Study on Micro Electrochemical Machining Technology and its Influencing Factors

2013 ◽  
Vol 395-396 ◽  
pp. 1062-1065 ◽  
Author(s):  
Xiao Hai Li ◽  
Li Ping Zhao ◽  
Ying Chun Shi ◽  
Li Jie Zhao
Keyword(s):  
High Frequency ◽  
Short Pulse ◽  
Influence Factors ◽  
Electrochemical Machining ◽  
Optical Encoder ◽  
Loop Control ◽  
Micro Ecm ◽  
Micro Parts ◽  
Micro Hole ◽  
Meso Scale

Electrochemical machining (ECM) is an anodic dissolution process of metal as anode ion by ion, and micro-ECM is a promising micromachining method at micro to meso-scale. Thus, a micro-ECM setup was developed to fabricate micro parts and explore the feasibility of micro-ECM at micro to meso-scale, including the design of high-frequency micro-energy pulse power supply. By using the detection unit of machining state and optical encoder, a closed loop control system for micro-ECM was developed. Under low concentration of passivating electrolyte, low machining voltage, micro rotating electrode and high-frequency short-pulse current, the machining gap can be reduced to about 10μm. The influence factors of the additives and the rotation of micro electrode on micro ECM were analysed by experiments. A micro-hole about 30μm in diameter was drilled by the rotating micro electrode.

Pulsed Micro-Electrochemical Machining Technology

2007 ◽  
Vol 339 ◽  
pp. 327-331 ◽  
Author(s):  
Xiao Hai Li ◽  
Zhen Long Wang ◽  
W.S. Zhao ◽  
Fu Qiang Hu
Keyword(s):  
Stainless Steel ◽  
High Speed ◽  
Short Pulse ◽  
Research Work ◽  
Electrochemical Machining ◽  
Tool Electrode ◽  
Stainless Steel Foil ◽  
Micro Ecm ◽  
Micro Hole ◽  
Micro Tool

This research work aims to explore the feasibility of applying electrochemical machining (ECM) to micromachining. An experimental setup for micro-ECM has been developed. Lower machining voltage, lower concentration of passivity electrolyte, high-frequency short-pulse power supply and micro tool electrode rotating at high speed have been synthetically adopted to localize the dissolution area in micro-ECM, so the machining gap can be kept at about 10 μm and the better resolution of machined shape is achieved. A micro-hole with 45μm diameter is drilled on the stainless steel foil with 100μm thickness. A new approach of fabricating microstructure by micro-ECM milling with a simple micro electrode is proposed, and the micro beam with width of about 50μm which has high precision is fabricated by micro-EC milling on the stainless steel foil (1Cr18Ni9Ti) with 300μm thickness. A mathematics model has been established, which can be used to simulate the process of shaping workpieces in the process of micro-ECM.

New Researches for Fabrication of Micro-Pin in Micro-ECM

2012 ◽  
Vol 497 ◽  
pp. 205-209 ◽  
Author(s):  
Ming Huan Wang ◽  
Tao Wang ◽  
Wei Peng
Keyword(s):  
Low Voltage ◽  
Electrochemical Machining ◽  
Pulse Power ◽  
Duty Ratio ◽  
Theoretic Model ◽  
Micro Machining ◽  
Key Technology ◽  
Dc Power ◽  
Micro Ecm ◽  
Micro Parts

Micro-electrode preparation is the key technology in micro-machining of micro- mechanics and micro-parts. In this research, the machining method of micro-pin using micro-electrochemical machining (micro-ECM) was proposed. The principle of micro-pin fabrication is introduced and the studies are focused on the effects of varies parameters on the shape of the micro-pin. The theoretic model between the shape of micro-pin and the parameters including power, voltage, duty ratio of pulse power, immerge depth of electrode is built up and then verified by experimentations. Experimental results denote that the micro-electrode with desirable shape and size could be prepared by controlling applied parameters. When the immersing depth is deeper, the pulse power, low voltage and duty ratio is proper selected. On the contrary, the DC power or pulse power with higher voltage and duty ratio should be applied. Finally, micro-pin with diameter of 5μm and 60μm long was fabricated when the DC power of 1.8V voltage and immersing depth of 1mm is applied.

