The Optimization of TiN Film Deposited by DC Magnetron Sputtering Provided for Al Diffusion Barrier

2010 ◽  
Vol 93-94 ◽  
pp. 578-582
Author(s):  
A. Pankiew ◽  
Win Bunjongpru ◽  
N. Somwang ◽  
S. Porntheeraphat ◽  
Sirapat Pratontep ◽  
...  
Keyword(s):  
Electrical Resistivity ◽  
Magnetron Sputtering ◽  
Flow Rate ◽  
Diffusion Barrier ◽  
Rate Ratio ◽  
Growth Conditions ◽  
Flow Rate Ratio ◽  
Dc Magnetron Sputtering ◽  
Tin Films ◽  
Tin Film

Titanium nitride (TiN) film has been widely used as a diffusion barrier layer for VLSI contact metallization because TiN is an excellent barrier against inter-diffusion between Al and Si substrate or silicide. In this work, we studied the properties of TiN films deposited by DC magnetron sputtering with varying N2:Ar flow rate ratio in order to optimize growth conditions and film properties provided for Al diffusion barrier purpose. The TiN films were deposited at the constant pressure level and sputtering time. The crystalline orientation, composition and electrical properties of deposited TiN films were characterized by XRD, AES-depth profile and Four Point Probe measurement, respectively. The XRD results show that the deposited TiN film has two preferred orientations of TiN(111) and TiN(200) planes. The highest intensity of the TiN(111) plane was obtained when the N2:Ar flow rate ratio was 3:1. The electrical resistivity was increased when the N2:Ar flow rate ratio was decreased. The minimum electrical resistivity is 127.8 μΩ-cm when the N2:Ar flow rate ratio is 3:1.

Determination of flow rate ratio for plate valve operating in two-phase medium

1989 ◽  
Vol 25 (7) ◽  
pp. 394-396
Author(s):  
V. E. Shcherba ◽  
I. S. Berezin ◽  
S. S. Danilenko ◽  
I. E. Titov ◽  
P. P. Filippov
Keyword(s):  
Flow Rate ◽  
Rate Ratio ◽  
Flow Rate Ratio ◽  
Two Phase ◽  
Plate Valve ◽  
Phase Medium

Effect of the argon/monomer flow-rate ratio on the flowability trend of PECVD-processed micropowder

2017 ◽  
Vol 328 ◽  
pp. 480-487 ◽  
Author(s):  
V.R. Giampietro ◽  
M. Gulas ◽  
P. Rudolf von Rohr
Keyword(s):  
Flow Rate ◽  
Rate Ratio ◽  
Flow Rate Ratio

Influence of Pulsed Gas Feeding on Surface Defects and Mechanical Properties of Ti/TiN Multilayered Films Deposited by Ion Beam Assisted Magnetron Sputtering

2014 ◽  
Vol 488-489 ◽  
pp. 48-52
Author(s):  
Zhi Qiang Fu ◽  
Yi Ren ◽  
Cheng Biao Wang ◽  
Wen Yue ◽  
Song Sheng Lin
Keyword(s):  
Magnetron Sputtering ◽  
Flow Rate ◽  
Surface Defects ◽  
Ion Beam ◽  
Ion Current ◽  
Key Factors ◽  
Multilayered Films ◽  
Factors Affecting ◽  
Tin Films ◽  
Sputtering Power

The influence of sputtering power, N2 flow rate, ion current and substrate temperature on the monolayer TiN films deposited by ion beam assisted magnetron sputtering and the effect of the on-off ratio and deposition period on the multilayered Ti/TiN films was studied. It was found that the key factors affecting surface defects of monolayer TiN films are sputtering power and N2 flow rate while ion current is the most significant factor affecting the hardness of monolayer TiN films. The surface defects can be greatly inhibited by pulsed gas feeding. The adhesion and hardness of the multilayered Ti/TiN films is improved with increasing on-off ratio or decreasing deposition period; the on-off ratio has a negligible effect on the surface defects of the multilayered Ti/TiN films while the surface defects of the multilayered Ti/TiN films become more obvious at a long deposition period.

Technological Features of the Thick Tin Film Deposition by with Magnetron Sputtering Form Liquid-Phase Target

2018 ◽  
Vol 781 ◽  
pp. 8-13 ◽  
Author(s):  
Mariya Makarova ◽  
Konstantin Moiseev ◽  
Alexander Nazarenko ◽  
Petr Luchnikov ◽  
Galina Dalskaya ◽  
...  
Keyword(s):  
Liquid Phase ◽  
Magnetron Sputtering ◽  
Deposition Rate ◽  
Amorphous Structure ◽  
Film Deposition ◽  
High Deposition Rate ◽  
Crucible Material ◽  
Tin Films ◽  
X Ray ◽  
Tin Film

Technological features of obtaining of tin films in a vacuum by liquid-phase target magnetron sputtering were reviewed. With high deposition rate the white color tin coating with amorphous structure is formed on the substrate. X-ray microanalysis of the obtained tin films showed the presence of micro-and nanoparticles of an impurity of the crucible material in the structure of the films. The use of the tantalum crucible with liquid-phase target magnetron sputtering with deposition rate of 3.2 μm / min allows obtaining ultra-pure, continuous, homogeneous tin film on a stationary substrate without impurity material of the crucible.

