Fabrication of Silicon Nanowires by Electroless Etching for Thermoelectric Application
The fabrication procedure of silicon nanowire thermoelectric device has been developed based on the electroless etching method. Under a fixed etching solution concentration ratio and the etching reaction temperature, silicon nanowire arrays of different lengths manufactured at different etching time were investigated. The longer etching time results in the longer nanowire length. The silicon nanowire arrays were utilized to produce a silicon nanowire thermoelectric device. The I-V characteristics of the present SiNWs thermoelectric device were recorded under different heating temperatures, and the power outputs of silicon nanowire thermoelectric devices were calculated. The longer the silicon nanowire thermoelectric device lines, the greater the power output of thermoelectric device is. The SiNWs TED power output in the present study ranges from 1.62 to 7.2 nano-Watt with the chip size 2×2 cm2 while the applied temperature at 150 °C.