 (9(5)) ◽  
pp. 2947-2950 ◽  
Author(s):  
T. Muranaka ◽  
A. Nisii ◽  
T. Uehara ◽  
T. Sakano ◽  
Y. Nabetani ◽  
...  
Keyword(s):  
Optical Properties ◽  
Zno Films ◽  
Electrical And Optical Properties ◽  
Plastic Substrates ◽  
Doped Zno

Electrical and Optical Properties as Functions of the TiO$_2$ Content in ZnO Films for Next-generation Transparent Electrodes

2010 ◽  
Vol 60 (2) ◽  
pp. 218-222
Author(s):  
S.-B. SEO ◽  
K. BAE ◽  
H.-O. YOUN ◽  
M.-S. KIM ◽  
S.-H. PARK ◽  
...  
Keyword(s):  
Optical Properties ◽  
Zno Films ◽  
Next Generation ◽  
Transparent Electrodes ◽  
Electrical And Optical Properties
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