Effects of Respiration and Gravity on Infradiaphragmatic Venous Flow in Normal and Fontan Patients

Circulation ◽  
2000 ◽  
Vol 102 (suppl_3) ◽  
Author(s):  
Tain-Yen Hsia ◽  
Sachin Khambadkone ◽  
Andrew N. Redington ◽  
Francesco Migliavacca ◽  
John E. Deanfield ◽  
...  
Keyword(s):  
Flow Rate ◽  
Rate Ratio ◽  
Venous Return ◽  
Fontan Circulation ◽  
Flow Rate Ratio ◽  
Venous Flow ◽  
Beneficial Effects ◽  
In Series ◽  
Expiratory Flow ◽  
Fontan Patients

Background —In the Fontan circulation, pulmonary and systemic vascular resistances are in series. The implications of this unique arrangement on infradiaphragmatic venous physiology are poorly understood. Methods and Results —We studied the effects of respiration and gravity on infradiaphragmatic venous flows in 20 normal healthy volunteers (control) and 48 Fontan patients (atriopulmonary connection [APC] n=15, total cavopulmonary connection [TCPC] n=30). Hepatic venous (HV), subhepatic inferior vena caval (IVC), and portal venous (PV) flow rates were measured with Doppler ultrasonography during inspiration and expiration in both the supine and upright positions. The inspiratory-to-expiratory flow rate ratio was calculated to reflect the effect of respiration, and the supine-to-upright flow rate ratio was calculated to assess the effect of gravity. HV flow depended heavily on inspiration in TCPC compared with both control and APC subjects (inspiratory-to-expiratory flow rate ratio 3.4, 1.7, and 1.6, respectively; P <0.0001). Normal PV flow was higher in expiration, but this effect was lost in TCPC and APC patients (inspiratory-to-expiratory flow rate ratio 0.8, 1.0, and 1.1, respectively; P =0.01). The respiratory influence on IVC flow was the same in all groups. Gravity decreased HV flow more in APC than in TCPC patients (supine-to-upright flow rate ratio 3.2 versus 2.1, respectively; P <0.04) but reduced PV flow equally in all groups. Conclusions —Gravity and respiration have important influences on infradiaphragmatic venous return in Fontan patients. Although gravity exerts a significant detrimental effect on lower body venous return, which is more marked in APC than in TCPC patients, the beneficial effects of respiration in TCPC patients are mediated primarily by an increase in HV flow. These effects may have important short- and long-term implications for the hemodynamics of the Fontan circulation.

scholarly journals Numerical and experimental investigation on the depressurization capacity of a new type of depressure-dominated jet mill bit

2020 ◽  
Vol 17 (6) ◽  
pp. 1602-1615
Author(s):  
Xu-Yue Chen ◽  
Tong Cao ◽  
Kai-An Yu ◽  
De-Li Gao ◽  
Jin Yang ◽  
...  
Keyword(s):  
Flow Rate ◽  
Rate Ratio ◽  
Area Ratio ◽  
Low Flow ◽  
Flow Rate Ratio ◽  
Cuttings Transport ◽  
Horizontal Drilling ◽  
Hole Cleaning ◽  
Bottom Hole ◽  
New Type

AbstractEfficient cuttings transport and improving rate of penetration (ROP) are two major challenges in horizontal drilling and extended reach drilling. A type of jet mill bit (JMB) may provide an opportunity to catch the two birds with one stone: not only enhancing cuttings transport efficiency but also improving ROP by depressuring at the bottom hole. In this paper, the JMB is further improved and a new type of depressure-dominated JMB is presented; meanwhile, the depressurization capacity of the depressure-dominated JMB is investigated by numerical simulation and experiment. The numerical study shows that low flow-rate ratio helps to enhance the depressurization capacity of the depressure-dominated JMB; for both depressurization and bottom hole cleaning concern, the flow-rate ratio is suggested to be set at approximately 1:1. With all other parameter values being constant, lower dimensionless nozzle-to-throat-area ratio may result in higher depressurization capacity and better bottom hole cleaning, and the optimal dimensionless nozzle-to-throat-area ratio is at approximately 0.15. Experiments also indicate that reducing the dimensionless flow-rate ratio may help to increase the depressurization capacity of the depressure-dominated JMB. This work provides drilling engineers with a promising tool to improve ROP.

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