scholarly journals Micro Electrochemical Machining of Array Micro-Grooves Using In-Situ Disk Electrode Fabricated by Micro-WEDM

Micromachines ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 66 ◽  
Author(s):  
Yukui Wang ◽  
Han Wang ◽  
Yuxin Zhang ◽  
Xiaolong He ◽  
Zhenlong Wang ◽  
...  
Keyword(s):  
High Precision ◽  
Large Scale ◽  
Electrical Discharge Machining ◽  
Electrochemical Machining ◽  
Tool Electrode ◽  
Disk Electrode ◽  
Micro Ecm ◽  
Micro Parts ◽  
Micro Wedm

This paper develops an array micro-grooves manufacturing method using micro electrochemical machining (ECM) with disk electrode, which is prepared by in-situ micro wire electrical discharge machining (WEDM). This technology focuses on the difficulty of array structure manufacture in micro-electro-mechanical systems (MEMS). A micro-ECM system is built based on the micro-WEDM machine to achieve high precision processing of the array micro-grooves. Since micro-WEDM has good performance in high precision machining of the rotating structure, single and multi-edge disk electrodes can be fabricated in-situ using graphite. The as-prepared disk tool electrode is directly used for micro-electrochemical milling of the array micro-grooves without disassembling away from the device, which avoids the positioning error caused by the re-clamping of the disk electrode. With the advantages of high surface quality and no electrode loss, micro-ECM improves the manufacture performance of the micro-parts. Through wire path optimization, the shape accuracy of the disk edge is improved. After the research of the micro-ECM parameters, the process is improved, and finally, the high precision array micro-grooves are obtained. This method combines the advantages of micro-WEDM and disk electrode micro-ECM milling, and it is convenient for large-scale manufacture of array micro-structures on micro-parts and MEMS.

New Researches for Fabrication of Micro-Pin in Micro-ECM

2012 ◽  
Vol 497 ◽  
pp. 205-209 ◽  
Author(s):  
Ming Huan Wang ◽  
Tao Wang ◽  
Wei Peng
Keyword(s):  
Low Voltage ◽  
Electrochemical Machining ◽  
Pulse Power ◽  
Duty Ratio ◽  
Theoretic Model ◽  
Micro Machining ◽  
Key Technology ◽  
Dc Power ◽  
Micro Ecm ◽  
Micro Parts

Micro-electrode preparation is the key technology in micro-machining of micro- mechanics and micro-parts. In this research, the machining method of micro-pin using micro-electrochemical machining (micro-ECM) was proposed. The principle of micro-pin fabrication is introduced and the studies are focused on the effects of varies parameters on the shape of the micro-pin. The theoretic model between the shape of micro-pin and the parameters including power, voltage, duty ratio of pulse power, immerge depth of electrode is built up and then verified by experimentations. Experimental results denote that the micro-electrode with desirable shape and size could be prepared by controlling applied parameters. When the immersing depth is deeper, the pulse power, low voltage and duty ratio is proper selected. On the contrary, the DC power or pulse power with higher voltage and duty ratio should be applied. Finally, micro-pin with diameter of 5μm and 60μm long was fabricated when the DC power of 1.8V voltage and immersing depth of 1mm is applied.

Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining

2009 ◽  
Vol 60-61 ◽  
pp. 380-387 ◽  
Author(s):  
Gai Hong Liu ◽  
Yong Li ◽  
Xu Peng Chen ◽  
Shan Jin Lv
Keyword(s):  
Spin Coating ◽  
Electrochemical Machining ◽  
Processing Parameters ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Insulation Material ◽  
Durability Test ◽  
Micro Ecm ◽  
Micro Tool ◽  
Micro Array

In micro electrochemical machining (micro ECM), side-insulation of tool electrode can significantly improve the machining accuracy, especially for high aspect ratio structures. This paper presented a new side-insulation approach for not only micro single electrodes but also micro array electrodes, in which spin-coating and room curing are used to coat the micro tool electrodes with a very thin film of polymer, followed by an end-rubbing process to remove the insulation material from the electrode end surfaces. Processing parameters of spin-coating were optimized experimentally, and side-insulated micro single electrodes with a double-layer epoxy coating of 3m thickness were prepared. Experiments were made to test the performance of the side-insulation film under simulated micro ECM conditions. And the results demonstrated good insulativity and high adherence strength in a 6-hour durability test. Also side-insulation for micro array electrodes was performed using this approach.

