4H-SiC Bulk Growth Using High-Temperature Gas Source Method

2014 ◽  
Vol 778-780 ◽  
pp. 51-54 ◽  
Author(s):  
Yuichiro Tokuda ◽  
Jun Kojima ◽  
Kazukuni Hara ◽  
Hidekazu Tsuchida ◽  
Shoichi Onda

Our latest results of SiC bulk growth by High-Temperature Gas Source Method are given in this paper. Based on Mullins-Sekerka instability, optimal growth conditions to preclude dendrite crystals, which are one of the pending issues for high-speed bulk growth, was studied. First, the simulation studies showed that high temperature gradient in a growing crystal is required for high-speed bulk growth without dendrite crystals. Second, high-speed bulk growth was demonstrated under high temperature gradient.

2014 ◽  
Vol 7 (6) ◽  
pp. 065502 ◽  
Author(s):  
Norihiro Hoshino ◽  
Isaho Kamata ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Naohiro Sugiyama ◽  
...  

2020 ◽  
Vol 1004 ◽  
pp. 5-13
Author(s):  
Yuichiro Tokuda ◽  
Norihiro Hoshino ◽  
Hironari Kuno ◽  
Hideyuki Uehigashi ◽  
Takeshi Okamoto ◽  
...  

The process conditions for fast growth of 4 in. 4H-polytype SiC (4H-SiC) single crystals were studied for high-temperature gas source method. Prior to experiments, crystal growth simulations were conducted to investigate the influence of vertical gas-flow velocity on the radial distribution of the growth rate. Crystal growth experiments were performed using the crucibles designed for 4 in. crystal growth following the simulation studies. By investigating growth rate as functions of the input partial pressure of source gases and temperatures of growing surfaces, expressions for the growth rate of 4-in. crystals were derived. We also clarified the optimal conditions for single-crystal growth. Finally, fast growth of 4 in. 4H-SiC crystals with uniform shape was demonstrated.


2015 ◽  
Vol 821-823 ◽  
pp. 104-107 ◽  
Author(s):  
Jun Kojima ◽  
Emi Makino ◽  
Yuichiro Tokuda ◽  
Naohiro Sugiyama ◽  
Notihiro Hoshino ◽  
...  

This article gives the results of crystal growth by a High-Temperature Gas Source Method such as HTCVD. It was reported that clusters were formed and were an important factor of the growth in HTCVDs, and some influences of them were investigated. The difference between the model with and without clustering was compared. The experimental growth rates corresponded to the cluster model, and this indicated that clusters affect the crystal growth. Relations between the experimental growth rate and the growth temperature as a function of gas flow ratio were investigated. The gas flow ratio was defined: (SiH4+C3H8) / (SiH4+C3H8+H2). Maximum growth rate was 2.3mm/h under high source gas ratio. At present, a Φ75mm×54mm sized ingot has been developed.


2016 ◽  
Vol 858 ◽  
pp. 29-32 ◽  
Author(s):  
Norihiro Hoshino ◽  
Isaho Kamata ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Naohiro Sugiyama ◽  
...  

Limitations in the very fast growth of 4H-SiC crystals are surveyed for a high-temperature gas source method. The evolution of macro-step bunching and void formation in crystal growth is investigated by changing the partial pressures of the source gases and crystal rotation speeds. The variation in macro-step formation depending on radial positions, where step-flow or spiral growth governs, of a grown crystal is also revealed. Based on the relation between growth conditions and macro-step bunching, a trade-off between growth rate enhancement and crystal quality and a method to improve such trade-off are discussed. Nitrogen at a high concentration under very high growth rates in the high-temperature gas source method is also investigated.


2016 ◽  
Vol 858 ◽  
pp. 61-64 ◽  
Author(s):  
Isaho Kamata ◽  
Norihiro Hoshino ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Naohiro Sugiyama ◽  
...  

This paper investigates the quality of 4H-SiC crystals grown at a very fast growth rate (> 2.5 mm/h) using a high-temperature gas source method. Differences in nitrogen doping efficiency were clarified in facet and step-flow regions. In case for growth in the macro-step bunching mode, doping fluctuation and void formation were observed in the macro-step bunching region. Propagation of threading screw dislocations (TSDs) in the grown crystal was also investigated by synchrotron X-ray topography.