Design and its Experiments of Micro Electrochemical Machining System

2010 ◽  
Vol 97-101 ◽  
pp. 2505-2508 ◽  
Author(s):  
Yuan Bo Li ◽  
Yong Jun Zhang ◽  
Zhong Ning Guo
Keyword(s):  
High Resolution ◽  
Power Supply ◽  
Pulse Width ◽  
Short Pulse ◽  
Electrochemical Machining ◽  
Pulse Frequency ◽  
Machining Accuracy ◽  
Micro Ecm ◽  
Machining System ◽  
Short Pulse Width

A micro Electrochemical Machining (ECM) system has been developed, and macro/micro complex feed mechanism has been presented in order to achieve high-resolution. A nanosecond pulse power supply for micro-ECM has been developed, and the minimum pulse width can reach 50 ns. Complementary chopper circuit has been designed to avoid waveform distortion, which can achieve higher pulse frequency. A series of ECM experiments using the machining system have been carried out, and results of tests have proved that high-resolution spindle, and high frequency, short pulse width power supply help to achieve better quality surface, higher machining accuracy.

Research on Multifunctional Micro Machining Equipment

2004 ◽  
Vol 471-472 ◽  
pp. 37-42 ◽  
Author(s):  
B.X. Jia ◽  
Zhen Long Wang ◽  
Fu Qiang Hu ◽  
Xiao Hai Li ◽  
Wan Sheng Zhao
Keyword(s):  
New Technologies ◽  
Electrochemical Machining ◽  
Micro Edm ◽  
Micro Machining ◽  
Electro Discharge Machining ◽  
Micro Ecm ◽  
Micro Holes ◽  
Micro Hole ◽  
Series Of Experiments ◽  
Frequency Pulse

To perform several micro-machining on same machine tool, a micro machining equipment was researched and developed. The equipment adopts some high and new technologies. It is equipped with high precision XYZ stage, a spindle with high rotation accuracy and variable rotation speed, a granite worktable, a block electro discharge grinding unit for machining micro rod, a ultrasonic vibration unit for workpiece vibrating, a high frequency pulse power supply for micro-ECM and a video microscopic system with high enlargement factor. The equipment can perform micro electro discharge machining (EDM), micro electrochemical machining (ECM), micro ultrasonic machining (USM) as well as their combination. It can also machine 3D microstructures. A series of experiments were carried out. Using micro-EDM, micro rods with the diameter of less than 5µm were ground on block electrode, micro holes and 3D microstructures were obtained. Shaped holes were machined by using combination of micro-EDM and micro-USM. A micro hole with the diameter of 100µm was machined via micro-ECM.

Establishing Mathematics Model of Pole Gap Parameters in the High Frequency Short Pulse Electrochemical Machining

2011 ◽  
Vol 130-134 ◽  
pp. 3320-3323
Author(s):  
Guo Qiang Cao ◽  
Yi Tong Dai ◽  
Lan Yao
Keyword(s):  
High Frequency ◽  
Short Pulse ◽  
Electrochemical Machining ◽  
Mathematics Model ◽  
Ideal Model ◽  
Pulse Electrolysis ◽  
Pulse Electrochemical Machining ◽  
Capacitance Model ◽  
Main Factors

Recently, high frequency short pulse electrochemical machining is a focus engineering of national research, its mechanism of research must established in the foundation of correct mathematics model, capacitance model is a ideal model to analysis high frequency short pulse, this article is based on capacitance model, make a detailed formula deduction on the main factors for high frequency short pulse electrochemical machining, eventually, acquired high frequency narrow pulse electrolysis processing gap between poles formula which is based on capacitance model.

scholarly journals Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

Micromachines ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 66 ◽  
Author(s):  
Yukui Wang ◽  
Han Wang ◽  
Yuxin Zhang ◽  
Xiaolong He ◽  
Zhenlong Wang ◽  
...  
Keyword(s):  
High Precision ◽  
Large Scale ◽  
Electrical Discharge Machining ◽  
Electrochemical Machining ◽  
Tool Electrode ◽  
Disk Electrode ◽  
Micro Ecm ◽  
Micro Parts ◽  
Micro Wedm

This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS.

Research of Pulse Inversion Power Supply of ECM and its Techniques

2009 ◽  
Vol 76-78 ◽  
pp. 630-634 ◽  
Author(s):  
Yong Jun Zhang ◽  
Yong Jun Tang ◽  
Zhong Ning Guo ◽  
Xiao Kang Liu ◽  
Feng Li
Keyword(s):  
Surface Quality ◽  
Power Supply ◽  
High Frequency ◽  
Short Pulse ◽  
Electrochemical Machining ◽  
Machining Accuracy ◽  
Electrochemical Mechanical Polishing ◽  
Pulse Inversion ◽  
Compact Size ◽  
Supply Model

In order to improve machining accuracy and surface quality effectively in ECM (electrochemical machining), a novel pulse inversion power supply has been presented, which has following merits such as high-frequency short pulse, high-power, and compact size. The scheme of full bridge inversion has been selected in this power supply model, and feedback circuit realizes voltage adjusted automatically, and guarantees to stability of voltage. Protect circuit has designed to avoid the problem of workpiece-burn. Finally, a series of electrochemical mechanical polishing tests using the power supply have been carried out, and the results have proved that it helps to achieve well surface quality processed, and improve machining accuracy, and also verify feasibility of its scheme.

