Preparation of FeCoZrBCu Thin Films and their Effect of Microstructure on Magnetic Properties
2007 ◽
Vol 546-549
◽
pp. 2163-2166
In this work, (Fe,Co)–Zr–B–Cu films have been deposited on glass and Si substrates by DC magnetron sputtering method. X-ray diffraction analysis was used to identify the structure of the films. A transmission electron microscope (TEM) was employed to observe the microstructure for the films. Magnetic properties at room temperature were investigated by a Vibrating Sample Magnetometer (VSM). It was obtained that the as-deposited films on glass and Si substrates were in an amorphous state. In addition, it has been found that the coercivity is dependent on film thicknesses.