The Influences of Process Parameters on Properties of CrNx Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2014 ◽  
Vol 908 ◽  
pp. 38-41
Author(s):  
Xiang Min Xu ◽  
Hao Zhang ◽  
Yi Bin Jin ◽  
Hao Chen Zhang ◽  
Shu Wang Duo
Keyword(s):  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Process Parameters ◽  
Flux Ratio ◽  
Preferred Orientation ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Surface Morphologies ◽  
Crn Coatings

CrNx coatings were prepared by closed filed unbalanced magnetron sputtering (CFUMS), and the effects of N2 flux ratio and bias voltage on CrN coatings were investigated. Results showed that the phase in coatings was the coexistence of CrN, Cr2N and Cr, and CrN(111) always showed an intensive preferred orientation in both cases, but CrN(200) enhanced with the rise of bias voltage. The hardness of coatings decreased with an increasing N2 flux ratio, while improved with an increasing bias voltage. The grain edges were polished off and the boundaries became blurred when higher bias voltage was applied. All in all, the surface morphologies of CrN coatings became flatter and denser with both increasing N2 content and bias voltage, respectively.

Effect of Temperature on Structure and Mechanical Properties of CrN Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 190-193
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Grain Shape ◽  
Effect Of Temperature ◽  
Closed Field ◽  
Columnar Crystal ◽  
Crn Coating ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crn Coatings

CrN coatings were fabricated by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of substrate temperature (TS) on phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the phase in coatings, which has little to do with TS, was the coexistence of Cr, Cr2N and CrN. The grain shape of the columnar crystal CrN coating was the coexistence of pyramidal and plane topography. The hardness and adhension of CrN coating first increased with the rise of temperature, then decreased when the values of both them were constant ones. It has the highest hardness and bonding strength simultaneously at 300°C.

Characteristics of Palladium Doped Amorphous Carbon Films Fabricated by Unbalanced Magnetron Sputtering System

2021 ◽  
Vol 16 (6) ◽  
pp. 905-910
Author(s):  
Yong Seob Park ◽  
Young-Baek Kim ◽  
Sung Hwan Hwang ◽  
Jaehyeong Lee
Keyword(s):  
Friction Coefficient ◽  
Magnetron Sputtering ◽  
Bias Voltage ◽  
Amorphous Carbon ◽  
Closed Field ◽  
Hydrogenated Amorphous Carbon ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Dc Bias ◽  
Hydrogenated Amorphous

Generally, hydrogenated amorphous carbon (a-C:H) has been shown to have a low friction coefficient, high hardness, and low abrasive wear rate. In this study, Pd doped hydrogenated amorphous carbon (a-C:H:Pd) fabricated by the closed-field unbalanced magnetron sputtering (CFUBMS) system with two targets of carbon and palladium in Ar/C2H2 plasma. The tribological and lubricant characteristics for a-C:H:Pd fabricated with various DC bias voltage from 0 to −200 V were investigated. We obtained a hardness up to 27.5 GPa and friction coefficient lower than 0.1. The atomic percentage of Pd related to the lubricant properties increased up to 22% at −200 V. In the results, the Pd doping in the a-C:H films improved the tribological and lubricant properties. The friction coefficient value of a-C:H:Pd films was decreased, the hardness and elastic modulus were increased, and also the adhesion properties was improved with the increase of negative DC bias voltage.

Effect of N2 Flow Rate on Structure and Mechanical Properties of CrN Coatings Prepared by Closed Field Unbalanced Magnetron Sputtering

2013 ◽  
Vol 591 ◽  
pp. 95-98 ◽  
Author(s):  
Hao Zhang ◽  
Shu Wang Duo ◽  
Xiang Min Xu ◽  
Ting Zhi Liu
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Flow Rate ◽  
Closed Field ◽  
Nitrogen Flow ◽  
Columnar Crystal ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Crystal Preferred Orientation ◽  
Crn Coatings

CrN coatings were deposited by Closed Filed Unbalanced Magnetron Sputtering (CFUMS). The effect of N2 flow rate on composition, phase components, morphologies and mechanical properties of CrN coatings were studied. The results show that the deposition rate of CrN coatings declined with the increase of nitrogen flow percentage in a Ar/N2 mixture atmosphere. When the nitrogen flow percentage reached 50% or more, the Cr and N atomic ratio of CrN coatings is close to 1:1. The phase in coatings was the coexistence of Cr, Cr2N and CrN, but the crystal preferred orientation changed significantly with the different N2 flow rates. The columnar crystal CrN coating with low N2 flow rate was denser. The hardness and adhension of CrN coatings have no direct relationship with N2 flow rate.

Structural and Mechanical Properties of Multilayer TiN/CrN Coatings

2007 ◽  
Author(s):  
Manohar S. Konchady ◽  
Sergey Yarmolenko ◽  
Devdas M. Pai ◽  
Jag Sankar
Keyword(s):  
Mechanical Properties ◽  
Layer Thickness ◽  
Single Layer ◽  
Preferred Orientation ◽  
X Ray Diffraction ◽  
Unbalanced Magnetron Sputtering ◽  
Deposition Parameters ◽  
Unbalanced Magnetron ◽  
Crn Coatings ◽  
Modulation Wavelength

Multilayer and superlattice coatings of TiN/CrN coating are deposited on Si(100) substrate at different modulation wavelength by reactive unbalanced magnetron sputtering and characterized using X-ray diffraction, nanoindentation, AFM. Nano-roughness of films is in good correlation with hardness and modulus and this effect has been used for optimization of deposition parameters. Preliminary results have shown slightly better mechanical properties for multilayered TiN/CrN coatings compared to single layer TiN and CrN coatings. The XRD results have shown a preferred orientation in <100> direction for TiN/CrN multilayer coatings at modulation wavelengths below 80 nm. At 100 nm layer thickness, TiN revealed small amount of crystals with <111> orientation and their content significantly increases with increase in layer thickness while CrN layers only show preferred orientation of <100>. Multilayered coatings exhibit better mechanical properties due to presence of large number of interfaces which act as barrier to dislocations. Fracture toughness and tribological properties of these coatings are also expected to show significant improvement and the investigation in this area is under progress.

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