Doping of Silicon Carbide by Ion Implantation
2001 ◽
Vol 353-356
◽
pp. 549-554
◽
2003 ◽
Vol 21
(4)
◽
pp. 1375
◽
Keyword(s):
2009 ◽
Vol 267
(8-9)
◽
pp. 1294-1298
◽
Keyword(s):
2015 ◽
Vol 821-823
◽
pp. 411-415
Keyword(s):
1992 ◽
Vol 65
(1-4)
◽
pp. 345-351
◽
1998 ◽
Vol 141
(1-4)
◽
pp. 663-669
◽
Keyword(s):