In this work, the electrical properties of Pt/GaN Schottky contacts were studied. The
temperature dependence of the barrier height and ideality factor, and the low experimental value of
the Richardson’s constant, were discussed considering the formation of an inhomogenous Schottky
barrier. Local current-voltage measurements on Pt/GaN contact, performed with a conductive
atomic force microscope, demonstrated a Gaussian distribution of the local barrier height values and
allowed to monitor the degree of inhomogeneity of the barrier. The presence of defects, terminating
on the bare GaN surface, was correlated with the electrical behavior of the inhomogeneous barrier.