Spin Coating Deposition of c-Oriented Wurtzite Gallium Nitride Thin Film
Spin coating growth and characterisations ofc-oriented wurtzite structure gallium nitride (GaN) thin film on silicon (Si) substrate with (100) orientation was reported. The precursor solution consisted of a readily available gallium (III) nitrate hydrate powder, ethanol and diethanolamine as starting material, solvent and surfactant. All the structural and optical results showed thatc-oriented wurtzite GaN thin film was deposited on Si (100) substrate. Compared with earlier reported work using sol-gel deposition, significant improvements in the structural quality of the GaN thin film were observed. The FWHM value of the thin film was approximately 2.60°. The framework described here is both an easy in setup and simple method as compared to other method such as MBE, MOCVD, and radio frequency sputtering to producec-oriented wurtzite structure GaN thin film.