Micro Flow Sensor Based on Frequency Measurement of Micro Whistles
In this work, several millimeter sized micro whistles have been tested as potential frequency analog gas flow sensors. The characteristic curves of the whistles were systematically investigated as a function of geometrical dimensions, the kind of gas applied, and temperature. Both a micro¬phone and a PVDF foil were employed to record the frequencies. The relation be¬tween oscillation frequency and volume flow rate only shows a weak function of fluid properties and temperature. At a given flow rate, the difference of argon and nitrogen is 120 Hz on average, which is corresponding to 1.4 %. For air flow at a given flow rate, frequency rises approximately 380 Hz (2.73 %) per 10 °C. This kind of micro whistle could be employed as gas flow sensor which is insensitive to fluid properties.