2014 ◽  
Vol 778-780 ◽  
pp. 55-58 ◽  
Author(s):  
Norihiro Hoshino ◽  
Isaho Kamata ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Jun Kojima ◽  
...  

Possibilities of very fast 4H-SiC crystal growth using a high-temperature gas source method are surveyed by computational simulation and experimental studies. The temperature range suitable to obtain high growth rates are investigated by simulating temperature dependences of growth rates for H2+SiH4+C3H8 and H2 +SiH4+C3H8+HCl gas systems. Simulation and experimental results demonstrate that an increase in source gas flow rates as well as gas-flow velocities enhance growth rates. High growth rates exceeding 1 mm/h are experimentally obtained using both gas systems. Single crystal growth on a 3-inch diameter seed crystal is also demonstrated.


Author(s):  
Guanghua Wei ◽  
Ronghui Ma ◽  
Hui Zhang ◽  
Lili Zheng

Edge-defined Film-fed Growth (EFG) is a promising technology for production of silicon wafers with minimum loss of silicon material for photovoltaic applications. The growth of the hollow tubes by the EFG method is a very high temperature gradient along the direction of tube growth at the melt-solid interface. As this high temperature gradient is necessary to sustain the high speed of silicon growth through dissipating latent heat at the melt-solid interface, it generates substantial amount of thermal stresses that are associated with defect generation and deformation of the structure. With increase of the tube diameter and reduction of wall thickness, the large thermal stresses lead to significant buckling of the tube. In this study, the buckling behavior of the growing silicon tube is studied experimentally by monitoring deflection of two pairs of opposite faces of an octagonal tube during the growth. Four capacitance sensors were placed on a fixed plane normal to the translation of the tube to measure the varying thickness of the air between the sensor and the tube surface throughout the tube growth. The recorded data reveal the buckling behavior of tubes for several growth runs. Despite the different growth conditions in the EFG systems, similar patterns of buckling behavior have been observed in octagonal silicon tubes with face width of 12.5 cm. A typical buckling pattern observed can be divided into three distinctively different stages, namely seed holder-influenced stage, tube growth stage, and a random fluctuation stage. Each stage has different amplitude of deflection and covers different length of the tube. More interestingly, the recorded surface deflection reveals the displacement of the center of the tube, suggesting off-centered growth and possible instability of the meniscus. It is considered that these mechanisms may contribute to the special buckling pattern observed during growth.


2020 ◽  
Vol 13 (9) ◽  
pp. 095502
Author(s):  
Norihiro Hoshino ◽  
Isaho Kamata ◽  
Takahiro Kanda ◽  
Yuichiro Tokuda ◽  
Hironari Kuno ◽  
...  

2018 ◽  
Vol 924 ◽  
pp. 180-183
Author(s):  
Isaho Kamata ◽  
Norihiro Hoshino ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Takahiro Kanda ◽  
...  

Synchrotron X-ray topography was carried out for 4H-SiC crystals grown by high-temperature gas source method, and transmission topography analysis with g= or 0004 was carried out for the cross-sectional samples. Dislocation contrasts extended in the growth direction were observed and the propagation behavior of threading screw dislocations (TSDs), threading edge dislocations (TEDs), basal plane dislocations (BPDs) and stacking faults (SFs) in the facet and step-flow regions were discussed. The propagation of dislocations in the fast grown crystal with a growth rate of 3.1mm/h was also evaluated by cross-sectional topography.


2014 ◽  
Vol 778-780 ◽  
pp. 59-62 ◽  
Author(s):  
Isaho Kamata ◽  
Norihiro Hoshino ◽  
Yuichiro Tokuda ◽  
Emi Makino ◽  
Jun Kojima ◽  
...  

This paper reports on evidence of high-quality and very fast 4H-SiC crystal growth achieved using a high-temperature gas source method. The formation of threading screw dislocations (TSDs) during crystal growth was examined by comparing synchrotron X-ray topography images taken for a seed and grown crystals, while the generation of a high density of new TSDs is observed under improper growth condition. High-quality crystal growth retaining the TSD density of the seed crystal was accomplished under an improved condition, even for a very high growth rate of 2.1 mm/h.


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