Research on Micro Electrochemical Machining Based on Multifunction Machine Tool

2009 ◽  
Vol 628-629 ◽  
pp. 399-404
Author(s):  
Xiao Hai Li ◽  
Li Jie Zhao ◽  
Xin Rong Wang ◽  
X. Zhang ◽  
Zhen Long Wang
Keyword(s):  
Stainless Steel ◽  
High Speed ◽  
Short Pulse ◽  
Electrochemical Machining ◽  
304 Stainless Steel ◽  
Tool Electrode ◽  
Electrode Gap ◽  
Micro Ecm ◽  
Gap Control ◽  
Ultra Short Pulse

The research aims to develop an experimental equipment to carry out in depth research on micro electrochemical machining (micro-ECM). The mechanisms of ultra-short pulse current micro ECM are discussed. As a consequence, lower machining voltage, lower passivity electrolyte concentration, high frequency short pulse power supply and micro rotating tool electrode at high speed have been synthetically used to localize the dissolution area during micro-ECM. The machining gap can be kept at a very small value, and the better resolution of machined shape is achieved by using a novel designed electrode gap control system and the effective utilization of ECM for micromachining is fulfilled. The experiments on microstructure by micro-ECM milling on stainless steel plate are conducted. The micro structures milled on 304 stainless steel foil with 300μm thickness with high precision and high aspect ratio are achieved, and the width of micro beam is about 60μm.

Research on Electrochemical Micromachining System and Related Techniques

2006 ◽  
Vol 315-316 ◽  
pp. 731-735
Author(s):  
Xiao Hai Li ◽  
Zhen Long Wang ◽  
Wan Sheng Zhao
Keyword(s):  
Machine Tool ◽  
Electrical Discharge Machining ◽  
Short Pulse ◽  
Electrochemical Machining ◽  
Electrochemical Micromachining ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Micro Electrical Discharge Machining ◽  
Micro Hole ◽  
Micro Tool

Electrochemical machining (ECM) has been rarely applied in micromachining because the electric field is not localized. In order to explore the feasibility of applying ECM to micromachining at micro to meso-scale, an experimental setup with precision control over electrochemical micromachining (EMM) was developed, which is in fact a multifunctional machine tool. The micro tool electrodes for EMM can also be fabricated by micro electrical discharge machining (EDM) on the same machine tool. A high-frequency short-pulse micro-energy MOSFET power supply was designed. Lower machining voltage and lower concentration of passivity electrolyte are utilized together to localize dissolution area in EMM. A micro hole 45 ,m in diameter was drilled by EMM on stainless steel foil with 100 μm thickness. A new approach of fabricating microstructures by means of EMM milling using a simple micro tool electrode is proposed, and a shaped hole and a micro cantilever beam with high precision were acquired by EMM milling. The satisfactory process results indicate the potential capability of EMM for higher machining accuracy and smaller machining size.

Research on Micro Electrochemical Milling

2008 ◽  
Vol 375-376 ◽  
pp. 318-322 ◽  
Author(s):  
Xiao Hai Li ◽  
Zhen Long Wang ◽  
Jun Fa Wang ◽  
Xin Rong Wang
Keyword(s):  
High Speed ◽  
Short Pulse ◽  
Influence Factors ◽  
Side Wall ◽  
Tool Electrode ◽  
Feed Speed ◽  
Micro Ecm ◽  
Cad Cam ◽  
Micro Tool ◽  
Electrochemical Milling

A new process of fabricating microstructures through micro electrochemical milling (micro EC milling) is proposed. By utilizing side wall of simple micro tool electrode rotating at high speed like micro mechanical milling and controlling the movement track on NC three-axis feed worktable, microstructures with high precision can be milled by micro-ECM under high-frequency short-pulse current. Micro EC milling can greatly improve the machining status in the tiny machining gap and thus make machining stable by simple rotary column electrode. The influence factors on the accuracy of micro-EC milling were investigated through process experiments, such as feed speed, machining voltage and kind of electrolyte. The process of the NC generating micro-ECM integrating CAD/CAM technology is studied. G code for machining complex microstructures can be generated by the universal CAD/CAM of traditional milling based on UG software. Last, Microstructures with complex shape were milled by this process, for example the micro bend beam with width of about 50μm, and its aspect ratio is about 6.

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