Experimental study of an electrostatic field–induced electrolyte jet electrical discharge machining process

2015 ◽  
Vol 231 (10) ◽  
pp. 1752-1759 ◽  
Author(s):  
Zhang Yaou ◽  
Han Ning ◽  
Kang Xiaoming ◽  
Zhao Wansheng ◽  
Xu Kaixian
Keyword(s):  
Electrostatic Field ◽  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Electrochemical Machining ◽  
Machining Process ◽  
Cyclic Process ◽  
Tool Electrode ◽  
Series Of Experiments ◽  
Current Detection ◽  
Electrolyte Jet

In this study, a new electrostatic field–induced electrolyte jet electrical discharge machining method has been proposed, which can automatically generate the tool electrode. Then, a series of experiments have been carried out to reveal the machining mechanism and test the machining ability of this method. The continuous observation experiments and the online current detection experiments have demonstrated that the electrolyte jet discharge machining is a pulsing, dynamic and cyclic process. Moreover, the 20-min time long reverse polarity experiments on the silicon surface have revealed that the machining is an electrical discharge machining process during the negative polarity machining; however, in the positive polarity machining, it is a hybrid electrical discharge machining and electrochemical machining process. Furthermore, the craters as small as 2 µm in diameter on stainless steel and silicon are produced by this electrolyte jet electrical discharge machining, which has proved the micro-machining ability of this method.

Electrical Discharge/Electrochemical Hybrid Machining Based on the Same Machine and Tool Electrode

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Ryoichiro Kishi ◽  
Jiwang Yan
Keyword(s):  
Electrical Discharge ◽  
Surface Defects ◽  
Electrical Discharge Machining ◽  
High Surface ◽  
Electrochemical Machining ◽  
Hybrid Process ◽  
Tool Electrode ◽  
Alignment Error ◽  
Rapid Fabrication ◽  
Finishing Process

Abstract Electrical discharge machining (EDM) causes surface defects such as resolidified layer and microcracks, and a finishing process is usually needed to remove these defects. In this paper, a hybrid process was proposed where electrochemical machining (ECM) was performed as a finishing process after EDM using the same tool electrode on the same machine. By using two kinds of disk-type rotary electrodes, rectangular grooves and grooves with convex inner structures were fabricated. Surface topography were investigated by using scanning electron microscope (SEM), energy dispersive X-ray spectrometry (EDX), and laser-probe surface profilometer. The material removal mechanism of resolidified layers was clarified. The surface roughness of the rectangular groove was improved from 3.82 μm Ra to 0.86 μm Ra after ECM. Electrode rotation was effective for flushing electrolytic products when fabricating inner structures. As there is no need for exchanging tools and machines, tool alignment error can be prevented and productivity can be improved. Therefore, the proposed EDM/ECM hybrid process contributes to rapid fabrication of microscale products with high surface integrity.

Dentale Implantatstrukturen aus CrCoMo/Near-dry EDM of CrCoMo dental implant structures

2020 ◽  
Vol 110 (11-12) ◽  
pp. 811-815
Author(s):  
Lisa Marie Rickerts ◽  
Tassilo-Maria Schimmelpfennig ◽  
Ivan Perfilov
Keyword(s):  
Dental Implant ◽  
High Precision ◽  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Tool Electrode ◽  
Process Variables ◽  
Dry Edm ◽  
Edm Process ◽  
Erosion Zone

Die Funkenerosion wird in der Dentalindustrie zur Herstellung von hochpräzisem Zahnersatz aus CrCoMo eingesetzt. Dieser Beitrag stellt die Strategie und Technologie der halbtrockenen Funkenerosion von CrCoMo-Dentalbrücken vor. Als Dielektrikum kommt ein Wasser-Luft-Gemisch zum Einsatz, dass durch ein speziell entwickeltes Spülsystem durch die Kupfer-Werkzeugelektrode in die Erodierzone injiziert wird. Um die Effizienz des halbtrockenen Erodierprozesses zu erhöhen, werden die grundlegenden Zusammenhänge zwischen ausgewählten Prozessgrößen experimentell untersucht. Electrical discharge machining (EDM) is used in dental industry for the manufacturing of high-precision dentures from CrCoMo. This article presents the strategy and technology of near-dry EDM of CrCoMo dental bridges. A water-air mixture, which is injected through the copper tool electrode into the erosion zone by a specially developed flushing system is used as dielectric. In order to increase the efficiency of the near-dry EDM process, the basic relationships between the influencing process variables are investigated experimentally.

