Design and Simulation of a Z-Axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation Modes

2009 ◽  
Vol 60-61 ◽  
pp. 298-302 ◽  
Author(s):  
Xin Yan ◽  
Zhi Chun Ma ◽  
Xu Yuan Chen
Keyword(s):  
Harmonic Analysis ◽  
Modal Analysis ◽  
Proof Mass ◽  
Vibration Characteristics ◽  
Frame Structure ◽  
Sense Mode ◽  
Drive Mode ◽  
Sense Direction ◽  
Oscillation Modes ◽  
Micromachined Gyroscope

In this paper, a Z-axis micromachined gyroscope with a new decoupled design was presented. The gyroscope consists of dual proof mass, sense frame and drive frame structure. The sense frame is constrained in the sense direction and anchored on the substrate, which minimize the influence from the motion of the proof mass in the drive direction. The drive frame is also restricted to oscillate in the drive direction. ANSYS has been used to make modal analysis and harmonic analysis to determine the vibration characteristics of the decoupled gyroscope. We introduce the decoupling ratio (ηDtS) of drive mode to sense mode and the decoupling ratio (ηStD) of sense mode to drive mode to determine the decoupling design. The results show that the drive mode and the sense mode are well decoupled.

Design and Simulation of a Differential and Decoupled Micromachined Gyroscope

2011 ◽  
Vol 483 ◽  
pp. 674-678
Author(s):  
Yang Liu ◽  
Ling Yun Wang ◽  
Ting Ping Lei ◽  
Jiang Du ◽  
Yi Wen Jiang ◽  
...  
Keyword(s):  
Mode Frequency ◽  
Anodic Bonding ◽  
Sense Mode ◽  
Ansys Software ◽  
Drive Mode ◽  
Deep Reactive Ion Etching ◽  
Element Simulation ◽  
Micromachined Gyroscope ◽  
Gyroscope Sensor ◽  
Decoupled Structure

In this paper, a differential and decoupled micromachined gyroscope fabricated by through-etching the silicon substrate anodically bonded on the glass substrate was presented. The decoupled structure can make the sense mode frequency match with the drive mode frequency and reduce the quadrature error. The sensitivity is further improved by differential detection using antiphase oscillation of double masses along the drive axis. Finite-element simulation is performed with ANSYS software to analyze the vibration mode. The device employs silicon-on-glass gyroscope sensor chip processed with Deep Reactive Ion Etching (DRIE) and glass-silicon anodic bonding. Then it is tested at atmospheric pressure. Drive mode and sense mode are obtained as 2015 Hz and 1957 Hz which are closed to the simulated ones. Q factor of the drive and sense mode also can be gained as 56 and 3.4.

Design and Simulation of Capacitive Micromechaned Gyroscope

2011 ◽  
Vol 211-212 ◽  
pp. 909-913
Author(s):  
Yun Bo Shi ◽  
Xing Juan Zhao ◽  
Jun Tang ◽  
Jun Liu ◽  
Rui Rong Wang
Keyword(s):  
Atmospheric Pressure ◽  
Simulation Analysis ◽  
High Sensitivity ◽  
Drive Mode ◽  
Close Match ◽  
High Q ◽  
Air Damping ◽  
Large Numbers ◽  
Detection Mode ◽  
Micromachined Gyroscope

By researching and investigating the structure of capacitive gyroscopes, A novel capacitive micromachined gyroscope is proposed and the structure is designed. The method of electrostatic comber drive, capacitive detection of bar structure is used for the structure, and these make the gyroscope high sensitivity. The main air damping of the drive mode and detection mode is slide film damping, it is possible to make the gyroscope achieve high Q-values at atmospheric pressure. The decoupled gyroscope is designed, too. By large numbers of simulation analysis， frequencies of the first six steps mode are gained, nature frequencies of drive mode and sense mode of gyroscope are a close match, and rationality of the structure is validated. At last, the structure encapsulated is presented.

Modal Analysis of Axial Vibration of Long Pipeline Delivering Coal Slime in Power Plant

2015 ◽  
Vol 740 ◽  
pp. 112-115
Author(s):  
Qing Wei Shi ◽  
Ya Yun Liu ◽  
Xing Lu Liu ◽  
Xue Di Hao
Keyword(s):  
Finite Element ◽  
Power Plant ◽  
Modal Analysis ◽  
Element Model ◽  
Vibration Characteristics ◽  
Axial Vibration ◽  
Coal Slime ◽  
Pipeline Vibration ◽  
The Finite Element Model ◽  
Intense Vibration

Aiming at the problem of intense vibration of the long pipeline delivering coal slime in the power plant, the finite element model of pipeline is established and modal analysis is carried out by ANSYS. The natural frequency and vibration characteristics of axial vibration are obtained. The vibration characteristics are studied and different pipe segments that produce bigger vibration very easily in operation are determined. Theoretical guidance about pipeline vibration under the external load for further analysis is provided.

