Synthesis of carbon barrier film using pulsed DC Closed Field Unbalanced Magnetron Sputtering

2009 ◽  
Vol 55 (5(1)) ◽  
pp. 1865-1868
Author(s):  
Sung il Kim
Keyword(s):  
Magnetron Sputtering ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Pulsed Dc ◽  
Unbalanced Magnetron ◽  
Barrier Film

Characterization of Titanium and Niobium Doped DLC Films Grown by Pulsed DC PVD: Closed Field Unbalanced Magnetron Sputtering (CFUBMS) Method

2007 ◽  
Author(s):  
Deniz Ugur ◽  
Ihsan Efeoglu ◽  
Sabri Altintas
Keyword(s):  
Magnetron Sputtering ◽  
High Speed ◽  
High Speed Steel ◽  
Closed Field ◽  
X Ray ◽  
Unbalanced Magnetron Sputtering ◽  
Pulsed Dc ◽  
Unbalanced Magnetron ◽  
Scratch Tests

In this research, structural, tribological and mechanical characterization of Nb and Ti doped diamond like carbon (DLC) films was carried out. Films were grown on M2 high speed steel (HSS), glass and silicon wafer substrates by pulsed DC physical vapor deposition – closed field unbalanced magnetron sputtering (PVD-CFUBMS) method. Structural characterization of the coatings was done by using Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and X-Ray Photoelectron Spectroscopy (XPS) tests. Tribological characterization was completed by conducting pin on disk tests, scratch tests and surface profilometry analyses on wear scars. Hardness measurements were done with nanoindentation tests. It was noted that there existed excellent adhesion between the coating and the substrate, which is evidenced by the high critical loads reached in scratch tests.

The Structure and Mechanical Properties of Ti-Si-B Coatings Deposited by DC and Pulsed-DC Unbalanced Magnetron Sputtering

2007 ◽  
Vol 4 (S1) ◽  
pp. S687-S692 ◽  
Author(s):  
Martynas Audronis ◽  
Adrian Leyland ◽  
Allan Matthews ◽  
Fillip V. Kiryukhantsev-Korneev ◽  
Dmitry V. Shtansky ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Unbalanced Magnetron Sputtering ◽  
Pulsed Dc ◽  
Unbalanced Magnetron

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

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