A Novel Approach for MEMS Vacuum Packaging

2013 ◽  
Vol 744 ◽  
pp. 169-173
Author(s):  
Cheng Gang Wang ◽  
Zhi Yin Gan ◽  
Xue Fang Wang ◽  
Dong Lin ◽  
Sheng Liu ◽  
...  
Keyword(s):  
Vacuum Packaging ◽  
Leak Rate ◽  
Packaging Process ◽  
Novel Approach ◽  
Current Design

MEMS vacuum packaging now is the impediment of the MEMS appliance in some specified fields. The major problem of current packaging approach is that the packaging process can not match the requirement of the ultra low leak. But the process now can not be improved with the existing technology. In this situation, authors proposed a novel approach for MEMS vacuum packaging, which can remarkably lower the leak rate. This paper analyzed the vacuum maintaining time of the vacuum packaging and compared the current design and new packaging method.

Simplified vacuum packaging process by gas gettering using the Au/Ta/Ti metal bonding layer

2021 ◽  
Author(s):  
S. Kariya ◽  
T. Matsumae ◽  
Y. Kurashima ◽  
H. Takagi ◽  
M. Hayase ◽  
...  
Keyword(s):  
Vacuum Packaging ◽  
Bonding Layer ◽  
Packaging Process ◽  
Metal Bonding

Measurement of Leak Rate for MEMS Vacuum Packaging

2008 ◽  
Author(s):  
Zhiyin Gan ◽  
Dexiu Huang ◽  
Xuefang Wang ◽  
Dong Lin ◽  
Sheng Liu
Keyword(s):  
Vacuum Packaging ◽  
Leak Rate

Quantifying Model Discrepancy in Coupled Multi-Physics Systems

2016 ◽  
Author(s):  
Samuel Friedman ◽  
Douglas Allaire
Keyword(s):  
Computational Models ◽  
Detailed Balance ◽  
Sampling Strategy ◽  
Design Strategies ◽  
Detailed Balance Condition ◽  
Synergistic Interactions ◽  
Novel Approach ◽  
Current Design ◽  
Model Discrepancy ◽  
Multidisciplinary System

Current design strategies for multi-physics systems seek to exploit synergistic interactions among disciplines in the system. However, when dealing with a multidisciplinary system with multiple physics represented, the use of high-fidelity computational models is often prohibitive. In this situation, recourse is often made to lower fidelity models that have potentially significant uncertainty associated with them. We present here a novel approach to quantifying the discipline level uncertainty in coupled multi-physics models, so that these individual models may later be used in isolation or coupled within other systems. Our approach is based off of a Gibbs sampling strategy and the identification of a necessary detailed balance condition that constrains the possible characteristics of individual model discrepancy distributions. We demonstrate our methodology on both a linear and nonlinear example problem.

scholarly journals Grayscale-patterned metal-hydrogel-metal microscavity for dynamic multi-color display

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Jian Zhang ◽  
Dandan Wang ◽  
Yunbin Ying ◽  
Hao Zhou ◽  
Xiaokai Liu ◽  
...  
Keyword(s):  
Photonic Devices ◽  
Visible Range ◽  
Colorimetric Sensing ◽  
Optical Resonance ◽  
Metal Insulator ◽  
Color Display ◽  
Tunable Materials ◽  
Novel Approach ◽  
Metal Insulator Metal ◽  
Current Design

Abstract Dynamic structural color based on tunable optical resonance plays a key role in applications including encryption visualization, camouflage and colorimetric sensing. However, the current design requires either complex growth processes of the high-quality tunable materials or complicated circuit designs. This work makes a humidity-swelling hydrogel layer for metal–insulator–metal (MIM) structure in the dynamic multi-color display. Here, polyvinyl alcohol (PVA) hydrogel structure is patterned through grayscale e-beam lithography and the controlled PVA thickness leads the programmable reflective resonance covering the entire visible range. By varying the ambient humidity between 9.8 and 90.1% RH, the reflective resonance of the structure is tailored across a wavelength range over 100 nm. Our materials platform of humidity-sensitive hydrogel resist presents a novel approach of the stepwise and reversible optical tunability for photonic devices.

A Compressible Permeation Approach to Elastomeric Space Seal Characterization

2012 ◽  
Vol 134 (5) ◽  
Author(s):  
Nicholas G. Garafolo ◽  
Christopher C. Daniels
Keyword(s):  
Exact Analytical Solution ◽  
Transport Equations ◽  
Leak Rate ◽  
Novel Approach ◽  
Face Seals ◽  
Practical Tool ◽  
Manned Space ◽  
The One ◽  
Elastomeric Seals

The development of elastomeric face seals is imperative for NASA’s manned space flight program. Lacking in the development of state-of-the-art space seals was a technique for predicting the performance of candidate designs prior to experimental characterization. To this end, a physics-based model for compressible permeation in elastomeric face seals was developed to provide a predictive methodology for designers and researchers. In this novel approach for seal research, compressibility effects and the dependence of permeability on pressure was retained. Two independent permeation parameters arose from an exact, analytical solution to the one-dimensional permeation transport equations. The application of the derived transport equations and the developed permeability coefficients resulted in a noteworthy and practical tool for seal researchers to predict the leak rate of alternative geometries. For an example in the methodology, the characterization of a candidate space seal material, silicone elastomer S0383-70, was performed. Results illustrated the model’s capability for capturing the permeation leak rate of elastomeric seals for various pressure differentials.

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