Base-Isolated Multi-Storey Reinforced Concrete Frame Structure Modal Analysis

2012 ◽  
Vol 204-208 ◽  
pp. 869-871
Author(s):  
Cai Hua Wang ◽  
Hui Jian Li ◽  
Jian Feng Wu
Keyword(s):  
Reinforced Concrete ◽  
Modal Analysis ◽  
Seismic Isolation ◽  
Base Isolation ◽  
Frame Structure ◽  
Reinforced Concrete Frame ◽  
Concrete Frame ◽  
Reinforced Concrete Frame Structure ◽  
Before And After ◽  
Isolation Device

The multi-storey reinforced concrete frame structure used lead rubber pad as the base isolation device. The paper had modal analysis of base-isolated multi-storey reinforced concrete frame structure using the ANSYS software. Comparing the frequency and vibration mode before and after isolation under El-Centro wave, It concluded the leader rubber pad have seismic isolation effect for multi-storey reinforced concrete frame structure .

scholarly journals Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 577 ◽  
Author(s):  
Muhammad Saqib ◽  
Muhammad Mubasher Saleem ◽  
Naveed Mazhar ◽  
Saif Awan ◽  
Umar Shahbaz Khan
Keyword(s):  
Resonant Frequency ◽  
Analytical Model ◽  
Actuation Voltage ◽  
High Gain ◽  
Sense Mode ◽  
Drive Mode ◽  
Mass System ◽  
Mems Gyroscope ◽  
Flat Region ◽  
Thermally Actuated

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11   f F and 862.13   f F is achieved corresponding to the sense mode amplitude of 0.15   μ m and 4.5   μ m at atmospheric air pressure and in a vacuum, respectively.

scholarly journals A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope

Micromachines ◽  
2019 ◽  
Vol 10 (4) ◽  
pp. 244
Author(s):  
Yang ◽  
Si ◽  
Han ◽  
Zhang ◽  
Ning ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Microelectromechanical Systems ◽  
Sense Mode ◽  
Drive Mode ◽  
Aln Film ◽  
Shape Structure ◽  
Mems Gyroscopes ◽  
Sense Electrode ◽  
Working Principle ◽  
Novel Design

This paper reports a novel design for the decoupling of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope is based on piezoelectric aluminum nitride (AlN) film, and the main structure is a mass hung by T-shape beams. A pair of parallel drive electrodes are symmetrically placed on the surface of the vertical bar for driving the oscillating mass. A serpentine sense electrode is placed on the lateral bar. When the gyroscope is oscillating in drive mode, charges with equal quantity and opposite sign will be polarized and distributed symmetrically along the lateral bar. These charges neutralize each other at the sense electrode. Therefore, no coupling signals can be detected from the sense electrode. This design can realize the decoupling between the drive mode and sense mode. In this work, the T-shape decoupled structure was designed as the key component of an AlN piezoelectric gyroscope and the whole structure was simulated by COMSOL Multiphysics 5.2a. The working principle of the decoupling is described in detail. Electrical properties were characterized by the dynamic signal analyzer. According to the test results, the drive mode and the sense mode are decoupled. The coefficient of orthogonal coupling is 1.55%.

Modal Analysis of Flexible Assembling Fixture for Aircraft Panel Component

2010 ◽  
Vol 97-101 ◽  
pp. 3392-3396
Author(s):  
Li Gang Qu ◽  
Ke Qiang Pan ◽  
Xin Chen
Keyword(s):  
Finite Element ◽  
Modal Analysis ◽  
Dynamic Characteristic ◽  
Natural Frequencies ◽  
Great Influence ◽  
Vibration Characteristics ◽  
Mode Shapes ◽  
Dynamic Vibration ◽  
Structural Weakness ◽  
Modal Vibration

The dynamic characteristic of flexible assembling fixture (FAF) for aircraft panel component is analysed by the method of finite element modal analysis. Consequently, the every order of natural frequencies and mode shapes of given different postures of the FAF are obtained. It structural weakness were pointed out through the analysis results of the modal vibration characteristics. The properties of mass and stiffness of the FAF's components are concurrently calculated, whose optimal matching and harmonizing with each other have great influence on the dynamic vibration characteristics of the FAF. As the results of these analysis, the design improving suggestion for the FAF is put forward.

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