A Novel Passive Wireless Humidity Sensor Based on a Dual-Metal Inductor
2014 ◽
Vol 609-610
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pp. 972-976
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Keyword(s):
This paper describes a wireless, passive humidity sensor, based upon an inductor-capacitor circuit. An inductor with a dual-metal structure is employed to reduce the size of the chip and decrease the complexity of the process. This paper analyzes the shortcomings of conventional sensors and gives a novel structure to overcome these disadvantages, and also use ADS to simulate and verify the feasibility of the new structure. Finally this paper presents a detail fabrication process of this novel sensor. According to the wireless applications, the LC resonant frequency of the LC circuit was designed at 30 ~ 150 and 350~450MHz.
Keyword(s):
2017 ◽
Vol 9
(7)
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pp. 1467-1471
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2018 ◽
Vol 7
(2.21)
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pp. 151
2021 ◽
Vol 0
(1)
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pp. 106-110
Keyword(s):
2021 ◽
2017 ◽
Vol 53
(6)
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pp. 1-4
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