Electrochemical Machining of Micro-Structures With Nanosecond Pulses

2007 ◽  
Author(s):  
Zhaoyang Zhang ◽  
Di Zhu ◽  
Ningsong Qu ◽  
Kun Wang
Keyword(s):  
Pulse Duration ◽  
Electrochemical Machining ◽  
Experimental System ◽  
Machining Accuracy ◽  
Tool Electrode ◽  
Voltage Amplitude ◽  
Nanosecond Pulses ◽  
Micro Ecm ◽  
Micro Tool ◽  
Micro Structures

Electrochemical machining (ECM) is considered an advanced and promising technique due to several special advantages, such as non-contact machining without cutting force, no tool wear and heat-affected layer, etc. Base on the experimental results of micro-ECM, the influence of predominant process parameters, i.e. electrolyte concentration, pulse duration, period and voltage amplitude of power supply, on machining accuracy were investigated and discussed. Experimental showed that lower voltage amplitude and shorter pulse duration in micro-ECM process could produce more accurate micro structure shape. Using the self-developed experimental system, the micro tool-electrode and the complex micro-structures were sequentially machined. Upon the application of ultrashort voltage pulses, the letters with 20μm in line width were fabricated stably by the W tool electrode with 10μm diameter.

Study on Micro Electrochemical Machining Technology and its Influencing Factors

2013 ◽  
Vol 395-396 ◽  
pp. 1062-1065 ◽  
Author(s):  
Xiao Hai Li ◽  
Li Ping Zhao ◽  
Ying Chun Shi ◽  
Li Jie Zhao
Keyword(s):  
High Frequency ◽  
Short Pulse ◽  
Influence Factors ◽  
Electrochemical Machining ◽  
Optical Encoder ◽  
Loop Control ◽  
Micro Ecm ◽  
Micro Parts ◽  
Micro Hole ◽  
Meso Scale

Electrochemical machining (ECM) is an anodic dissolution process of metal as anode ion by ion, and micro-ECM is a promising micromachining method at micro to meso-scale. Thus, a micro-ECM setup was developed to fabricate micro parts and explore the feasibility of micro-ECM at micro to meso-scale, including the design of high-frequency micro-energy pulse power supply. By using the detection unit of machining state and optical encoder, a closed loop control system for micro-ECM was developed. Under low concentration of passivating electrolyte, low machining voltage, micro rotating electrode and high-frequency short-pulse current, the machining gap can be reduced to about 10μm. The influence factors of the additives and the rotation of micro electrode on micro ECM were analysed by experiments. A micro-hole about 30μm in diameter was drilled by the rotating micro electrode.

Scanning Micro-Electrochemical Machining Process for V-Shaped Grooves

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Hao Zhong ◽  
Hao Tong ◽  
Zhiqiang Wang ◽  
Yong Li ◽  
Yubin Pu
Keyword(s):  
Electrical Discharge Machining ◽  
High Surface ◽  
Electrochemical Machining ◽  
Machining Process ◽  
Tool Electrode ◽  
Microfluidic Chips ◽  
Long Distance ◽  
High Surface Quality ◽  
Micro Electrical Discharge Machining ◽  
The Given

Abstract Microstructures determine flow properties of microfluidic chip. Micromold forming is an effective method to realize mass manufacturing of microfluidic chips. This requires to machine some kind of special microstructure of high surface quality on a metal/alloy workpiece. Micro V-shaped grooves are the typical microstructures of the chip micromolds used for controlling microfluid or weld packaging. In this research, a scanning micro-electrochemical machining (ECM) process of V-shaped grooves is proposed using a tool electrode fabricated by micro–electrical discharge machining (EDM) on-machine. Theoretical and experimental research was conducted for achieving the V-shaped grooves with a given angle on die steel. A long-distance V-shaped groove with the given angle of 67 deg and the depth of 125 μm was successfully machined.

Optimization of electrochemical etching process for manufacturing of micro electrodes for micro-EDM application

2020 ◽  
pp. 095440542095896
Author(s):  
Sucharita Saha ◽  
Amit Kumar Ball ◽  
Arpita Mukherjee ◽  
Arjita Das ◽  
Saurav Halder ◽  
...  
Keyword(s):  
Electrical Discharge Machining ◽  
Electrochemical Etching ◽  
Etching Process ◽  
Tool Electrode ◽  
Micro Edm ◽  
Nano Scale ◽  
Geometrical Features ◽  
Edm Electrodes ◽  
Micro Parts ◽  
Metal Products

Application of Micro-Nano scale Electrical Discharge Machining is rapidly growing in manufacturing of metal products irrespective of its hardness having geometric features in range of micrometer to nanometer scale. To achieve such small geometrical features, smaller dimensional tool electrode is required. However fabrication of this tiny electrode with desired dimension and also handling of such tiny electrodes is a primary aspect that needs to be investigated systematically to use the Micro-Nano scale EDM in batch production of micro parts. In this work authors investigate the application of electrochemical etching process for fabricating EDM electrodes smaller than 10 µm. While the smallest electrode fabricated with the optimized parameter is 3.33 µm, their performance as electrode in micro-EDM has been studied systematically. To the best of authors’ knowledge such studies are not reported in the published literatures. However, the fabrication of such smaller size features by applying alternating current in ECE has been attempted previously but not for micro-EDM applications.

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